| Patent | Date |
|---|
Wafer inspection system, wafer inspection apparatus and prober
Grant 11,061,071 - Hagihara , et al. July 13, 2 | 2021-07-13 |
Wafer Inspection System
App 20210190861 - Hagihara; Junichi ; et al. | 2021-06-24 |
Test head and wafer inspection apparatus
Grant 10,976,364 - Hagihara , et al. April 13, 2 | 2021-04-13 |
Wafer Inspection System, Wafer Inspection Apparatus And Prober
App 20200400743 - Hagihara; Junichi ; et al. | 2020-12-24 |
Test Head And Wafer Inspection Apparatus
App 20200348358 - Hagihara; Junichi ; et al. | 2020-11-05 |
Wafer inspection system, wafer inspection apparatus and prober
Grant 10,753,972 - Hagihara , et al. A | 2020-08-25 |
Wafer Inspection System, Wafer Inspection Apparatus And Prober
App 20200064400 - Hagihara; Junichi ; et al. | 2020-02-27 |
Wafer Inspection System, Wafer Inspection Apparatus And Prober
App 20170234924 - Hagihara; Junichi ; et al. | 2017-08-17 |
Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatus
Grant 9,671,459 - Hagihara , et al. June 6, 2 | 2017-06-06 |
Semiconductor Inspection System And Method For Preventing Condenation At Interface Part
App 20150145540 - Komatsu; Shigekazu ; et al. | 2015-05-28 |
Maintenance Carriage For Wafer Inspection Apparatus And Maintenance Method For Wafer Inspection Apparatus
App 20150115991 - Hagihara; Junichi ; et al. | 2015-04-30 |
Probe
Grant 8,766,658 - Komatsu July 1, 2 | 2014-07-01 |
Structure of probe card for inspecting electrical characteristics of object to be inspected
Grant 8,723,544 - Komatsu , et al. May 13, 2 | 2014-05-13 |
Holding member for use in test and method for manufacturing same
Grant 8,468,690 - Kumagai , et al. June 25, 2 | 2013-06-25 |
Method for evaluating semiconductor device
Grant 8,471,585 - Miyazono , et al. June 25, 2 | 2013-06-25 |
Probe Card
App 20120194213 - Komatsu; Shigekazu ; et al. | 2012-08-02 |
Actuator And Sheet-shaped Actuator
App 20120180475 - Shimizu; Masahiro ; et al. | 2012-07-19 |
Holding member for inspection, inspection device and inspecting method
Grant 8,159,245 - Komatsu , et al. April 17, 2 | 2012-04-17 |
Probe Card
App 20110234251 - Komatsu; Shigekazu ; et al. | 2011-09-29 |
Probe
App 20110115514 - Komatsu; Shigekazu | 2011-05-19 |
Method for evaluating semiconductor device
App 20110050269 - Miyazono; Mitsuyoshi ; et al. | 2011-03-03 |
Holding Member For Use In Test And Method For Manufacturing Same
App 20110025344 - Kumagai; Yasunori ; et al. | 2011-02-03 |
Probe method, prober, and electrode reducing/plasma-etching processing mechanism
Grant 7,750,654 - Okumura , et al. July 6, 2 | 2010-07-06 |
Circuit for protecting DUT, method for protecting DUT, testing apparatus and testing method
Grant 7,701,241 - Kumagai , et al. April 20, 2 | 2010-04-20 |
Probe card and probe device for inspection of a semiconductor device
Grant 7,692,435 - Komatsu , et al. April 6, 2 | 2010-04-06 |
Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object
Grant 7,688,088 - Komatsu , et al. March 30, 2 | 2010-03-30 |
Holding Member For Inspection, Inspection Device And Inspecting Method
App 20100033199 - Komatsu; Shigekazu ; et al. | 2010-02-11 |
Inspection apparatus, probe card and inspection method
Grant 7,586,317 - Komatsu , et al. September 8, 2 | 2009-09-08 |
Inspection Apparatus, Probe Card And Inspection Method
App 20090021272 - Komatsu; Shigekazu ; et al. | 2009-01-22 |
Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object
App 20080174325 - Komatsu; Shigekazu ; et al. | 2008-07-24 |
Inspection method and inspection equipment
Grant 7,301,357 - Shinozaki , et al. November 27, 2 | 2007-11-27 |
Circuit For Protecting Dut, Method For Protecting Dut, Testing Apparatus And Testing Method
App 20070223156 - Kumagai; Yasunori ; et al. | 2007-09-27 |
Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object
Grant 7,262,618 - Komatsu August 28, 2 | 2007-08-28 |
Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object
Grant 7,262,613 - Komatsu , et al. August 28, 2 | 2007-08-28 |
Probe card and probe device
App 20070182431 - Komatsu; Shigekazu ; et al. | 2007-08-09 |
Probe mark reading device and probe mark reading method
Grant 7,224,175 - Chaya , et al. May 29, 2 | 2007-05-29 |
Probe apparatus with optical length-measuring unit and probe testing method
Grant 7,221,177 - Komatsu , et al. May 22, 2 | 2007-05-22 |
Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object
App 20070063725 - Komatsu; Shigekazu ; et al. | 2007-03-22 |
Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object
App 20070040549 - Komatsu; Shigekazu | 2007-02-22 |
Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object
Grant 7,135,883 - Komatsu November 14, 2 | 2006-11-14 |
Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object
App 20060145716 - Komatsu; Shigekazu ; et al. | 2006-07-06 |
Probe mark reading device and probe mark reading method
App 20060139628 - Chaya; Hiromi ; et al. | 2006-06-29 |
Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object
App 20060097743 - Komatsu; Shigekazu | 2006-05-11 |
Probe mark reading device and probe mark reading method
Grant 7,026,832 - Chaya , et al. April 11, 2 | 2006-04-11 |
Inspection method and inspection equipment
App 20060061374 - Shinozaki; Dai ; et al. | 2006-03-23 |
Probe apparatus with optical length-measuring unit and probe testing method
App 20050253613 - Komatsu, Shigekazu ; et al. | 2005-11-17 |
Probe method, prober, and electrode reducing/plasma-etching processing mechanism
App 20050151549 - Okumura, Katsuya ; et al. | 2005-07-14 |
Probe mark reading device and probe mark reading method
App 20040081349 - Chaya, Hiromi ; et al. | 2004-04-29 |
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