Komatsu; Mitsunori

Patent Applications and Registrations

Patent applications and USPTO patent grants for Komatsu; Mitsunori.The latest application filed is for "leak detection system and inspection method for the system".

Company Profile

2.7.10

Komatsu; Mitsunori - Tokyo JP
Komatsu; Mitsunori - Kanagawa-ken JP
Komatsu, Mitsunori - Fujisawa-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Leak Detection System And Inspection Method For The System App 20220034745 - Maruyama; Toru ; et al.	2022-02-03
System For Adjusting Pad Surface Temperature And Polishing Apparatus App 20210170545 - UOZUMI; SHUJI ; et al.	2021-06-10
Substrate processing apparatus and method for detecting abnormality of substrate Grant 10,903,101 - Komatsu , et al. January 26, 2	2021-01-26
Method Of Regulating A Surface Temperature Of Polishing Pad, And Polishing Apparatus App 20190308293 - Kamiki; Keisuke ; et al.	2019-10-10
Apparatus and method for regulating surface temperature of polishing pad Grant 10,414,018 - Maruyama , et al. Sept	2019-09-17
Substrate cleaning apparatus and substrate cleaning method Grant 10,373,845 - Toyomasu , et al.	2019-08-06
Apparatus And Method For Regulating Surface Temperature Of Polishing Pad App 20170239778 - MARUYAMA; Toru ; et al.	2017-08-24
Substrate Processing Apparatus And Method For Detecting Abnormality Of Substrate App 20160315002 - KOMATSU; Mitsunori ; et al.	2016-10-27
Substrate processing apparatus Grant 9,373,528 - Maruyama , et al. June 21, 2	2016-06-21
Substrate Processing Apparatus App 20140345658 - Maruyama; Toru ; et al.	2014-11-27
Substrate Cleaning Apparatus And Substrate Cleaning Method App 20140216505 - TOYOMASU; Fujihiko ; et al.	2014-08-07
Method and apparatus for cleaning polishing surface of polisher Grant 6,758,728 - Inoue , et al. July 6, 2	2004-07-06
Method and apparatus for cleaning polishing surface of polisher App 20020197944 - Inoue, Tatsuo ; et al.	2002-12-26
Apparatus for supplying polishing liquid Grant 6,338,671 - Kawashima , et al. January 15, 2	2002-01-15
Pure water reusing system App 20010034190 - Tanikawa, Mutsumi ; et al.	2001-10-25
Method and apparatus for cleaning polishing surface of polisher App 20010021625 - Inoue, Tatsuo ; et al.	2001-09-13
Filter apparatus Grant 6,280,300 - Komatsu , et al. August 28, 2	2001-08-28

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