loadpatents
Patent applications and USPTO patent grants for Komatsu; Mitsunori.The latest application filed is for "leak detection system and inspection method for the system".
Patent | Date |
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Leak Detection System And Inspection Method For The System App 20220034745 - Maruyama; Toru ;   et al. | 2022-02-03 |
System For Adjusting Pad Surface Temperature And Polishing Apparatus App 20210170545 - UOZUMI; SHUJI ;   et al. | 2021-06-10 |
Substrate processing apparatus and method for detecting abnormality of substrate Grant 10,903,101 - Komatsu , et al. January 26, 2 | 2021-01-26 |
Method Of Regulating A Surface Temperature Of Polishing Pad, And Polishing Apparatus App 20190308293 - Kamiki; Keisuke ;   et al. | 2019-10-10 |
Apparatus and method for regulating surface temperature of polishing pad Grant 10,414,018 - Maruyama , et al. Sept | 2019-09-17 |
Substrate cleaning apparatus and substrate cleaning method Grant 10,373,845 - Toyomasu , et al. | 2019-08-06 |
Apparatus And Method For Regulating Surface Temperature Of Polishing Pad App 20170239778 - MARUYAMA; Toru ;   et al. | 2017-08-24 |
Substrate Processing Apparatus And Method For Detecting Abnormality Of Substrate App 20160315002 - KOMATSU; Mitsunori ;   et al. | 2016-10-27 |
Substrate processing apparatus Grant 9,373,528 - Maruyama , et al. June 21, 2 | 2016-06-21 |
Substrate Processing Apparatus App 20140345658 - Maruyama; Toru ;   et al. | 2014-11-27 |
Substrate Cleaning Apparatus And Substrate Cleaning Method App 20140216505 - TOYOMASU; Fujihiko ;   et al. | 2014-08-07 |
Method and apparatus for cleaning polishing surface of polisher Grant 6,758,728 - Inoue , et al. July 6, 2 | 2004-07-06 |
Method and apparatus for cleaning polishing surface of polisher App 20020197944 - Inoue, Tatsuo ;   et al. | 2002-12-26 |
Apparatus for supplying polishing liquid Grant 6,338,671 - Kawashima , et al. January 15, 2 | 2002-01-15 |
Pure water reusing system App 20010034190 - Tanikawa, Mutsumi ;   et al. | 2001-10-25 |
Method and apparatus for cleaning polishing surface of polisher App 20010021625 - Inoue, Tatsuo ;   et al. | 2001-09-13 |
Filter apparatus Grant 6,280,300 - Komatsu , et al. August 28, 2 | 2001-08-28 |
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