Komatsu; Fumio

Patent Applications and Registrations

Patent applications and USPTO patent grants for Komatsu; Fumio.The latest application filed is for "pattern dimension measuring system and pattern dimension measuring method".

Company Profile

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Komatsu; Fumio - late of Fuchu JP
Komatsu; Fumio - Tokyo JP
Komatsu; Fumio - Fuchu JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Pattern dimension measuring system and pattern dimension measuring method Grant 6,515,296 - Komatsu , et al. February 4, 2	2003-02-04
Method for measuring size of fine pattern Grant 6,363,167 - Miyano , et al. March 26, 2	2002-03-26
Method and apparatus for processing pattern image data by SEM Grant 5,887,080 - Tsubusaki , et al. March 23, 1	1999-03-23
Electron beam irradiating apparatus and electric signal detecting apparatus Grant 5,818,217 - Komatsu , et al. October 6, 1	1998-10-06
Method of extracting features of image Grant 5,479,535 - Komatsu December 26, 1	1995-12-26
Apparatus and method of aligning electron beam of scanning electron microscope Grant 5,359,197 - Komatsu , et al. October 25, 1	1994-10-25
Automatic focusing method for scanning electron microscopy Grant 5,302,829 - Komatsu , et al. April 12, 1	1994-04-12
Method of and apparatus for measuring pattern profile Grant 5,161,201 - Kaga , et al. November 3, 1	1992-11-03
Pattern Measurement method Grant 4,910,398 - Komatsu , et al. March 20, 1	1990-03-20
Image forming method using secondary electrons from object for noise elimination Grant 4,894,540 - Komatsu January 16, 1	1990-01-16
Apparatus and method for controlling irradiation of an electron beam at a fixed position in an electron beam tester system Grant 4,807,159 - Komatsu , et al. February 21, 1	1989-02-21
Method of electron beam exposure Grant 4,644,170 - Komatsu February 17, 1	1987-02-17

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