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Patent applications and USPTO patent grants for Komano; Haruki.The latest application filed is for "reticle".
Patent | Date |
---|---|
Reticle Grant 5,837,405 - Tomofuji , et al. November 17, 1 | 1998-11-17 |
Mask defect repair system and method Grant 5,799,104 - Nakamura , et al. August 25, 1 | 1998-08-25 |
Reticle and method of fabricating reticle Grant 5,660,956 - Tomofuji , et al. August 26, 1 | 1997-08-26 |
Focused ion beam deposition using TMCTS Grant 5,639,699 - Nakamura , et al. June 17, 1 | 1997-06-17 |
Method of exposing light in a method of fabricating a reticle Grant 5,595,844 - Tomofuji , et al. January 21, 1 | 1997-01-21 |
Charged beam apparatus Grant 5,591,970 - Komano , et al. January 7, 1 | 1997-01-07 |
Method of depositing an insulating film and a focusing ion beam apparatus Grant 5,083,033 - Komano , et al. January 21, 1 | 1992-01-21 |
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