Kolenkow; Robert J.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kolenkow; Robert J..The latest application filed is for "methods and apparatus for linear scan magnetron sputtering".
- Kolenkow; Robert J. - Berkeley CA
| Patent | Date |
|---|---|
| Methods and apparatus for linear scan magnetron sputtering Grant 5,873,989 - Hughes , et al. February 23, 1 | 1999-02-23 |
| Methods and apparatus for sputtering with rotating magnet sputter sources Grant 5,830,327 - Kolenkow November 3, 1 | 1998-11-03 |
| Wafer polisher head having floating retainer ring Grant 5,205,082 - Shendon , et al. April 27, 1 | 1993-04-27 |
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