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Patent applications and USPTO patent grants for Kokubo; Haruo.The latest application filed is for "method of manufacturing phase shift mask and phase shift mask".
Patent | Date |
---|---|
Methods of manufacturing phase shift masks having etched substrate shifters with sidewalls rounded at top and bottom corners Grant 7,056,624 - Kokubo June 6, 2 | 2006-06-06 |
Halftone phase shift photomask and blanks for halftone phase shift photomask for producing it Grant 6,764,792 - Fujikawa , et al. July 20, 2 | 2004-07-20 |
Method of manufacturing phase shift mask and phase shift mask App 20040023129 - Kokubo, Haruo | 2004-02-05 |
Phase-shift photomask manufacturing method and phase-shift photomask Grant 6,627,359 - Kokubo September 30, 2 | 2003-09-30 |
Phase-shift photomask manufacturing method and phase-shift photomask App 20010044056 - Kokubo, Haruo | 2001-11-22 |
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