loadpatents
Patent applications and USPTO patent grants for KOKAZE; Yutaka.The latest application filed is for "sputtering apparatus".
Patent | Date |
---|---|
Sputtering Apparatus App 20210222289 - KOKAZE; Yutaka ;   et al. | 2021-07-22 |
Substrate Processing Method And Substrate Processing Device App 20180204729 - SONODA; Kazuhiro ;   et al. | 2018-07-19 |
Film Forming Apparatus and Film Forming Method App 20170004995 - Asakawa; Keiichiro ;   et al. | 2017-01-05 |
Method for operating substrate processing apparatus Grant 9,305,752 - Kokaze , et al. April 5, 2 | 2016-04-05 |
Method Of Manufacturing Dielectric Device And Ashing Method App 20130284701 - Yoshida; Yoshiaki ;   et al. | 2013-10-31 |
Method For Operating Substrate Processing Apparatus App 20120193323 - KOKAZE; Yutaka ;   et al. | 2012-08-02 |
Method For Manufacturing Piezoelectric Element App 20120152889 - Ueda; Masahisa ;   et al. | 2012-06-21 |
Dry cleaning method for plasma processing apparatus Grant 8,133,325 - Ueda , et al. March 13, 2 | 2012-03-13 |
Etching Method And Etching Apparatus App 20100213170 - Kokaze; Yutaka ;   et al. | 2010-08-26 |
Plasma Processing Apparatus And Manufacturing Method Of Deposition-inhibitory Member App 20100151150 - Kokaze; Yutaka ;   et al. | 2010-06-17 |
Dry Cleaning Method For Plasma Processing Apparatus App 20100083981 - Ueda; Masahisa ;   et al. | 2010-04-08 |
Method And Apparatus For Manufacturing Device App 20090275146 - TAKANO; Katsuo ;   et al. | 2009-11-05 |
Capacitance element manufacturing method and etching method App 20080026539 - Kokaze; Yutaka ;   et al. | 2008-01-31 |
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