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Sensor, lithographic apparatus, and device manufacturing method Grant 11,022,902 - Den Boef , et al. June 1, 2 | 2021-06-01 |
Sensor, Lithographic Apparatus, and Device Manufacturing Method App 20210072647 - DEN BOEF; Arie Jeffrey ;   et al. | 2021-03-11 |
Measurement method comprising in-situ printing of apparatus mark and corresponding apparatus Grant 10,481,507 - Violette , et al. Nov | 2019-11-19 |
Measurement Method Comprising In-situ Printing Of Apparatus Mark And Corresponding Apparatus App 20190196341 - VIOLETTE; Kevin J ;   et al. | 2019-06-27 |
Sensor, lithographic apparatus and device manufacturing method Grant 9,971,254 - Laurent , et al. May 15, 2 | 2018-05-15 |
Lithographic method to apply a pattern to a substrate and lithographic apparatus Grant 9,891,532 - Kok February 13, 2 | 2018-02-13 |
Sensor system for lithography Grant 9,864,282 - Kok , et al. January 9, 2 | 2018-01-09 |
Sensor, Lithographic Apparatus And Device Manufacturing Method App 20170363964 - LAURENT; Thibault Simon Mathieu ;   et al. | 2017-12-21 |
Sensor, lithographic apparatus and device manufacturing method Grant 9,753,382 - Laurent , et al. September 5, 2 | 2017-09-05 |
Sensor System For Lithography App 20170219937 - KOK; Haico Victor ;   et al. | 2017-08-03 |
Sensor system for lithography Grant 9,690,207 - Kok , et al. June 27, 2 | 2017-06-27 |
Lithographic Method to Apply a Pattern to a Substrate and Lithographic Apparatus App 20160357115 - KOK; Haico Victor | 2016-12-08 |
Lithographic method to apply a pattern to a substrate and lithographic apparatus Grant 9,423,688 - Kok August 23, 2 | 2016-08-23 |
Sensor and lithographic apparatus Grant 9,331,117 - Nihtianov , et al. May 3, 2 | 2016-05-03 |
Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor Grant 9,170,498 - Van De Kerkhof , et al. October 27, 2 | 2015-10-27 |
Sensor and Lithographic Apparatus App 20150294998 - Nihtianov; Stoyan ;   et al. | 2015-10-15 |
Sensor System For Lithography App 20150286153 - Kok; Haico Victor ;   et al. | 2015-10-08 |
Lithographic apparatus and method Grant 9,116,446 - Voogd , et al. August 25, 2 | 2015-08-25 |
Sensor, Lithographic Apparatus And Device Manufacturing Method App 20150077728 - Laurent; Thibault Simon Mathieu ;   et al. | 2015-03-19 |
Lithographic Method to Apply a Pattern to a Substrate and Lithographic Apparatus App 20140293261 - KOK; Haico Victor | 2014-10-02 |
Lithographic method to apply a pattern to a substrate and lithographic apparatus Grant 8,760,620 - Kok June 24, 2 | 2014-06-24 |
Lithographic apparatus and sensor therefor Grant 8,629,418 - Van De Kerkhof , et al. January 14, 2 | 2014-01-14 |
Lithographic Method to Apply a Pattern to a Substrate and Lithographic Apparatus App 20130235360 - KOK; Haico Victor | 2013-09-12 |
Lithographic Apparatus and a Method for Determining a Polarization Property App 20130176547 - VAN DE KERKHOF; Marcus Adrianus ;   et al. | 2013-07-11 |
Lithographic apparatus and device manufacturing method Grant 8,482,718 - Corbeij , et al. July 9, 2 | 2013-07-09 |
Lithographic method to apply a pattern to a substrate and lithographic apparatus Grant 8,436,977 - Kok May 7, 2 | 2013-05-07 |
Lithographic Apparatus and Method App 20120242967 - Voogd; Robbert Jan ;   et al. | 2012-09-27 |
Device manufacturing method and lithographic apparatus Grant 8,049,864 - Kok , et al. November 1, 2 | 2011-11-01 |
Lithographic apparatus, radiation sensor and method of manufacturing a radiation sensor Grant 8,013,977 - Kok , et al. September 6, 2 | 2011-09-06 |
Lithographic Apparatus And Device Manufacturing Method App 20110043780 - Corbeij; Wilhelmus Maria ;   et al. | 2011-02-24 |
Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus Grant 7,773,235 - Kok , et al. August 10, 2 | 2010-08-10 |
Passive reticle tool, a lithographic apparatus and a method of patterning a device in a lithography tool App 20100182582 - Van De Kerkhof; Marcus Adrianus ;   et al. | 2010-07-22 |
Lithographic projection system and projection lens polarization sensor App 20100118288 - Van De Kerkhof; Marcus Adrianus ;   et al. | 2010-05-13 |
Lithographic Apparatus, Method for Determining at Least One Polarization Property Thereof, Polarization Analyzer and Polarization Sensor Thereof App 20100045956 - Van De Kerkhof; Marcus Adrianus ;   et al. | 2010-02-25 |
Lithographic Method to Apply a Pattern to a Substrate and Lithographic Apparatus App 20090213351 - KOK; Haico Victor | 2009-08-27 |
Device Manufacturing Method and Lithographic Apparatus App 20090168039 - KOK; Haico Victor ;   et al. | 2009-07-02 |
Device for Transmission Image Detection for Use in a Lithographic Projection Apparatus and a Method for Determining Third Order Distortions of a Patterning Device and/or a Projection System of Such a Lithographic Apparatus App 20090153830 - KOK; Haico Victor | 2009-06-18 |
Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus App 20090051934 - Kok; Haico Victor ;   et al. | 2009-02-26 |
Sensor for use in a lithographic apparatus Grant 7,453,078 - Kok , et al. November 18, 2 | 2008-11-18 |
Apodization measurement for lithographic apparatus Grant 7,443,485 - Van De Kerkhof , et al. October 28, 2 | 2008-10-28 |
Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus Grant 7,409,302 - Kok , et al. August 5, 2 | 2008-08-05 |
Wave front sensor with grey filter and lithographic apparatus comprising same Grant 7,388,652 - Van Der Sijs , et al. June 17, 2 | 2008-06-17 |
Lithographic apparatus, radiation sensor and method of manufacturing a radiation sensor App 20080013059 - Kok; Haico Victor ;   et al. | 2008-01-17 |
Sensor for use in a lithographic apparatus App 20080007844 - Kok; Haico Victor ;   et al. | 2008-01-10 |
Apodization measurement for lithographic apparatus Grant 7,315,353 - Van De Kerkhof , et al. January 1, 2 | 2008-01-01 |
Wave front sensor with grey filter and lithographic apparatus comprising same App 20070291245 - Der Sijs; Arie Johan Van ;   et al. | 2007-12-20 |
Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program Grant 7,308,368 - Kok , et al. December 11, 2 | 2007-12-11 |
Sensor for use in a lithographic apparatus Grant 7,282,701 - Kok , et al. October 16, 2 | 2007-10-16 |
Method of determining aberration of a projection system of a lithographic apparatus Grant 7,242,475 - Baselmans , et al. July 10, 2 | 2007-07-10 |
Sensor for use in a lithographic apparatus App 20070108377 - Kok; Haico Victor ;   et al. | 2007-05-17 |
Lithographic apparatus, method of determining properties thereof and computer program Grant 7,187,431 - Kok , et al. March 6, 2 | 2007-03-06 |
Grating patch arrangement, lithographic apparatus, method of testing, device manufacturing method, and device manufactured thereby Grant 7,113,255 - Poultney , et al. September 26, 2 | 2006-09-26 |
Lithographic apparatus and a method for determining a polarization property App 20060203221 - Van De Kerkhof; Marcus Adrianus ;   et al. | 2006-09-14 |
Sensor for use in a lithographic apparatus App 20060192093 - Kok; Haico Victor ;   et al. | 2006-08-31 |
Lithographic apparatus, method of determining properties thereof and computer program App 20060103826 - Kok; Haico Victor ;   et al. | 2006-05-18 |
Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped such an apparatus App 20060061746 - Kok; Haico Victor ;   et al. | 2006-03-23 |
Apodization measurement for lithographic apparatus App 20060055906 - Van De Kerkhof; Marcus Adrianus ;   et al. | 2006-03-16 |
Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program App 20060058972 - Kok; Haico Victor ;   et al. | 2006-03-16 |
Apodization measurement for lithographic apparatus App 20060050260 - Van De Kerkhof; Marcus Adrianus ;   et al. | 2006-03-09 |
Method of determining aberration of a projection system of a lithographic apparatus App 20050213097 - Baselmans, Johannes Jacobus Matheus ;   et al. | 2005-09-29 |
Grating patch arrangement, lithographic apparatus, method of testing, device manufacturing method, and device manufactured thereby App 20050134824 - Poultney, Sherman ;   et al. | 2005-06-23 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,888,151 - Kroon , et al. May 3, 2 | 2005-05-03 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20040211922 - Kroon, Mark ;   et al. | 2004-10-28 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,747,282 - Kroon , et al. June 8, 2 | 2004-06-08 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20030001107 - Kroon, Mark ;   et al. | 2003-01-02 |