| Patent | Date |
|---|
Substrate Processing Apparatus And Abnormality Detection Method
App 20220285197 - CHIHAYA; Hiroaki ; et al. | 2022-09-08 |
Substrate Processing Apparatus And Abnormality Detection Method
App 20220285182 - CHIHAYA; Hiroaki ; et al. | 2022-09-08 |
Film Forming Apparatus
App 20200381226 - IMAKITA; Kenichi ; et al. | 2020-12-03 |
Deposition device and deposition method
Grant 10,309,005 - Kojima , et al. | 2019-06-04 |
Dual-target sputter deposition with controlled phase difference between target powers
Grant 9,567,667 - Furukawa , et al. February 14, 2 | 2017-02-14 |
Deposition Device And Deposition Method
App 20160251746 - KOJIMA; Yasuhiko ; et al. | 2016-09-01 |
Process For Recovering Carbon Dioxide From Construction Exhaust Gas
App 20150343369 - Kojima; Yasuhiko | 2015-12-03 |
Rubber composition and molded rubber products
Grant 9,012,551 - Sasaki , et al. April 21, 2 | 2015-04-21 |
Dual-target Sputter Deposition With Controlled Phase Difference Between Target Powers
App 20150075971 - FURUKAWA; Shinji ; et al. | 2015-03-19 |
Film forming method and storage medium
Grant 8,900,991 - Azumo , et al. December 2, 2 | 2014-12-02 |
Fluidized bed granulator
Grant 8,834,142 - Kojima , et al. September 16, 2 | 2014-09-16 |
Method of forming film, film forming apparatus and storage medium
Grant 8,721,846 - Yoshii , et al. May 13, 2 | 2014-05-13 |
Method for forming Cu film and storage medium
Grant 8,697,572 - Kojima , et al. April 15, 2 | 2014-04-15 |
Pharmaceutical Composition For Treatment And Prevention Of Th3 March-related Diseases
App 20140023656 - Kuwabara; Masato ; et al. | 2014-01-23 |
Rubber Composition And Molded Rubber Products
App 20130158181 - Sasaki; Katsuaki ; et al. | 2013-06-20 |
Method Of Granulation With A Fluidized Bed Granulator
App 20120282361 - KOJIMA; Yasuhiko ; et al. | 2012-11-08 |
Film Forming Method And Storage Medium
App 20120220121 - AZUMO; Shuji ; et al. | 2012-08-30 |
Method For Forming Metal Thin Film, Semiconductor Device And Manufacturing Method Thereof
App 20120211890 - AZUMO; Shuji ; et al. | 2012-08-23 |
Film Forming Apparatus, Film Forming Method And Storage Medium
App 20120171365 - Azumo; Shuji ; et al. | 2012-07-05 |
Copper film deposition method
Grant 8,211,500 - Kojima , et al. July 3, 2 | 2012-07-03 |
Film Formation Method And Storage Medium
App 20120164328 - Kojima; Yasuhiko ; et al. | 2012-06-28 |
Semiconductor device manufacturing method using valve metal and nitride of valve metal
Grant 8,207,061 - Kojima , et al. June 26, 2 | 2012-06-26 |
Method of granulation with a fluidized bed granulator
Grant 8,197,729 - Kojima , et al. June 12, 2 | 2012-06-12 |
Method For Forming Cu Film And Storage Medium
App 20120064248 - Kojima; Yasuhiko ; et al. | 2012-03-15 |
Method For Forming Cu Film, And Storage Medium
App 20120064247 - Hiwa; Kenji ; et al. | 2012-03-15 |
Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, computer program and storage medium
Grant 8,133,811 - Kojima , et al. March 13, 2 | 2012-03-13 |
Film forming method, film forming apparatus and storage medium
Grant 8,129,271 - Kojima , et al. March 6, 2 | 2012-03-06 |
METHOD FOR FORMING Cu FILM AND STORAGE MEDIUM
App 20120040085 - KOJIMA; Yasuhiko ; et al. | 2012-02-16 |
Method For Forming Cu Film And Storage Medium
App 20120028462 - KOJIMA; Yasuhiko ; et al. | 2012-02-02 |
Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing
Grant 8,075,698 - Kannan , et al. December 13, 2 | 2011-12-13 |
Film Formation Method And Storage Medium
App 20110174630 - Kojima; Yasuhiko ; et al. | 2011-07-21 |
Film forming method, semiconductor device manufacturing method, semiconductor device, program and recording medium
Grant 7,846,839 - Kojima , et al. December 7, 2 | 2010-12-07 |
Vaporizer and processor
Grant 7,827,932 - Kojima , et al. November 9, 2 | 2010-11-09 |
Reactor
Grant 7,815,874 - Sakai , et al. October 19, 2 | 2010-10-19 |
Reactor having detachably fixed tubesheet plate member
Grant 7,763,215 - Sakai , et al. July 27, 2 | 2010-07-27 |
Gas switching mechanism for plasma processing apparatus
Grant 7,717,061 - Ishizaka , et al. May 18, 2 | 2010-05-18 |
Semiconductor Manufacturing Apparatus, Semiconductor Device Manufacturing Method, Storage Medium And Computer Program
App 20100099254 - Narushima; Masaki ; et al. | 2010-04-22 |
Substrate treatment method and film forming method, film forming apparatus, and computer program
Grant 7,699,945 - Yoshii , et al. April 20, 2 | 2010-04-20 |
Lithographic printing plate precursor
Grant 7,670,753 - Kojima March 2, 2 | 2010-03-02 |
Semiconductor Device Manufacturing Method, Semiconductor Device Manufacturing Apparatus, Computer Program And Storage Medium
App 20100015799 - Kojima; Yasuhiko ; et al. | 2010-01-21 |
Semiconductor Device Manufacturing Method, Semiconductor Device Manufacturing Apparatus, Semiconductor Device, Computer Program And Storage Medium
App 20090321936 - Kojima; Yasuhiko ; et al. | 2009-12-31 |
Apparatus for synthesizing urea and method for revamping the same
Grant 7,582,795 - Kojima September 1, 2 | 2009-09-01 |
A Processing Method For Processing A Substrate Placed On A Placement Stage In A Process Chamber
App 20090214758 - KANNAN; Hiroshi ; et al. | 2009-08-27 |
Apparatus for synthesizing urea
Grant 7,579,502 - Kojima August 25, 2 | 2009-08-25 |
Film Forming Method, Film Forming Apparatus And Storage Medium
App 20090181538 - Kojima; Yasuhiko ; et al. | 2009-07-16 |
Substrate Treating Apparatus
App 20090165720 - KOJIMA; Yasuhiko ; et al. | 2009-07-02 |
Method of Forming Film, Film Forming Apparatus and Storage Medium
App 20090145744 - Yoshii; Naoki ; et al. | 2009-06-11 |
Granulator and method of granulation using the same
App 20090134536 - Kojima; Yasuhiko ; et al. | 2009-05-28 |
Apparatus For Synthesizing Urea And Method For Revamping The Same
App 20090062566 - Kojima; Yasuhiko | 2009-03-05 |
Method and apparatus for synthesizing urea
Grant 7,498,464 - Kojima March 3, 2 | 2009-03-03 |
Film Forming Method, Semiconductor Device Manufacturing Method, Semiconductor Device, Program And Recording Medium
App 20090032950 - Kojima; Yasuhiko ; et al. | 2009-02-05 |
Apparatus For Synthesizing Urea
App 20090036712 - Kojima; Yasuhiko | 2009-02-05 |
Film-forming Apparatus And Film-forming Method
App 20090029047 - Yoshii; Naoki ; et al. | 2009-01-29 |
Vaporizer and Processor
App 20090000740 - Kojima; Yasuhiko ; et al. | 2009-01-01 |
Lithographic Printing Plate Precursor
App 20080261146 - Kojima; Yasuhiko | 2008-10-23 |
Method of Forming Thin Film, Thin Film Forming Apparatus, Program and Computer-Readable Information Recording Medium
App 20080241385 - Oshima; Yasuhiro ; et al. | 2008-10-02 |
Reactor
App 20080219902 - Sakai; Kenji ; et al. | 2008-09-11 |
Layered Thin Film Structure, Layered Thin Film Forming Method, Film Forming System and Storage Medium
App 20080070017 - Yoshii; Naoki ; et al. | 2008-03-20 |
Semiconductor manufacturing system having a vaporizer which efficiently vaporizes a liquid material
Grant 7,332,040 - Kojima , et al. February 19, 2 | 2008-02-19 |
Matte Agent for Infrared-Sensitive Planographic Printing Plate and Use Thereof
App 20080035000 - Miyamoto; Yasushi ; et al. | 2008-02-14 |
Gas phase growth system, method of operating the system, and vaporizer for the system
Grant 7,323,220 - Kojima , et al. January 29, 2 | 2008-01-29 |
Substrate Treatment Method And Film Forming Method, Film Forming Apparatus, And Computer Program
App 20080020934 - YOSHII; Naoki ; et al. | 2008-01-24 |
Copper film deposition method
App 20070197398 - Kojima; Yasuhiko ; et al. | 2007-08-23 |
Processing method
App 20070160757 - Ishizaka; Tadahiro ; et al. | 2007-07-12 |
Cleaning method of treatment equipment and treatment equipment
App 20070074739 - Kojima; Yasuhiko ; et al. | 2007-04-05 |
Cleaning method of treatment equipment and treatment equipment
Grant 7,172,657 - Kojima , et al. February 6, 2 | 2007-02-06 |
Film forming method
App 20070004186 - Yoshii; Naoki ; et al. | 2007-01-04 |
Method and apparatus for determining urea concentration
Grant 7,153,693 - Tajiri , et al. December 26, 2 | 2006-12-26 |
Method And Apparatus For Synthesizing Urea
App 20060270872 - KOJIMA; Yasuhiko | 2006-11-30 |
Processing apparatus and processing method
App 20060154383 - Kannan; Hiroshi ; et al. | 2006-07-13 |
Urea synthesis process and apparatus
Grant 7,052,655 - Fukunaka , et al. May 30, 2 | 2006-05-30 |
Processing device and processing method
App 20060096531 - Ishizaka; Tadahiro ; et al. | 2006-05-11 |
Reactor
App 20060073086 - Sakai; Kenji ; et al. | 2006-04-06 |
Thin-film formation in semiconductor device fabrication process and film deposition apparatus
App 20060068104 - Ishizaka; Tadahiro ; et al. | 2006-03-30 |
Processing apparatus and processing method
App 20060027167 - Ishizaka; Tadahiro ; et al. | 2006-02-09 |
Heat-treating apparatus and heat-treating method
Grant 6,991,684 - Kannan , et al. January 31, 2 | 2006-01-31 |
Deposition apparatus and deposition method, and process gas supply method
App 20050249874 - Hoshino, Tomohisa ; et al. | 2005-11-10 |
Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing
App 20050241761 - Kannan, Hiroshi ; et al. | 2005-11-03 |
Substrate treating apparatus
App 20050235918 - Kojima, Yasuhiko ; et al. | 2005-10-27 |
Processing device and processing method
App 20050211167 - Gunji, Isao ; et al. | 2005-09-29 |
Gas phase growth system, method of operating the system, and vaporizer for the system
App 20050092250 - Kojima, Yasuhiko ; et al. | 2005-05-05 |
Processing apparatus
App 20040250765 - Ishizaka, Tadahiro ; et al. | 2004-12-16 |
Photosensitive composition comprising a phenol resin having a urea bond in the main chain
Grant 6,824,947 - Ishizuka , et al. November 30, 2 | 2004-11-30 |
Thin-film deposition apparatus and method for rapidly switching supply of source gases
App 20040112289 - Moriya, Shuji ; et al. | 2004-06-17 |
Substrate treatment device, substrate treatment method, and cleaning method for substrate treatment device
App 20040081757 - Ishizaka, Tadahiro ; et al. | 2004-04-29 |
Printing form precursors
Grant 6,723,489 - Aburano , et al. April 20, 2 | 2004-04-20 |
Processing method and processing apparatus
App 20040060513 - Kojima, Yasuhiko ; et al. | 2004-04-01 |
Processing apparatus having a support member made of metal matrix composite between a process chamber and a title placement stage
App 20040042152 - Ishizaka, Tadahiro ; et al. | 2004-03-04 |
Heat-treating apparatus and heat-treating method
App 20040035359 - Kannan, Hiroshi ; et al. | 2004-02-26 |
Photosensitive composition comprising a phenol resin having a urea bond in the main chain
App 20030224281 - Ishizuka, Yasuhiro ; et al. | 2003-12-04 |
Photosensitive composition, original plate using the same for lithographic printing, and method for producing images on original plate
Grant 6,627,380 - Saito , et al. September 30, 2 | 2003-09-30 |
Method and apparatus for determining urea concentration
App 20030159947 - Tajiri, Yoshihiro ; et al. | 2003-08-28 |
Printing form precursors
App 20030152847 - Aburano, Maru ; et al. | 2003-08-14 |
Electron beam lithography system and method
Grant 6,605,811 - Hotta , et al. August 12, 2 | 2003-08-12 |
Electron beam lithography system and method
App 20030089858 - Hotta, Masanao ; et al. | 2003-05-15 |
Apparatus and method for delivery of precursor vapor from low vapor pressure liquid sources to a CVD chamber
Grant 6,548,112 - Hillman , et al. April 15, 2 | 2003-04-15 |
Urea synthesis process and apparatus
App 20020188157 - Fukunaka, Tadashi ; et al. | 2002-12-12 |
Process for the synthesis of urea
Grant 6,426,434 - Yoshida , et al. July 30, 2 | 2002-07-30 |
Process for the synthesis of urea
App 20020082451 - Yoshida, Kinichi ; et al. | 2002-06-27 |
Interleaving paper for radiation sensitive planographic printing plates
App 20020042021 - Okano, Hiroshi ; et al. | 2002-04-11 |
Gas phase growth system, method of operating the system, and vaporizer for the system
App 20020017246 - Kojima, Yasuhiko ; et al. | 2002-02-14 |
Urea synthesis process and appratus
App 20020004612 - Fukunaka, Tadashi ; et al. | 2002-01-10 |
Photosensitive composition, original plate using the same for lithographic printing, and method for producing images on original plate
App 20020001773 - Saito, Naohito ; et al. | 2002-01-03 |
Cleaning method of tratment equipment and treatment equipment
App 20010020478 - Kojima, Yasuhiko ; et al. | 2001-09-13 |
Developer for light-sensitive material
Grant 5,275,915 - Kojima , et al. January 4, 1 | 1994-01-04 |
Superhigh contrast negative image forming process
Grant 5,217,842 - Kojima , et al. June 8, 1 | 1993-06-08 |
Silver halide photographic lith material
Grant 4,724,196 - Shoji , et al. February 9, 1 | 1988-02-09 |
Process for producing interferon inducers
Grant 4,421,746 - Kojima , et al. December 20, 1 | 1983-12-20 |
Interferon Inducer And Process For Preparing The Same
Grant 3,852,423 - Nakase , et al. December 3, 1 | 1974-12-03 |
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