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Method For Determining Optimal Number Of Submodules For Use In Semiconductor Manufacturing Apparatus Including Substrate Processing Module Including Plurality Of Submodules, And Semiconductor Manufacturing Apparatus
App 20220222524 - Koizumi; Ryuya | 2022-07-14 |
Semiconductor Manufacturing Apparatus, Failure Prediction Method For Semiconductor Manufacturing Apparatus, And Failure Prediction Program For Semiconductor Manufacturing Apparatus
App 20220181180 - Fujikata; Jumpei ; et al. | 2022-06-09 |
Plating Method And Plating Apparatus
App 20220170175 - Koizumi; Ryuya ; et al. | 2022-06-02 |
Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatus
Grant 11,315,812 - Fujikata , et al. April 26, 2 | 2022-04-26 |
Plating method and plating apparatus
Grant 11,286,577 - Koizumi , et al. March 29, 2 | 2022-03-29 |
Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method
Grant 11,098,414 - Mitsuya , et al. August 24, 2 | 2021-08-24 |
Scheduler, substrate processing apparatus, and substrate conveyance method
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Scheduler, Substrate Processing Apparatus, And Substrate Conveyance Method
App 20210011462 - Nonobe; Koji ; et al. | 2021-01-14 |
Scheduler, substrate processing apparatus, and substrate conveyance method
Grant 10,824,135 - Nonobe , et al. November 3, 2 | 2020-11-03 |
Scheduler, substrate processing apparatus, and substrate conveyance method
Grant 10,824,138 - Nonobe , et al. November 3, 2 | 2020-11-03 |
Substrate holding member, substrate processing device, method for controlling substrate processing device, and storage medium storing programs
Grant 10,818,527 - Koizumi October 27, 2 | 2020-10-27 |
Plating Method And Plating Apparatus
App 20200232115 - Koizumi; Ryuya ; et al. | 2020-07-23 |
Method Of Constructing Prediction Model That Predicts Number Of Plateable Substrates, Method Of Constructing Selection Model For
App 20200193294 - Oishi; Kunio ; et al. | 2020-06-18 |
Plating method and plating apparatus
Grant 10,648,099 - Koizumi , et al. | 2020-05-12 |
Plating System, A Plating System Control Method, And A Storage Medium Containing A Program For Causing A Computer To Execute The
App 20200056301 - Mitsuya; Takashi ; et al. | 2020-02-20 |
Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method
Grant 10,501,862 - Mitsuya , et al. Dec | 2019-12-10 |
Method of controlling display of operation of semiconductor manufacturing apparatus and non-transitory computer readable storage medium therefor, and system for performing display concerning operation of semiconductor manufacturing apparatus
Grant 10,446,422 - Fujiki , et al. Oc | 2019-10-15 |
Scheduler, Substrate Processing Apparatus, And Substrate Conveyance Method
App 20190271970 - NONOBE; Koji ; et al. | 2019-09-05 |
Substrate Holding Member, Substrate Processing Device, Method For Controlling Substrate Processing Device, And Storage Medium St
App 20190252213 - KOIZUMI; Ryuya | 2019-08-15 |
Semiconductor Manufacturing Apparatus, Failure Prediction Method For Semiconductor Manufacturing Apparatus, And Failure Prediction Program For Semiconductor Manufacturing Apparatus
App 20180294174 - FUJIKATA; Jumpei ; et al. | 2018-10-11 |
Method Of Controlling Display Of Operation Of Semiconductor Manufacturing Apparatus And Non-transitory Computer Readable Storage Medium Therefor, And System For Performing Display Concerning Operation Of Semiconductor Manufacturing Apparatus
App 20180286723 - FUJIKI; Masayuki ; et al. | 2018-10-04 |
Plating Method And Plating Apparatus
App 20180266009 - KOIZUMI; Ryuya ; et al. | 2018-09-20 |
Plating apparatus
Grant 10,077,504 - Minami , et al. September 18, 2 | 2018-09-18 |
Scheduler, Substrate Processing Apparatus, And Substrate Conveyance Method
App 20180203434 - NONOBE; Koji ; et al. | 2018-07-19 |
Plating System, A Plating System Control Method, And A Storage Medium Containing A Program For Causing A Computer To Execute The Plating System Control Method
App 20180038008 - MITSUYA; Takashi ; et al. | 2018-02-08 |
Plating Apparatus
App 20170175285 - MINAMI; Yoshio ; et al. | 2017-06-22 |
Plating apparatus
Grant 9,624,594 - Minami , et al. April 18, 2 | 2017-04-18 |
Substrate Processing Method
App 20150308010 - KOIZUMI; Ryuya | 2015-10-29 |
Plating Apparatus
App 20140245954 - MINAMI; Yoshio ; et al. | 2014-09-04 |
Scheduler, substrate processing apparatus, and method of transferring substrates in substrate processing apparatus
Grant 8,655,472 - Koizumi , et al. February 18, 2 | 2014-02-18 |
Scheduler, Substrate Processing Apparatus, And Method Of Transferring Substrates In Substrate Processing Apparatus
App 20110172800 - KOIZUMI; Ryuya ; et al. | 2011-07-14 |
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