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Patent applications and USPTO patent grants for KOHYAMA; Tsunehito.The latest application filed is for "mask inspection method and mask inspection apparatus".
Patent | Date |
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Mask Inspection Method And Mask Inspection Apparatus App 20220178847 - SAITO; Keita ;   et al. | 2022-06-09 |
Optical device, and method for preventing contamination of optical device Grant 11,353,802 - Kusunose , et al. June 7, 2 | 2022-06-07 |
Optical Device, And Method For Preventing Contamination Of Optical Device App 20210373447 - KUSUNOSE; Haruhiko ;   et al. | 2021-12-02 |
Inspection Device And Inspection Method App 20210247323 - TAKEHISA; Kiwamu ;   et al. | 2021-08-12 |
Correction method, correction apparatus, and inspection apparatus Grant 10,706,527 - Kohyama , et al. | 2020-07-07 |
Detection method, inspection method, detection apparatus, and inspection apparatus Grant 10,539,511 - Nishizawa , et al. Ja | 2020-01-21 |
Detection Method, Inspection Method, Detection Apparatus, And Inspection Apparatus App 20190204235 - NISHIZAWA; Masayasu ;   et al. | 2019-07-04 |
Correction Method, Correction Apparatus, And Inspection Apparatus App 20180276812 - KOHYAMA; Tsunehito ;   et al. | 2018-09-27 |
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