Kohno; Michio

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kohno; Michio.The latest application filed is for "illumination optical system and method, and exposure apparatus".

Company Profile

0.27.8

Kohno; Michio - Tochigi JP
Kohno; Michio - Utsunomiya JP
KOHNO, MICHIO - UTSUNOMIYA-SHI JP
Kohno; Michio - Tokyo JP
Kohno; Michio - Kawasaki JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Illumination optical system and exposure apparatus having the same Grant 7,292,316 - Kohno November 6, 2	2007-11-06
Illumination optical system and method, and exposure apparatus Grant 7,079,220 - Kohno July 18, 2	2006-07-18
Illumination optical system and method, and exposure apparatus Grant 6,999,157 - Kohno February 14, 2	2006-02-14
Illumination optical system and method, and exposure apparatus App 20050280796 - Kohno, Michio	2005-12-22
Exposure apparatus and method App 20050179881 - Kohno, Michio	2005-08-18
Illumination optical system and exposure apparatus having the same App 20050099814 - Kohno, Michio	2005-05-12
Illumination optical system and exposure apparatus having the same Grant 6,857,764 - Kohno February 22, 2	2005-02-22
Illumination apparatus, projection exposure apparatus, and device fabricating method Grant 6,833,905 - Kohno December 21, 2	2004-12-21
Exposure apparatus App 20040218164 - Kohno, Michio	2004-11-04
Ilumination optical system and method, and exposure apparatus App 20030197838 - Kohno, Michio	2003-10-23
Exposure method and device manufacturing method using the same Grant 6,621,061 - Kohno September 16, 2	2003-09-16
Exposure apparatus that illuminates a mark and causes light from the mark to be incident on a projection optical system Grant 6,603,530 - Kohno August 5, 2	2003-08-05
Illumination apparatus, projection exposure apparatus, and device fabricating method App 20030035091 - Kohno, Michio	2003-02-20
Illumination Optical System And Exposure Apparatus Having The Same App 20020039291 - KOHNO, MICHIO	2002-04-04
Exposure method and device manufacturing method using the same App 20020005495 - Kohno, Michio	2002-01-17
Inspection apparatus, and exposure apparatus and device manufacturing method using the inspection apparatus Grant 5,774,575 - Tanaka , et al. June 30, 1	1998-06-30
Inspection system for original with pellicle Grant 5,652,657 - Yoshii , et al. July 29, 1	1997-07-29
Surface-condition inspection method and apparatus including a plurality of detecting elements located substantially at a pupil plane of a detection optical system Grant 5,602,639 - Kohno February 11, 1	1997-02-11
Surface inspecting device Grant 5,585,916 - Miura , et al. December 17, 1	1996-12-17
Surface inspecting device using bisected multi-mode laser beam and system having the same Grant 5,581,348 - Miura , et al. December 3, 1	1996-12-03
Surface-condition inspection apparatus Grant 5,528,360 - Kohno June 18, 1	1996-06-18
Foreign particle inspection apparatus Grant 5,399,867 - Kohno March 21, 1	1995-03-21
Surface-condition inspection apparatus Grant 5,381,225 - Kohno January 10, 1	1995-01-10
Optical scanning apparatus, surface-state inspection apparatus and exposure apparatus Grant 5,359,407 - Suzuki , et al. October 25, 1	1994-10-25
Surface condition inspection method and apparatus using image transfer Grant 5,162,867 - Kohno November 10, 1	1992-11-10
Inspecting apparatus having a detection sensitivity controller means Grant 5,105,092 - Natsubori , et al. April 14, 1	1992-04-14
Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces Grant 5,017,798 - Murakami , et al. May 21, 1	1991-05-21
Surface state inspecting device for inspecting the state of parallel first and second surfaces Grant 4,999,511 - Kohno March 12, 1	1991-03-12
Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces Grant 4,886,975 - Murakami , et al. December 12, 1	1989-12-12
Optical apparatus for observing patterned article Grant 4,871,257 - Suzuki , et al. October 3, 1	1989-10-03
Optical device having a variable geometry filter usable for aligning a mask or reticle with a wafer Grant 4,865,455 - Kohno , et al. September 12, 1	1989-09-12
Surface inspecting device for detecting the position of foreign matter on a substrate Grant 4,831,274 - Kohno , et al. May 16, 1	1989-05-16
Surface examining apparatus for detecting the presence of foreign particles on the surface Grant 4,795,911 - Kohno , et al. January 3, 1	1989-01-03
Focus detection in a projection optical system Grant 4,705,940 - Kohno November 10, 1	1987-11-10
Exposure apparatus Grant 4,653,903 - Torigoe , et al. March 31, 1	1987-03-31

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.