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Plasma processing apparatus
Grant 10,504,698 - Kohno , et al. Dec | 2019-12-10 |
Plasma processing apparatus
Grant 10,312,057 - Kohno , et al. | 2019-06-04 |
Plasma etching method
Grant 9,412,607 - Kamada , et al. August 9, 2 | 2016-08-09 |
Plasma Processing Apparatus
App 20160126114 - KOHNO; Masayuki ; et al. | 2016-05-05 |
Plasma Processing Apparatus
App 20160118224 - KOHNO; Masayuki ; et al. | 2016-04-28 |
Temperature Measuring Method And Plasma Processing System
App 20150221482 - YOSHIDA; Yusuke ; et al. | 2015-08-06 |
Selective anticancer chimeric peptides which bind neuropilin receptor
Grant 8,940,863 - Kawakami , et al. January 27, 2 | 2015-01-27 |
Selective anticancer chimeric peptides which bind transferrin receptor
Grant 8,940,862 - Kawakami , et al. January 27, 2 | 2015-01-27 |
Plasma Etching Method
App 20140332372 - Kamada; Tomiko ; et al. | 2014-11-13 |
Plasma CVD method, method for forming silicon nitride film and method for manufacturing semiconductor device
Grant 8,569,186 - Kohno , et al. October 29, 2 | 2013-10-29 |
Selective Anticancer Chimeric Peptide
App 20130274200 - Kawakami; Koji ; et al. | 2013-10-17 |
Selective Anticancer Chimeric Peptide
App 20130274201 - Kawakami; Koji ; et al. | 2013-10-17 |
Hsp9O-targeted anti-cancer chimeric peptide
Grant 8,546,320 - Kawakami , et al. October 1, 2 | 2013-10-01 |
Selective anticancer chimeric peptide comprising an EGF receptor-binding peptide and a cytotoxic peptide
Grant 8,436,137 - Kawakami , et al. May 7, 2 | 2013-05-07 |
Plasma Cvd Method, Method For Forming Silicon Nitride Film And Method For Manufacturing Semiconductor Device
App 20130072033 - Kohno; Masayuki ; et al. | 2013-03-21 |
Plasma cleaning method and plasma CVD method
Grant 8,366,953 - Kohno , et al. February 5, 2 | 2013-02-05 |
Crystalline Silicon Film Forming Method And Plasma Cvd Apparatus
App 20120315745 - Katayama; Daisuke ; et al. | 2012-12-13 |
Plasma CVD method, method for forming silicon nitride film and method for manufacturing semiconductor device
Grant 8,329,596 - Kohno , et al. December 11, 2 | 2012-12-11 |
Method for forming silicon nitride film, method for manufacturing nonvolatile semiconductor memory device, nonvolatile semiconductor memory device and plasma apparatus
Grant 8,318,614 - Kohno , et al. November 27, 2 | 2012-11-27 |
MOS semiconductor memory device having charge storage region formed from stack of insulating films
Grant 8,258,571 - Endoh , et al. September 4, 2 | 2012-09-04 |
Method Of Forming Silicon Nitride Film And Method Of Manufacturing Semiconductor Memory Device
App 20120208376 - Honda; Minoru ; et al. | 2012-08-16 |
Plasma Cvd Method, Method For Forming Silicon Nitride Film And Method For Manufacturing Semiconductor Device
App 20120178268 - KOHNO; Masayuki ; et al. | 2012-07-12 |
Silicon Nitride Film And Process For Production Thereof, Computer-readable Storage Medium, And Plasma Cvd Device
App 20120153442 - Honda; Minoru ; et al. | 2012-06-21 |
Silicon Dioxide Film And Process For Production Thereof, Computer-readable Storage Medium, And Plasma Cvd Device
App 20120126376 - Honda; Minoru ; et al. | 2012-05-24 |
Plasma CVD method, method for forming silicon nitride film and method for manufacturing semiconductor device
Grant 8,138,103 - Kohno , et al. March 20, 2 | 2012-03-20 |
Forming a MOS memory device having a dielectric film laminate as a charge accumulation region
Grant 8,124,484 - Endoh , et al. February 28, 2 | 2012-02-28 |
Forming a silicon nitride film by plasma CVD
Grant 8,119,545 - Honda , et al. February 21, 2 | 2012-02-21 |
Plasma CVD method, silicon nitride film formation method, semiconductor device manufacturing method, and plasma CVD apparatus
Grant 8,114,790 - Kohno , et al. February 14, 2 | 2012-02-14 |
Novel Hsp90-targeted Anti-cancer Chimeric Peptide
App 20120003299 - Kawakami; Koji ; et al. | 2012-01-05 |
Selective Anticancer Chimeric Peptide
App 20110319336 - Kawakami; Koji ; et al. | 2011-12-29 |
Method For Depositing Silicon Nitride Film, Computer-readable Storage Medium, And Plasma Cvd Device
App 20110254078 - HONDA; Minoru ; et al. | 2011-10-20 |
Silicon Oxide Film, Method For Forming Silicon Oxide Film, And Plasma Cvd Apparatus
App 20110206590 - Honda; Minoru ; et al. | 2011-08-25 |
Silicon Oxynitride Film And Process For Production Thereof, Computer-readable Storage Medium, And Plasma Cvd Device
App 20110189862 - Honda; Minoru ; et al. | 2011-08-04 |
Method For Manufacturing A Mos Semiconductor Memory Device, And Plasma Cvd Device
App 20110086485 - Endoh; Tetsuo ; et al. | 2011-04-14 |
Process For Producing Silicon Nitride Film, Process For Producing Silicon Nitride Film Laminate, Computer-readable Storage Medium, And Plasma Cvd Device
App 20110086517 - Honda; Minoru ; et al. | 2011-04-14 |
Mos Semiconductor Memory Device
App 20100283097 - Endoh; Tetsuo ; et al. | 2010-11-11 |
Plasma processing method and film forming method
Grant 7,771,796 - Kohno , et al. August 10, 2 | 2010-08-10 |
RLSA CVD deposition control using halogen gas for hydrogen scavenging
Grant 7,763,551 - Brcka , et al. July 27, 2 | 2010-07-27 |
Silicon Nitride Film And Nonvolatile Semiconductor Memory Device
App 20100140683 - Miyazaki; Seiichi ; et al. | 2010-06-10 |
Method For Forming Silicon Nitride Film, Method For Manufacturing Nonvolatile Semiconductor Memory Device, Nonvolatile Semiconductor Memory Device And Plasma Apparatus
App 20100052040 - Kohno; Masayuki ; et al. | 2010-03-04 |
Plasma Cleaning Method And Plasma Cvd Method
App 20090308840 - Kohno; Masayuki ; et al. | 2009-12-17 |
Rlsa Cvd Deposition Control Using Halogen Gas For Hydrogen Scavenging
App 20090241310 - Brcka; Jozef ; et al. | 2009-10-01 |
Plasma Cvd Method, Method For Forming Silicon Nitride Film, Method For Manufacturing Semiconductor Device And Plasma Cvd Method
App 20090203228 - Kohno; Masayuki ; et al. | 2009-08-13 |
Plasma Cvd Method, Method For Forming Silicon Nitride Film And Method For Manufacturing Semiconductor Device
App 20090197376 - Kohno; Masayuki ; et al. | 2009-08-06 |
Plasma processing method and film forming method
App 20060099799 - Kohno; Masayuki ; et al. | 2006-05-11 |
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