Kohno; Hirotaka

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kohno; Hirotaka.The latest application filed is for "lithography system, simulation apparatus, and pattern forming method".

Company Profile

0.15.20

Kohno; Hirotaka - Saitama JP
KOHNO; Hirotaka - Saitama-shi JP
KOHNO; Hirotaka - Ageo-shi JP
Kohno; Hirotaka - Kumagaya JP
KOHNO; Hirotaka - Kumagaya-shi JP
Kohno; Hirotaka - Ageo N/A JP
Kohno; Hirotaka - Saitama-ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lithography system, simulation apparatus, and pattern forming method Grant 10,846,457 - Matsuyama , et al. November 24, 2	2020-11-24
Lithography System, Simulation Apparatus, And Pattern Forming Method App 20190302622 - MATSUYAMA; Tomoyuki ; et al.	2019-10-03
Lithography system, simulation apparatus, and pattern forming method Grant 10,338,480 - Matsuyama , et al.	2019-07-02
Stage Apparatus, Exposure Apparatus, And Exposure Method App 20180004096 - NISHII; Yasufumi ; et al.	2018-01-04
Lithography System, Simulation Apparatus, And Pattern Forming Method App 20170363962 - MATSUYAMA; Tomoyuki ; et al.	2017-12-21
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,846,371 - Owa , et al. December 19, 2	2017-12-19
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20170329234 - OWA; Soichi ; et al.	2017-11-16
Exposure Apparatus And Method For Producing Device App 20170329239 - KOHNO; Hirotaka ; et al.	2017-11-16
Exposure apparatus, and exposure method, with recovery device to recover liquid leaked from between substrate and member Grant 9,798,245 - Nishii , et al. October 24, 2	2017-10-24
Exposure apparatus and method for producing device Grant 9,746,781 - Kohno , et al. August 29, 2	2017-08-29
Exposure apparatus and device manufacturing method Grant 9,599,907 - Nagasaka , et al. March 21, 2	2017-03-21
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,268,237 - Owa , et al. February 23, 2	2016-02-23
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20150301457 - OWA; Soichi ; et al.	2015-10-22
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,019,467 - Owa , et al. April 28, 2	2015-04-28
Exposure Apparatus And Method For Producing Device App 20140307238 - KOHNO; Hirotaka ; et al.	2014-10-16
Exposure Apparatus And Device Manufacturing Method App 20130271739 - NAGASAKA; Hiroyuki ; et al.	2013-10-17
Exposure apparatus and device manufacturing method Grant 8,488,099 - Nagasaka , et al. July 16, 2	2013-07-16
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20130141701 - OWA; Soichi ; et al.	2013-06-06
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20130141703 - OWA; Soichi ; et al.	2013-06-06
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 8,384,880 - Owa , et al. February 26, 2	2013-02-26
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 8,208,117 - Owa , et al. June 26, 2	2012-06-26
Stage apparatus, exposure apparatus, and exposure method with recovery device having lyophilic portion Grant 7,982,857 - Nishii , et al. July 19, 2	2011-07-19
Stage apparatus, exposure apparatus, and exposure method App 20110080574 - Nishii; Yasufumi ; et al.	2011-04-07
Exposure Apparatus And Method For Producing Device App 20090262316 - Kohno; Hirotaka ; et al.	2009-10-22
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20090015808 - Owa; Soichi ; et al.	2009-01-15
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20090015816 - Owa; Soichi ; et al.	2009-01-15
Exposure apparatus and device manufacturing method App 20080137047 - Mizutani; Takeyuki ; et al.	2008-06-12
Exposure Apparatus and Device Producing Method App 20080018866 - Nagasaka; Hiroyuki ; et al.	2008-01-24
Exposure apparatus and method for producing device App 20070252964 - Kohno; Hirotaka ; et al.	2007-11-01
Stage apparatus, exposure apparatus, and exposure method App 20070109521 - Nishii; Yasufumi ; et al.	2007-05-17
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20060227312 - Owa; Soichi ; et al.	2006-10-12
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20060139614 - Owa; Soichi ; et al.	2006-06-29

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