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Adhesive member and production method for adhesive member
Grant 11,332,643 - Kamada , et al. May 17, 2 | 2022-05-17 |
Supporting frame for pellicle, pellicle, method for manufacturing same, exposure master using same, and method for manufacturing semiconductor device
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Pellicle support frame, pellicle, method for manufacturing pellicle support frame, and exposure original plate and exposure device employing pellicle
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Pellicle, exposure original plate, exposure device, and semiconductor device manufacturing method
Grant 11,137,677 - Kohmura , et al. October 5, 2 | 2021-10-05 |
Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor device
Grant 11,042,085 - Ono , et al. June 22, 2 | 2021-06-22 |
Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor device
Grant 10,990,001 - Ono , et al. April 27, 2 | 2021-04-27 |
Semiconductor substrate manufacturing method, semiconductor device, and method for manufacturing same
Grant 10,988,647 - Kamada , et al. April 27, 2 | 2021-04-27 |
Pellicle frame and pellicle
Grant 10,955,740 - Taguchi , et al. March 23, 2 | 2021-03-23 |
Pellicle Support Frame, Pellicle, Method For Manufacturing Pellicle Support Frame, And Exposure Original Plate And Exposure Device Employing Pellicle
App 20210080824 - ISHIKAWA; Akira ; et al. | 2021-03-18 |
Pellicle manufacturing method and method for manufacturing photomask with pellicle
Grant 10,895,805 - Kohmura , et al. January 19, 2 | 2021-01-19 |
Supporting Frame For Pellicle, Pellicle, Method For Manufacturing Same, Exposure Master Using Same, And Method For Manufacturing Semiconductor Device
App 20210011372 - ISHIKAWA; Akira ; et al. | 2021-01-14 |
Pellicle, Exposure Master, Exposure Device And Method For Manufacturing Semiconductor Device
App 20200401039 - ONO; Yosuke ; et al. | 2020-12-24 |
Semiconductor Substrate Manufacturing Method, Semiconductor Device, And Method For Manufacturing Same
App 20200377772 - KAMADA; Jun ; et al. | 2020-12-03 |
Adhesive Member And Production Method For Adhesive Member
App 20200181457 - KAMADA; Jun ; et al. | 2020-06-11 |
Method For Producing Semiconductor Device And Intermediate For Semiconductor Device
App 20200168476 - KAMADA; Jun ; et al. | 2020-05-28 |
Pellicle frame, pellicle containing same, method for producing pellicle frame, and method for producing pellicle
Grant 10,606,169 - Kohmura , et al. | 2020-03-31 |
Pellicle, pellicle production method and exposure method using pellicle
Grant 10,585,348 - Kohmura , et al. | 2020-03-10 |
Pellicle, Exposure Original Plate, Exposure Device, And Semiconductor Device Manufacturing Method
App 20200064729 - KOHMURA; Kazuo ; et al. | 2020-02-27 |
Substrate Laminated Body And Method Of Manufacturing Substrate Laminated Body
App 20200048515 - KAMADA; Jun ; et al. | 2020-02-13 |
Pellicle, production method thereof, exposure method
Grant 10,488,751 - Kohmura , et al. Nov | 2019-11-26 |
Pellicle Frame And Pellicle
App 20190235377 - TAGUCHI; Yoshihiro ; et al. | 2019-08-01 |
Pellicle Film, Pellicle Frame, Pellicle, Method For Producing Same, Original Plate For Light Exposure, Light Exposure Apparatus And Method For Manufacturing Semiconductor Device
App 20190129300 - Ono; Yosuke ; et al. | 2019-05-02 |
Pellicle Film, Pellicle Frame Body, Pellicle, And Method For Manufacturing Pellicle
App 20190121229 - Okubo; Atsushi ; et al. | 2019-04-25 |
Pellicle film, pellicle frame, pellicle, and method for producing same
Grant 10,261,411 - Okubo , et al. | 2019-04-16 |
Pellicle frame, pellicle and method of manufacturing the same, original plate for exposure and method of manufacturing the same, exposure device, and method of manufacturing semiconductor device
Grant 10,216,081 - Kohmura , et al. Feb | 2019-02-26 |
Pellicle frame, pellicle and method of manufacturing the same, original plate for exposure and method of manufacturing the same, exposure device, and method of manufacturing semiconductor device
Grant 10185217 - | 2019-01-22 |
Pellicle membrane, pellicle, original plate for exposure, exposure apparatus, and method of producing semiconductor device
Grant 10,108,084 - Ono , et al. October 23, 2 | 2018-10-23 |
Pellicle Frame, Pellicle Containing Same, Method For Producing Pellicle Frame, And Method For Producing Pellicle
App 20180239242 - KOHMURA; Kazuo ; et al. | 2018-08-23 |
Method for manufacturing composite body and composition
Grant 10,020,238 - Kayaba , et al. July 10, 2 | 2018-07-10 |
Pellicle Manufacturing Method And Method For Manufacturing Photomask With Pellicle
App 20180046071 - KOHMURA; Kazuo ; et al. | 2018-02-15 |
Pellicle Film, Pellicle Frame, Pellicle, And Method For Producing Same
App 20170285461 - OKUBO; Atsushi ; et al. | 2017-10-05 |
Semiconductor device, method for manufacturing the same, and rinsing liquid
Grant 9,780,008 - Ono , et al. October 3, 2 | 2017-10-03 |
Support Frame For Pellicles
App 20170212418 - KOHMURA; Kazuo ; et al. | 2017-07-27 |
Pellicle and EUV exposure device comprising same
Grant 9,703,187 - Ono , et al. July 11, 2 | 2017-07-11 |
Pellicle Frame, Pellicle And Method Of Manufacturing The Same, Original Plate For Exposure And Method Of Manufacturing The Same, Exposure Device, And Method Of Manufacturing Semiconductor Device
App 20170192349 - KOHMURA; Kazuo ; et al. | 2017-07-06 |
Pellicle, Pellicle Production Method And Exposure Method Using Pellicle
App 20170184957 - KOHMURA; Kazuo ; et al. | 2017-06-29 |
Pellicle, Production Method Thereof, Exposure Method
App 20170184956 - KOHMURA; Kazuo ; et al. | 2017-06-29 |
Pellicle Membrane, Pellicle, Original Plate For Exposure, Exposure Apparatus, And Method Of Producing Semiconductor Device
App 20170090279 - ONO; Yosuke ; et al. | 2017-03-30 |
Pellicle And Euv Exposure Device Comprising Same
App 20160147141 - ONO; Yosuke ; et al. | 2016-05-26 |
Method For Manufacturing Composite Body And Composition
App 20160049343 - KAYABA; Yasuhisa ; et al. | 2016-02-18 |
Sealing composition for semiconductor, semiconductor device and method of producing the same, and polymer and method of producing the same
Grant 9,169,353 - Ono , et al. October 27, 2 | 2015-10-27 |
Semiconductor Device, Method For Manufacturing The Same, And Rinsing Liquid
App 20150187670 - Ono; Shoko ; et al. | 2015-07-02 |
Semiconductor device production method and rinse
Grant 8,956,977 - Ono , et al. February 17, 2 | 2015-02-17 |
Sealing Composition For Semiconductor, Semiconductor Device And Method Of Producing The Same, And Polymer And Method Of Producing The Same
App 20140367868 - Ono; Shoko ; et al. | 2014-12-18 |
Composition and method for production thereof, porous material and method for production thereof, interlayer insulating film, semiconductor material, semiconductor device, and low-refractive-index surface protection film
Grant 8,603,588 - Kohmura , et al. December 10, 2 | 2013-12-10 |
Semiconductor Device Production Method And Rinse
App 20130171826 - Ono; Shoko ; et al. | 2013-07-04 |
Precursor composition for porous thin film, method for preparation of the precursor composition, porous thin film, method for preparation of the porous thin film, and semiconductor device
Grant 8,394,457 - Fujii , et al. March 12, 2 | 2013-03-12 |
Semiconductor device and method of fabricating the same
Grant 8,384,208 - Shishida , et al. February 26, 2 | 2013-02-26 |
Composition for sealing semiconductor, semiconductor device, and process for producing semiconductor device
Grant 8,304,924 - Ono , et al. November 6, 2 | 2012-11-06 |
Manufacturing method of semiconductor device and semiconductor device produced therewith
Grant 8,288,295 - Oku , et al. October 16, 2 | 2012-10-16 |
Manufacturing method of semiconductor device and semiconductor device produced therewith
Grant 8,212,338 - Oku , et al. July 3, 2 | 2012-07-03 |
Method for forming porous insulation film
Grant 8,105,661 - Hyodo , et al. January 31, 2 | 2012-01-31 |
Composition For Sealing Semiconductor, Semiconductor Device, And Process For Producing Semiconductor Device
App 20110241210 - Ono; Shoko ; et al. | 2011-10-06 |
Composition And Method For Producton Thereof, Porous Material And Method For Production Thereof, Interlayer Insulating Film, Semiconductor Material, Semiconductor Device, And Low-refractive-index Surface Protection Film
App 20110018108 - Kohmura; Kazuo ; et al. | 2011-01-27 |
Method of modifying porous film, modified porous film and use of same
Grant 7,807,267 - Kohmura , et al. October 5, 2 | 2010-10-05 |
Manufacturing Method Of Semiconductor Device And Semiconductor Device Produced Therewith
App 20100200990 - OKU; Yoshiaki ; et al. | 2010-08-12 |
Manufacturing method of semiconductor device and semiconductor device produced therewith
Grant 7,727,907 - Oku , et al. June 1, 2 | 2010-06-01 |
Method for forming porous insulation film
Grant 7,585,789 - Hyodo , et al. September 8, 2 | 2009-09-08 |
Method for Preparing Modified Porous Silica Films, Modified Porous Silica Films Prepared According to This Method and Semiconductor Devices Fabricated Using the Modified Porous Silica Films
App 20090206453 - Fujii; Nobutoshi ; et al. | 2009-08-20 |
Precursor Composition For Porous Thin Film, Method For Preparation Of The Precursor Composition, Porous Thin Film, Method For Preparation Of The Porous Thin Film, And Semiconductor Device
App 20090186210 - Fujii; Nobutoshi ; et al. | 2009-07-23 |
Precursor composition for porous film and method for preparing the composition, porous film and method for preparing the porous film, and semiconductor device
App 20090053503 - Fujii; Nobutoshi ; et al. | 2009-02-26 |
Manufacturing Method Of Semiconductor Device And Semiconductor Device Produced Therewith
App 20080122101 - Oku; Yoshiaki ; et al. | 2008-05-29 |
Semiconductor device and method of fabricating the same
App 20080050566 - Shishida; Yoshinori ; et al. | 2008-02-28 |
Coating liquid for forming porous silica
Grant 7,291,215 - Oike , et al. November 6, 2 | 2007-11-06 |
Manufacturing Method of Semiconductor Device and Semiconductor Device Produced Therewith
App 20070228568 - Oku; Yoshiaki ; et al. | 2007-10-04 |
Method For Forming Porous Insulation Film
App 20070161257 - Hyodo; Yasuyoshi ; et al. | 2007-07-12 |
Method for forming porous insulation film
App 20070158013 - Hyodo; Yasuyoshi ; et al. | 2007-07-12 |
Coating liquid for forming porous silica
App 20070006776 - Oike; Shunsuke ; et al. | 2007-01-11 |
Method of modifying porous film, modified porous film and use of same
App 20060040110 - Kohmura; Kazuo ; et al. | 2006-02-23 |
Water-repellent porous silica, method for preparation thereof and use thereof
Grant 6,852,299 - Kohmura , et al. February 8, 2 | 2005-02-08 |
Water-repellent porous silica, method for preparation thereof and use thereof
App 20020160207 - Kohmura, Kazuo ; et al. | 2002-10-31 |
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