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Object observation apparatus and object observation Grant RE41,665 - Hamashima , et al. September 14, 2 | 2010-09-14 |
Electron beam apparatus and device production method using the electron beam apparatus Grant 7,439,502 - Nakasuji , et al. October 21, 2 | 2008-10-21 |
Electron beam apparatus and device production method using the electron beam apparatus App 20080173815 - Nakasuji; Mamoru ;   et al. | 2008-07-24 |
Object observation apparatus and object observation Grant RE40,221 - Hamashima , et al. April 8, 2 | 2008-04-08 |
Electron beam apparatus and device production method using the electron beam apparatus App 20070272859 - Nakasuji; Mamoru ;   et al. | 2007-11-29 |
Electron beam apparatus and device fabrication method using the electron beam apparatus Grant 7,244,932 - Nakasuji , et al. July 17, 2 | 2007-07-17 |
Electron beam apparatus, and inspection instrument and inspection process thereof App 20070034797 - Kohama; Yoshiaki | 2007-02-15 |
Electron beam apparatus, and inspection instrument and inspection process thereof App 20060022138 - Kohama; Yoshiaki | 2006-02-02 |
Electron beam apparatus, and inspection instrument and inspection process thereof Grant 6,958,477 - Kohama October 25, 2 | 2005-10-25 |
Scanning device and method including electric charge movement Grant 6,953,944 - Kohama , et al. October 11, 2 | 2005-10-11 |
Scanning device and method including electric charge movement App 20040238740 - Kohama, Yoshiaki ;   et al. | 2004-12-02 |
Electron beam apparatus, and inspection instrument and inspection process thereof App 20040106862 - Kohama, Yoshiaki | 2004-06-03 |
Electron beam apparatus, and inspection instrument and inspection process thereof Grant 6,677,587 - Kohama January 13, 2 | 2004-01-13 |
Scanning device and scanning method Grant 6,670,602 - Kohama , et al. December 30, 2 | 2003-12-30 |
Electron beam apparatus, and inspection instrument and inspection process thereof App 20030085355 - Kohama, Yoshiaki | 2003-05-08 |
Electron beam apparatus, and inspection instrument and inspection process thereof Grant 6,518,582 - Kohama February 11, 2 | 2003-02-11 |
Object observation apparatus and object observation Grant 6,479,819 - Hamashima , et al. November 12, 2 | 2002-11-12 |
Charged particle beam apparatus App 20020158198 - Kohama, Yoshiaki ;   et al. | 2002-10-31 |
Electron beam apparatus and device production method using the electron beam apparatus App 20020148961 - Nakasuji, Mamoru ;   et al. | 2002-10-17 |
Apparatus and method for inspecting predetermined region on surface of specimen using electron beam Grant 6,184,526 - Kohama , et al. February 6, 2 | 2001-02-06 |
Scanning electron microscope Grant 5,780,853 - Mori , et al. July 14, 1 | 1998-07-14 |
Charged particle microscope Grant 5,466,936 - Kohama , et al. November 14, 1 | 1995-11-14 |