Kohama; Tatsuya
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kohama; Tatsuya.The latest application filed is for "adjustment method and electron beam device".
- Kohama; Tatsuya - Tokyo JP
- Kohama; Tatsuya - Kanagawa JP
| Patent | Date |
|---|---|
| Adjustment method and electron beam device Grant 11,217,421 - Hayashi , et al. January 4, 2 | 2022-01-04 |
| Adjustment Method And Electron Beam Device App 20210012997 - HAYASHI; Takehide ; et al. | 2021-01-14 |
| Inspection device Grant 10,157,722 - Hatakeyama , et al. Dec | 2018-12-18 |
| Inspection Device App 20160307726 - Hatakeyama; Masahiro ; et al. | 2016-10-20 |
| Electro-optical inspection apparatus and method with dust or particle collection function Grant 9,105,444 - Watanabe , et al. August 11, 2 | 2015-08-11 |
| Sample observing device and sample observing method Grant 8,884,225 - Karimata , et al. November 11, 2 | 2014-11-11 |
| Electro-optical Inspection Apparatus And Method With Dust Or Particle Collection Function App 20140091215 - WATANABE; Kenji ; et al. | 2014-04-03 |
| Inspection Device App 20140014848 - Hatakeyama; Masahiro ; et al. | 2014-01-16 |
| Electro-optical inspection apparatus and method with dust or particle collection function Grant 8,624,182 - Watanabe , et al. January 7, 2 | 2014-01-07 |
| Inspection device Grant 8,497,476 - Hatakeyama , et al. July 30, 2 | 2013-07-30 |
| Sample Observing Device And Sample Observing Method App 20130161511 - Karimata; Tsutomu ; et al. | 2013-06-27 |
| Inspection Device App 20120235036 - Hatakeyama; Masahiro ; et al. | 2012-09-20 |
| Electro-optical Inspection Apparatus And Method With Dust Or Particle Collection Function App 20120074316 - WATANABE; Kenji ; et al. | 2012-03-29 |
| Polishing method Grant 7,960,188 - Ohta , et al. June 14, 2 | 2011-06-14 |
| Polishing Method App 20090286332 - OHTA; Shinrou ; et al. | 2009-11-19 |
| Method For Polishing A Workpiece App 20090142990 - KOHAMA; Tatsuya ; et al. | 2009-06-04 |
| Substrate polishing apparatus and substrate polishing method App 20070238395 - Kimura; Norio ; et al. | 2007-10-11 |
| Polishing pad and polishing apparatus App 20070135024 - Kobata; Itsuki ; et al. | 2007-06-14 |
| Method and apparatus for polishing a workpiece Grant 7,077,730 - Kohama , et al. July 18, 2 | 2006-07-18 |
| Polishing apparatus and polishing method App 20060105678 - Kohama; Tatsuya ; et al. | 2006-05-18 |
| Method and apparatus for polishing a workpiece App 20050020194 - Kohama, Tatsuya ; et al. | 2005-01-27 |
| Polishing method and apparatus Grant 6,663,469 - Kimura , et al. December 16, 2 | 2003-12-16 |
| Substrate polishing apparatus and substrate polishing mehod App 20020023715 - Kimura, Norio ; et al. | 2002-02-28 |
| Polishing method and apparatus App 20020002029 - Kimura, Norio ; et al. | 2002-01-03 |
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