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Aluminum Compounds And Methods Of Forming Aluminum- Containing Film Using The Same
App 20210147450 - HAN; Won Seok ; et al. | 2021-05-20 |
Group 4 Metal Element-containing Compounds, Method Of Preparing The Same, Precursor Compositions Including The Same For Forming A Film, And Method Of Forming A Film Using The Same
App 20200361969 - HAN; Won Seok ; et al. | 2020-11-19 |
Liquid precursor compositions, preparation methods thereof, and methods for forming layer using the composition
Grant 10,763,001 - Han , et al. Sep | 2020-09-01 |
Group 4 metal element-containing alkoxy compound, preparing method thereof, precursor composition including the same for film deposition, and method of depositing film using the same
Grant 10,131,680 - Han , et al. November 20, 2 | 2018-11-20 |
Liquid Precursor Compositions, Preparation Methods Thereof, And Methods For Forming Layer Using The Composition
App 20180286529 - HAN; Won Seok ; et al. | 2018-10-04 |
Liquid precursor compositions, preparation methods thereof, and methods for forming layer using the composition
Grant 10,014,089 - Han , et al. July 3, 2 | 2018-07-03 |
Group 4 metal element-containing compound, method of preparing the same, precursor composition including the same for depositing film, and method of depositing film using the same
Grant 10,005,795 - Han , et al. June 26, 2 | 2018-06-26 |
Group 4 Metal Element-containing Compound, Method Of Preparing The Same, Precursor Composition Including The Same For Depositing Film, And Method Of Depositing Film Using The Same
App 20180162882 - HAN; Won Seok ; et al. | 2018-06-14 |
Ruthenium compound, preparation method therefor, precursor composition for film deposition containing same, and method for depositing film by using same
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Novel Ruthenium Compound, Preparation Method Therefor, Precursor Composition For Film Deposition Containing Same, And Method For Depositing Film By Using Same
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Indium-containing Film And Composition For Forming The Same
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Liquid Precursor Compositions, Preparation Methods Thereof, And Methods For Forming Layer Using The Composition
App 20160314980 - HAN; Won Seok ; et al. | 2016-10-27 |
Indium-containing oxide film and preparing method thereof
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Aluminum precursor composition
Grant 9,255,324 - Koh , et al. February 9, 2 | 2016-02-09 |
Indium-containing Oxide Film And Preparing Method Thereof
App 20140335363 - Koh; Wonyong ; et al. | 2014-11-13 |
Aluminum Precursor Composition
App 20140050848 - Koh; Wonyong ; et al. | 2014-02-20 |
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Atomic layer deposition apparatus
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Selective formation of metal layers in an integrated circuit
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Methods Of Depositing A Ruthenium Film
App 20080171436 - Koh; Wonyong ; et al. | 2008-07-17 |
Ald Apparatus And Method For Depositing Multiple Layers Using The Same
App 20080075858 - Koh; Wonyong | 2008-03-27 |
Atomic Layer Deposition Apparatus
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Method and apparatus of time and space co-divided atomic layer deposition
App 20070215036 - Park; Hyung-Sang ; et al. | 2007-09-20 |
Semiconductor-processing Apparatus With Rotating Susceptor
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Semiconductor-processing apparatus with rotating susceptor
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Selective formation of metal layers in an integrated circuit
App 20060121733 - Kilpela; Olli V. ; et al. | 2006-06-08 |
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