| Patent | Date |
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Semiconductor device and method of manufacturing the same
Grant 10,797,056 - Kim , et al. October 6, 2 | 2020-10-06 |
Filter structure for chemical solution used in manufacturing integrated circuit and apparatus for supplying chemical solution including filter structure for chemical solution
Grant 10,688,437 - Koh , et al. | 2020-06-23 |
Semiconductor Device And Method Of Manufacturing The Same
App 20200161308 - KIM; Jin-A ; et al. | 2020-05-21 |
Semiconductor device and method of manufacturing the same
Grant 10,586,798 - Kim , et al. | 2020-03-10 |
Method of forming photoresist pattern and method of fabricating semiconductor device using the same
Grant 10,438,810 - Koh , et al. O | 2019-10-08 |
Filter Structure For Chemical Solution Used In Manufacturing Integrated Circuit And Apparatus For Supplying Chemical Solution In
App 20190232227 - Koh; Cha-won ; et al. | 2019-08-01 |
Photoresist polymers, photoresist compositions, methods of forming patterns and methods of manufacturing semiconductor devices
Grant 10,345,701 - Park , et al. July 9, 2 | 2019-07-09 |
Semiconductor Device And Method Of Manufacturing The Same
App 20190206872 - KIM; Jin-A ; et al. | 2019-07-04 |
Photoresist Polymers, Photoresist Compositions, Methods Of Forming Patterns And Methods Of Manufacturing Semiconductor Devices
App 20180069020 - PARK; Jin ; et al. | 2018-03-08 |
Methods of forming patterns using photoresist polymers and methods of manufacturing semiconductor devices
Grant 9,842,852 - Park , et al. December 12, 2 | 2017-12-12 |
Methods of forming patterns using photoresists
Grant 9,772,555 - Park , et al. September 26, 2 | 2017-09-26 |
Method Of Forming Photoresist Pattern And Method Of Fabricating Semiconductor Device Using The Same
App 20170125257 - KOH; Cha-Won ; et al. | 2017-05-04 |
Methods of forming a pattern of a semiconductor device
Grant 9,520,289 - Park , et al. December 13, 2 | 2016-12-13 |
Methods Of Forming Patterns Using Photoresists
App 20160358778 - PARK; Cheol-Hong ; et al. | 2016-12-08 |
Lithography apparatus having effective thermal electron enhancement unit and method of forming pattern using the same
Grant 9,482,953 - Koh , et al. November 1, 2 | 2016-11-01 |
Methods of forming patterns using photoresist polymers and methods of manufacturing semiconductor devices
App 20160170304 - PARK; Jin ; et al. | 2016-06-16 |
Methods of Manufacturing Semiconductor Device
App 20160049306 - Koh; Cha-won ; et al. | 2016-02-18 |
Methods of fabricating semiconductor devices
Grant 9,147,687 - Koh , et al. September 29, 2 | 2015-09-29 |
Methods Of Forming A Pattern Of A Semiconductor Device
App 20150243520 - PARK; Jin ; et al. | 2015-08-27 |
Method of forming fine patterns of semiconductor device
Grant 8,999,840 - Koh April 7, 2 | 2015-04-07 |
Methods of Fabricating Semiconductor Devices
App 20150093897 - Koh; Cha-Won ; et al. | 2015-04-02 |
Method Of Forming Fine Patterns Of Semiconductor Device
App 20150017808 - KOH; Cha-won | 2015-01-15 |
Lithography Apparatus Having Effective Thermal Electron Enhancement Unit And Method Of Forming Pattern Using The Same
App 20140327894 - KOH; Cha-Won ; et al. | 2014-11-06 |
Methods of forming fine patterns and methods of fabricating semiconductor devices
Grant 8,557,131 - Koh , et al. October 15, 2 | 2013-10-15 |
Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same
Grant 8,278,221 - Koh , et al. October 2, 2 | 2012-10-02 |
Methods Of Forming Fine Patterns And Methods Of Fabricating Semiconductor Devices
App 20120115331 - Koh; Cha-won ; et al. | 2012-05-10 |
Method Of Forming A Hard Mask And Method Of Forming A Fine Pattern Of Semiconductor Device Using The Same
App 20110269294 - Koh; Cha-won ; et al. | 2011-11-03 |
Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same
Grant 8,003,543 - Koh , et al. August 23, 2 | 2011-08-23 |
Method for forming hard mask patterns having a fine pitch and method for forming a semiconductor device using the same
Grant 7,998,874 - Lee , et al. August 16, 2 | 2011-08-16 |
Method for forming fine patterns of a semiconductor device using a double patterning process
Grant 7,892,982 - Lee , et al. February 22, 2 | 2011-02-22 |
Method for forming patterns of semiconductor device
Grant 7,862,988 - Koh , et al. January 4, 2 | 2011-01-04 |
Method of forming pattern
Grant 7,842,451 - Koh , et al. November 30, 2 | 2010-11-30 |
Flash Memory Device Using Double Patterning Technology and Method of Manufacturing the Same
App 20100290285 - Lee; Doo-youl ; et al. | 2010-11-18 |
Flash memory device using double patterning technology and method of manufacturing the same
Grant 7,787,301 - Lee , et al. August 31, 2 | 2010-08-31 |
Method Of Forming A Hard Mask And Method Of Forming A Fine Pattern Of Semiconductor Device Using The Same
App 20100197139 - Koh; Cha-won ; et al. | 2010-08-05 |
Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same
Grant 7,732,341 - Koh , et al. June 8, 2 | 2010-06-08 |
E-beam lithography system for synchronously irradiating a plurality of photomasks and method of fabricating photomasks using the same
Grant 7,723,702 - Yoon , et al. May 25, 2 | 2010-05-25 |
Method of forming fine metal patterns for a semiconductor device using a damascene process
Grant 7,687,369 - Koh , et al. March 30, 2 | 2010-03-30 |
Nonvolatile memory device and method of manufacturing the same
Grant 7,678,650 - Koh , et al. March 16, 2 | 2010-03-16 |
Method Of Forming Pattern
App 20090291561 - Koh; Cha-Won ; et al. | 2009-11-26 |
Nonvolatile memory device and method of manufacturing the same
App 20090258473 - Koh; Cha-Won ; et al. | 2009-10-15 |
Semiconductor device having overlay measurement mark and method of fabricating the same
Grant 7,582,899 - Koh , et al. September 1, 2 | 2009-09-01 |
Method of forming pattern
Grant 7,575,855 - Koh , et al. August 18, 2 | 2009-08-18 |
Nonvolatile memory device and method of manufacturing the same
Grant 7,560,768 - Koh , et al. July 14, 2 | 2009-07-14 |
Methods of fabricating a semiconductor device
Grant 7,540,970 - Koh , et al. June 2, 2 | 2009-06-02 |
Method of forming a mask structure and method of forming a minute pattern using the same
Grant 7,452,825 - Lee , et al. November 18, 2 | 2008-11-18 |
Method of forming fine metal patterns for a semiconductor device using a damascene process
App 20080200026 - Koh; Cha-won ; et al. | 2008-08-21 |
Method of forming pattern for semiconductor device
Grant 7,387,869 - Koh , et al. June 17, 2 | 2008-06-17 |
Method for forming hard mask patterns having a fine pitch and method for forming a semiconductor device using the same
App 20080131793 - Lee; Hak-sun ; et al. | 2008-06-05 |
Method for forming fine patterns of a semiconductor device using a double patterning process
App 20080124931 - Lee; Doo-youl ; et al. | 2008-05-29 |
Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same
App 20080090419 - Koh; Cha-won ; et al. | 2008-04-17 |
Methods of Forming Fine Patterns In Integrated Circuits Using Atomic Layer Deposition
App 20080076070 - Koh; Cha-won ; et al. | 2008-03-27 |
Flash memory device using double patterning technology and method of manufacturing the same
App 20080067550 - Lee; Doo-youl ; et al. | 2008-03-20 |
Method of forming a mask structure and method of forming a minute pattern using the same
App 20080057610 - Lee; Doo-Youl ; et al. | 2008-03-06 |
Process for forming a fine pattern using a top-coating composition for a photoresist and product formed by same
Grant 7,329,477 - Jung , et al. February 12, 2 | 2008-02-12 |
Method of fabricating semiconductor device
App 20070197014 - Jeon; Jin-ho ; et al. | 2007-08-23 |
E-beam lithography system for synchronously irradiating a plurality of photomasks and method of fabricating photomasks using the same
App 20070181828 - Yoon; Je-bum ; et al. | 2007-08-09 |
Mask having balance pattern and method of patterning photoresist using the same
App 20070178391 - Kim; Tae-Young ; et al. | 2007-08-02 |
Nonvolatile memory device and method of manufacturing the same
App 20070111441 - Koh; Cha-Won ; et al. | 2007-05-17 |
Method for forming patterns of semiconductor device
App 20070077524 - Koh; Cha-Won ; et al. | 2007-04-05 |
Methods of fabricating a semiconductor device
App 20070020565 - Koh; Cha-Won ; et al. | 2007-01-25 |
Semiconductor device having overlay measurement mark and method of fabricating the same
App 20060131576 - Koh; Cha-Won ; et al. | 2006-06-22 |
Top-coating composition for photoresist and process for forming fine pattern using the same
Grant 6,984,482 - Jung , et al. January 10, 2 | 2006-01-10 |
Method of forming pattern
App 20050282092 - Koh, Cha-Won ; et al. | 2005-12-22 |
Method of forming pattern for semiconductor device
App 20050266356 - Koh, Cha-Won ; et al. | 2005-12-01 |
Process for forming a fine pattern using a top-coating composition for a photoresist and product formed by same
App 20050069816 - Jung, Jae Chang ; et al. | 2005-03-31 |
Maleimide-photoresist monomers containing halogen, polymers thereof and photoresist compositions comprising the same
Grant 6,858,371 - Lee , et al. February 22, 2 | 2005-02-22 |
Method for forming fine patterns in semiconductor device
Grant 6,833,326 - Koh , et al. December 21, 2 | 2004-12-21 |
Photoresist polymer for top-surface imaging process by silylation and photoresist composition containing the same
Grant 6,770,415 - Lee , et al. August 3, 2 | 2004-08-03 |
Over-coating composition for photoresist, and processes for forming photoresist patterns using the same
Grant 6,764,806 - Jung , et al. July 20, 2 | 2004-07-20 |
Process for forming a photoresist pattern comprising alkaline treatment
Grant 6,699,644 - Lee , et al. March 2, 2 | 2004-03-02 |
Process for forming photoresist pattern by using gas phase amine treatment
Grant 6,664,031 - Jung , et al. December 16, 2 | 2003-12-16 |
Photoresist composition for top-surface imaging processes by silylation
Grant 6,630,281 - Koh , et al. October 7, 2 | 2003-10-07 |
Method for forming fine patterns in semiconductor device
App 20030186547 - Koh, Cha Won ; et al. | 2003-10-02 |
Photoresist composition for top-surface imaging process by silylation
Grant 6,627,378 - Koh September 30, 2 | 2003-09-30 |
Method for forming micro-pattern of semiconductor device
Grant 6,610,616 - Koh , et al. August 26, 2 | 2003-08-26 |
Method and forming fine patterns of semiconductor devices using passivation layers
Grant 6,599,844 - Koh , et al. July 29, 2 | 2003-07-29 |
Top-coating composition for photoresist and process for forming fine pattern using the same
App 20030108815 - Jung, Jae Chang ; et al. | 2003-06-12 |
Maleimide-photoresist monomers containing halogen, polymers thereof and photoresist compositions comprising the same
App 20030013037 - Lee, Geun Su ; et al. | 2003-01-16 |
Novel photoresist monomer having hydroxy group and carboxy group, copolymer thereof and photoresist composition using the same
App 20020091216 - Lee, Geun Su ; et al. | 2002-07-11 |
Method for forming micro-pattern of semiconductor device
App 20020090832 - Koh, Cha-Won ; et al. | 2002-07-11 |
Photoresist monomer having hydroxy group and carboxy group, copolymer thereof and photoresist composition using the same
Grant 6,410,670 - Lee , et al. June 25, 2 | 2002-06-25 |
Photoresist polymer for top-surface imaging process by silylation and photoresist composition containing the same
App 20020061461 - Lee, Geun Su ; et al. | 2002-05-23 |
Photoresist composition for top-surface imaging processes by silylation
App 20020031721 - Koh, Cha Won ; et al. | 2002-03-14 |
Copolymer resin, preparation thereof, and photoresist using the same
Grant 6,348,296 - Jung , et al. February 19, 2 | 2002-02-19 |
Method and forming fine patterns of semiconductor devices using passivation layers
App 20020006585 - Koh, Cha-Won ; et al. | 2002-01-17 |
Process for forming photoresist pattern by using gas phase amine treatment
App 20010053590 - Jung, Jae Chang ; et al. | 2001-12-20 |
Over-coating composition for photoresist, and processes for forming photoresist patterns using the same
App 20010003030 - Jung, Jae Chang ; et al. | 2001-06-07 |
Photoresist monomers, polymers thereof, and photoresist compositions containing the same
Grant 6,235,447 - Lee , et al. May 22, 2 | 2001-05-22 |
Photoresist film for deep ultra violet and method for forming photoresist film pattern using the same
Grant 5,888,698 - Koh , et al. March 30, 1 | 1999-03-30 |
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