Patent | Date |
---|
Substitution site measuring equipment and substitution site measuring method Grant 10,627,354 - Anan , et al. | 2020-04-21 |
Substitution Site Measuring Equipment and Substitution Site Measuring Method App 20190017948 - ANAN; Yoshihiro ;   et al. | 2019-01-17 |
Method for evaluating structural change during production process, and analysis program Grant 10,088,450 - Nakayama , et al. October 2, 2 | 2018-10-02 |
Method For Evaluating Structural Change During Production Process, And Analysis Program App 20170315091 - NAKAYAMA; Takeshi ;   et al. | 2017-11-02 |
Charged-particle-beam analysis device and analysis method Grant 9,752,997 - Anan , et al. September 5, 2 | 2017-09-05 |
Spectroscopic element and charged particle beam device using the same Grant 9,601,308 - Anan , et al. March 21, 2 | 2017-03-21 |
Charged-particle-beam Analysis Device And Analysis Method App 20170067838 - ANAN; Yoshihiro ;   et al. | 2017-03-09 |
Spectroscopic Element And Charged Particle Beam Device Using The Same App 20150318144 - Anan; Yoshihiro ;   et al. | 2015-11-05 |
Calculation System And Calculation Method App 20150293040 - Aramaki; Koji ;   et al. | 2015-10-15 |
Charged particle beam analyzer and analysis method Grant 8,481,932 - Anan , et al. July 9, 2 | 2013-07-09 |
Multi-part specimen holder with conductive patterns Grant 8,334,519 - Ono , et al. December 18, 2 | 2012-12-18 |
Charged Particle Beam Analyzer And Analysis Method App 20120257720 - ANAN; Yoshihiro ;   et al. | 2012-10-11 |
Diffraction Pattern Capturing Method And Charged Particle Beam Device App 20110049344 - Dobashi; Takashi ;   et al. | 2011-03-03 |
Electric charged particle beam microscopy and electric charged particle beam microscope Grant 7,633,064 - Tsuneta , et al. December 15, 2 | 2009-12-15 |
Magnetic electron microscope Grant 7,518,111 - Matsumoto , et al. April 14, 2 | 2009-04-14 |
Magnetic Electron Microscope App 20090078869 - Matsumoto; Takao ;   et al. | 2009-03-26 |
Electron microscope App 20080283748 - Matsumoto; Takao ;   et al. | 2008-11-20 |
Scanning interference electron microscope Grant 7,417,227 - Matsumoto , et al. August 26, 2 | 2008-08-26 |
Scanning transmission electron microscope and scanning transmission electron microscopy Grant 7,372,029 - Tsuneta , et al. May 13, 2 | 2008-05-13 |
Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system Grant 7,372,051 - Tsuneta , et al. May 13, 2 | 2008-05-13 |
Electric Charged Particle Beam Microscopy And Electric Charged Particle Beam Microscope App 20080093551 - TSUNETA; Ruriko ;   et al. | 2008-04-24 |
Specimen Analyzing Apparatus and Specimen Holder App 20080067374 - Ono; Shiano ;   et al. | 2008-03-20 |
Scanning transmission electron microscope and scanning transmission electron microscopy App 20070228277 - Tsuneta; Ruriko ;   et al. | 2007-10-04 |
Scanning transmission electron microscope and scanning transmission electron microscopy Grant 7,227,144 - Tsuneta , et al. June 5, 2 | 2007-06-05 |
Defect inspection instrument and positron beam apparatus Grant 7,141,790 - Koguchi , et al. November 28, 2 | 2006-11-28 |
Scanning transmission electron microscope and scanning transmission electron microscopy App 20060151701 - Tsuneta; Ruriko ;   et al. | 2006-07-13 |
Scanning interference electron microscope App 20060124850 - Matsumoto; Takao ;   et al. | 2006-06-15 |
Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system App 20060038125 - Tsuneta; Ruriko ;   et al. | 2006-02-23 |
Electron microscope Grant 6,888,139 - Tsuneta , et al. May 3, 2 | 2005-05-03 |
Method and apparatus for charged particle beam microscopy Grant 6,838,667 - Tsuneta , et al. January 4, 2 | 2005-01-04 |
Defect inspection instrument and positron beam apparatus App 20040227078 - Koguchi, Masanari ;   et al. | 2004-11-18 |
Observation apparatus and observation method using an electron beam Grant 6,750,451 - Koguchi , et al. June 15, 2 | 2004-06-15 |
Electron microscope App 20030201393 - Tsuneta, Ruriko ;   et al. | 2003-10-30 |
Autoadjusting electron microscope Grant 6,570,156 - Tsuneta , et al. May 27, 2 | 2003-05-27 |
Observation apparatus and observation method using an electron beam App 20030006373 - Koguchi, Masanari ;   et al. | 2003-01-09 |
Network solution system of analysis and evaluation App 20020099573 - Koguchi, Masanari ;   et al. | 2002-07-25 |
Method and apparatus for charged particle beam microscopy App 20020056808 - Tsuneta, Ruriko ;   et al. | 2002-05-16 |
Electron microscope Grant 6,051,834 - Kakibayashi , et al. April 18, 2 | 2000-04-18 |
Scintillator device and image pickup apparatus using the same Grant 5,932,880 - Koguchi , et al. August 3, 1 | 1999-08-03 |
Electron microscope Grant 5,866,905 - Kakibayashi , et al. February 2, 1 | 1999-02-02 |
Electron microscope Grant 5,552,602 - Kakibayashi , et al. September 3, 1 | 1996-09-03 |
Semiconductor device using whiskers Grant 5,362,972 - Yazawa , et al. November 8, 1 | 1994-11-08 |