KOENEN; Willem Herman Gertruda Anna

Patent Applications and Registrations

Patent applications and USPTO patent grants for KOENEN; Willem Herman Gertruda Anna.The latest application filed is for "method of controlling a position of a first object relative to a second object, control unit, lithographic apparatus and apparatus".

Company Profile

3.17.16

KOENEN; Willem Herman Gertruda Anna - Roermond NL
- Roermond NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method Of Controlling A Position Of A First Object Relative To A Second Object, Control Unit, Lithographic Apparatus And Apparatus App 20220299889 - VAN KEULEN; Thijs Adriaan Cornelis ; et al.	2022-09-22
Position measurement system, grating for a position measurement system and method Grant 9,651,877 - Koenen May 16, 2	2017-05-16
Lithographic apparatus, device manufacturing method and displacement measurement system Grant 9,575,416 - Van Der Pasch , et al. February 21, 2	2017-02-21
Substrate positioning system, lithographic apparatus and device manufacturing method Grant 9,470,988 - Van Der Pasch , et al. October 18, 2	2016-10-18
Position Measurement System, Grating For A Position Measurement System And Method App 20150316856 - KOENEN; Willem Herman Gertruda Anna	2015-11-05
Substrate Positioning System, Lithographic Apparatus And Device Manufacturing Method App 20150277242 - Van Der Pasch; Engelbertus Antonius Fransiscus ; et al.	2015-10-01
Lithographic Apparatus, Device Manufacturing Method And Displacement Measurement System App 20150212428 - Van Der Pasch; Engelbertus Antonius Fransiscus ; et al.	2015-07-30
Position measurement system, lithographic apparatus and device manufacturing method Grant 8,922,756 - Koenen , et al. December 30, 2	2014-12-30
Position measurement system, lithographic apparatus and device manufacturing method Grant 08922756 -	2014-12-30
Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus Grant 8,781,775 - Butler , et al. July 15, 2	2014-07-15
Measurement system, method and lithographic apparatus Grant 8,681,316 - Cox , et al. March 25, 2	2014-03-25
Stage system, lithographic apparatus including such stage system, and correction method Grant 8,451,454 - Koenen , et al. May 28, 2	2013-05-28
Position Measurement System, Lithographic Apparatus And Device Manufacturing Method App 20130050670 - Koenen; Willem Herman Gertruda Anna ; et al.	2013-02-28
Lithographic projection apparatus and method for controlling a support structure Grant 8,174,671 - Loopstra , et al. May 8, 2	2012-05-08
Measurement System, Method And Litographic Apparatus App 20110317142 - Cox; Henrikus Herman Marie ; et al.	2011-12-29
Lithographic Apparatus And Method For Correcting A Position Of A Stage Of A Lithographic Apparatus App 20110208459 - Butler; Hans ; et al.	2011-08-25
Calibration methods, lithographic apparatus and patterning device for such lithographic apparatus Grant 7,889,314 - Koenen February 15, 2	2011-02-15
Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program Grant 7,756,597 - Van Den Nieuwelaar , et al. July 13, 2	2010-07-13
Lithographic apparatus and device manufacturing method Grant 7,557,903 - Schoormans , et al. July 7, 2	2009-07-07
Stage system, lithographic apparatus including such stage system, and correction method App 20090128791 - Koenen; Willem Herman Gertruda Anna ; et al.	2009-05-21
Lithographic Projection Apparatus and Method for Controlling a Support Structure App 20080319569 - LOOPSTRA; Erik Roelof ; et al.	2008-12-25
Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness Grant 7,333,174 - Koenen , et al. February 19, 2	2008-02-19
Calibration methods, lithographic apparatus and patterning device for such lithographic apparatus App 20070222965 - Koenen; Willem Herman Gertruda Anna	2007-09-27
Lithographic apparatus and device manufacturing method App 20070132980 - Schoormans; Carolus Johannes Catharina ; et al.	2007-06-14
Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness App 20060170892 - Koenen; Willem Herman Gertruda Anna ; et al.	2006-08-03
Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness App 20060139595 - Koenen; Willem Herman Gertruda Anna ; et al.	2006-06-29
Lithographic apparatus, system, method, computer program, and apparatus for height map analysis Grant 7,012,672 - Van Rhee , et al. March 14, 2	2006-03-14
Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program App 20050102723 - Van Den Nieuwelaar, Norbertus Josephus Martinus ; et al.	2005-05-12
Lithographic apparatus, system, method, computer program, and apparatus for height map analysis App 20040239905 - Van Rhee, Tasja ; et al.	2004-12-02

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