Koemtzopoulos; C. Robert
Patent Applications and Registrations
Patent applications and USPTO patent grants for Koemtzopoulos; C. Robert.The latest application filed is for "process for wafer temperature verification in etch tools".
- Koemtzopoulos; C. Robert - Castro Valley CA
- Koemtzopoulos; C. Robert - Hayward CA
| Patent | Date |
|---|---|
| Process for wafer temperature verification in etch tools Grant 7,951,616 - Kanarik , et al. May 31, 2 | 2011-05-31 |
| Dual doped polysilicon and silicon germanium etch Grant 7,682,985 - Koemtzopoulos , et al. March 23, 2 | 2010-03-23 |
| Method for hard mask CD trim Grant 7,667,281 - Koemtzopoulos , et al. February 23, 2 | 2010-02-23 |
| Process For Wafer Temperature Verification In Etch Tools App 20100022033 - KANARIK; Keren J. ; et al. | 2010-01-28 |
| Method for hard mask CD trim Grant 7,425,277 - Koemtzopoulos , et al. September 16, 2 | 2008-09-16 |
| Method for Hard Mask CD Trim App 20070249177 - Koemtzopoulos; C. Robert ; et al. | 2007-10-25 |
| Dual doped polysilicon and silicon germanium etch App 20050205862 - Koemtzopoulos, C. Robert ; et al. | 2005-09-22 |
| Method of and apparatus for detecting and controlling in situ cleaning time of vacuum processing chambers Grant 6,303,044 - Koemtzopoulos , et al. October 16, 2 | 2001-10-16 |
| Process for precoating plasma CVD reactors Grant 6,071,573 - Koemtzopoulos , et al. June 6, 2 | 2000-06-06 |
| Microwave plasma processor Grant 6,016,766 - Pirkle , et al. January 25, 2 | 2000-01-25 |
| Method of and apparatus for detecting and controlling in situ cleaning time of vacuum processing chambers Grant 6,017,414 - Koemtzopoulos , et al. January 25, 2 | 2000-01-25 |
| Chemical vapor deposition system with a plasma chamber having separate process gas and cleaning gas injection ports Grant 5,988,187 - Trussell , et al. November 23, 1 | 1999-11-23 |
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