Patent | Date |
---|
Modular multiple display electronic devices Grant 10,725,722 - Koelmel , et al. | 2020-07-28 |
Apparatus and method for enhancing the cool down of radiatively heated substrates Grant 9,640,412 - Aderhold , et al. May 2, 2 | 2017-05-02 |
Rapid thermal processing chamber with micro-positioning system Grant 9,564,349 - Sorabji , et al. February 7, 2 | 2017-02-07 |
Apparatus and method for improved control of heating and cooling of substrates Grant 9,552,989 - Koelmel , et al. January 24, 2 | 2017-01-24 |
Transparent reflector plate for rapid thermal processing chamber Grant 9,449,858 - Koelmel , et al. September 20, 2 | 2016-09-20 |
Rapid thermal processing chamber with micro-positioning system Grant 9,390,950 - Sorabji , et al. July 12, 2 | 2016-07-12 |
Rapid Thermal Processing Chamber with Micro-Positioning System App 20150050118 - Sorabji; Khurshed ;   et al. | 2015-02-19 |
Rapid thermal processing chamber with micro-positioning system Grant 8,900,889 - Sorabji , et al. December 2, 2 | 2014-12-02 |
Apparatus and Method for Improved Control of Heating and Cooling of Substrates App 20140004716 - Koelmel; Blake R. ;   et al. | 2014-01-02 |
Apparatus and method for improved control of heating and cooling of substrates Grant 8,548,311 - Koelmel , et al. October 1, 2 | 2013-10-01 |
Methods and apparatus for aligning a substrate in a process chamber Grant 8,461,022 - Koelmel , et al. June 11, 2 | 2013-06-11 |
Rapid Thermal Processing Chamber With Micro-positioning System App 20130043235 - Sorabji; Khurshed ;   et al. | 2013-02-21 |
Rapid Thermal Processing Chamber With Micro-positioning System App 20130043632 - Sorabji; Khurshed ;   et al. | 2013-02-21 |
Apparatus including heating source reflective filter for pyrometry Grant 8,367,983 - Ranish , et al. February 5, 2 | 2013-02-05 |
Rapid thermal processing chamber with micro-positioning system Grant 8,314,371 - Sorabji , et al. November 20, 2 | 2012-11-20 |
Apparatus including heating source reflective filter for pyrometry Grant 8,283,607 - Ranish , et al. October 9, 2 | 2012-10-09 |
Transparent Reflector Plate For Rapid Thermal Processing Chamber App 20120070136 - Koelmel; Blake R. ;   et al. | 2012-03-22 |
Apparatus and Method for Enhancing the Cool Down of Radiatively Heated Substrates App 20110123178 - Aderhold; Wolfgang ;   et al. | 2011-05-26 |
Methods And Apparatus For Aligning A Substrate In A Process Chamber App 20100264132 - KOELMEL; BLAKE R. ;   et al. | 2010-10-21 |
Rapid Thermal Processing Chamber With Micro-Positioning System App 20100133257 - Sorabji; Khurshed ;   et al. | 2010-06-03 |
Apparatus and Method for Improved Control of Heating and Cooling of Substrates App 20100074604 - Koelmel; Blake R. ;   et al. | 2010-03-25 |
Apparatus Including Heating Source Reflective Filter for Pyrometry App 20090289053 - Ranish; Joseph M. ;   et al. | 2009-11-26 |
Apparatus Including Heating Source Reflective Filter For Pyrometry App 20090255921 - Ranish; Joseph M. ;   et al. | 2009-10-15 |