Koelmel; Blake

Patent Applications and Registrations

Patent applications and USPTO patent grants for Koelmel; Blake.The latest application filed is for "wafer edge measurement and control".

Company Profile

0.33.29

Koelmel; Blake - Mountain View CA
Koelmel; Blake - Palo Alto CA US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Wafer edge measurement and control Grant 10,483,145 - Koelmel Nov	2019-11-19
Non-contact substrate processing Grant 10,074,555 - Koelmel , et al. September 11, 2	2018-09-11
Wafer Edge Measurement And Control App 20180033667 - KOELMEL; Blake	2018-02-01
Wafer edge measurement and control Grant 9,786,537 - Koelmel October 10, 2	2017-10-10
Apparatus and methods for positioning a substrate using capacitive sensors Grant 9,245,786 - Koelmel , et al. January 26, 2	2016-01-26
Edge ring for a thermal processing chamber Grant 9,130,001 - Koelmel , et al. September 8, 2	2015-09-08
Edge ring for a thermal processing chamber Grant 9,076,828 - Koelmel , et al. July 7, 2	2015-07-07
Spike anneal residence time reduction in rapid thermal processing chambers Grant 8,939,760 - Li , et al. January 27, 2	2015-01-27
Edge ring lip Grant 8,865,602 - Ranish , et al. October 21, 2	2014-10-21
Edge Ring For A Thermal Processing Chamber App 20140270736 - KOELMEL; Blake ; et al.	2014-09-18
Edge Ring For A Thermal Processing Chamber App 20140233929 - KOELMEL; Blake ; et al.	2014-08-21
Apparatus and method for measuring radiation energy during thermal processing Grant 8,761,587 - Ranish , et al. June 24, 2	2014-06-24
Edge ring for a thermal processing chamber Grant 8,755,680 - Koelmel , et al. June 17, 2	2014-06-17
Edge ring for a thermal processing chamber Grant 8,744,250 - Koelmel , et al. June 3, 2	2014-06-03
High temperature vacuum chuck assembly Grant 8,698,048 - Lerner , et al. April 15, 2	2014-04-15
Edge Ring Lip App 20140094039 - RANISH; JOSEPH M. ; et al.	2014-04-03
Wafer Edge Measurement And Control App 20130287536 - Koelmel; Blake	2013-10-31
Apparatus And Method For Measuring Radiation Energy During Thermal Processing App 20130280824 - Ranish; Joseph M. ; et al.	2013-10-24
Non-contact Substrate Processing App 20130224962 - KOELMEL; Blake ; et al.	2013-08-29
Spike Anneal Residence Time Reduction In Rapid Thermal Processing Chambers App 20130206362 - Li; Jiping ; et al.	2013-08-15
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,490,660 - Koelmel , et al. July 23, 2	2013-07-23
Apparatus and method for measuring radiation energy during thermal processing Grant 8,452,166 - Ranish , et al. May 28, 2	2013-05-28
Method and apparatus for detecting the substrate temperature in a laser anneal system Grant 8,434,937 - Koelmel , et al. May 7, 2	2013-05-07
Edge Ring For A Thermal Processing Chamber App 20130058636 - Koelmel; Blake ; et al.	2013-03-07
Non-contact substrate processing Grant 8,388,853 - Koelmel , et al. March 5, 2	2013-03-05
Apparatus And Methods For Positioning A Substrate Using Capacitive Sensors App 20120304928 - KOELMEL; BLAKE ; et al.	2012-12-06
Apparatus And Methods For Supporting And Controlling A Substrate App 20120309115 - KOELMEL; BLAKE ; et al.	2012-12-06
Apparatus and method of aligning and positioning a cold substrate on a hot surface Grant 8,309,475 - Koelmel , et al. November 13, 2	2012-11-13
Edge Ring For A Thermal Processing Chamber App 20120213500 - Koelmel; Blake ; et al.	2012-08-23
High Temperature Vacuum Chuck Assembly App 20120205878 - Lerner; Alexander N. ; et al.	2012-08-16
High temperature vacuum chuck assembly Grant 8,198,567 - Lerner , et al. June 12, 2	2012-06-12
Apparatus And Method Of Aligning And Positioning A Cold Substrate On A Hot Surface App 20120122253 - Koelmel; Blake ; et al.	2012-05-17
Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20120055405 - Koelmel; Blake ; et al.	2012-03-08
Apparatus and method of aligning and positioning a cold substrate on a hot surface Grant 8,097,543 - Koelmel , et al. January 17, 2	2012-01-17
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,057,601 - Koelmel , et al. November 15, 2	2011-11-15
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,057,602 - Koelmel , et al. November 15, 2	2011-11-15
Method for reducing stray light in a rapid thermal processing chamber by polarization Grant 7,985,945 - Koelmel , et al. July 26, 2	2011-07-26
Millisecond annealing (DSA) edge protection Grant 7,923,280 - Koelmel , et al. April 12, 2	2011-04-12
Millisecond Annealing (dsa) Edge Protection App 20100273334 - Koelmel; Blake ; et al.	2010-10-28
Non-contact Substrate Processing App 20100200545 - Koelmel; Blake ; et al.	2010-08-12
Millisecond annealing (DSA) edge protection Grant 7,754,518 - Koelmel , et al. July 13, 2	2010-07-13
Apparatus And Method For Measuring Radiation Energy During Thermal Processing App 20100003020 - Ranish; Joseph M. ; et al.	2010-01-07
Method And Apparatus For Detecting The Substrate Temperature In A Laser Anneal System App 20090296774 - Koelmel; Blake ; et al.	2009-12-03
Method For Reducing Stray Light In A Rapid Thermal Processing Chamber By Polarization App 20090277894 - KOELMEL; BLAKE ; et al.	2009-11-12
Millisecond Annealing (dsa) Edge Protection App 20090209112 - Koelmel; Blake ; et al.	2009-08-20
Apparatus And Method Of Aligning And Positioning A Cold Substrate On A Hot Surface App 20090181553 - Koelmel; Blake ; et al.	2009-07-16
High Temperature Vacuum Chuck Assembly App 20090179365 - Lerner; Alexander N. ; et al.	2009-07-16
Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20080276864 - KOELMEL; BLAKE ; et al.	2008-11-13
Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20080280453 - KOELMEL; Blake ; et al.	2008-11-13