KODASHIMA; Akira
Patent Applications and Registrations
Patent applications and USPTO patent grants for KODASHIMA; Akira.The latest application filed is for "substrate processing system".
- KODASHIMA; Akira - Miyagi JP
- Kodashima; Akira - Nirasaki JP
- Kodashima; Akira - Nirasaki-shi JP
| Patent | Date |
|---|---|
| Substrate Processing System App 20210057243 - MOTEGI; Suguru ; et al. | 2021-02-25 |
| Substrate Processing System App 20210043480 - MOTEGI; Suguru ; et al. | 2021-02-11 |
| Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator Grant 7,922,865 - Miyata , et al. April 12, 2 | 2011-04-12 |
| Substrate processing apparatus and lid supporting apparatus for the substrate processing apparatus Grant 7,883,579 - Kodashima , et al. February 8, 2 | 2011-02-08 |
| Substrate processing apparatus and lid supporting apparatus for the substrate processing apparatus App 20070131167 - Kodashima; Akira ; et al. | 2007-06-14 |
| Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator App 20040094509 - Miyata, Koji ; et al. | 2004-05-20 |
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