KODAMA; Teruhiko

Patent Applications and Registrations

Patent applications and USPTO patent grants for KODAMA; Teruhiko.The latest application filed is for "substrate processing method, substrate processing apparatus, and storage medium".

Company Profile

8.11.16

KODAMA; Teruhiko - Kumamoto JP
Kodama; Teruhiko - Koshi JP
Kodama; Teruhiko - Koshi City JP
Kodama; Teruhiko - Sanyo-Onoda JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Processing Method, Substrate Processing Apparatus, And Storage Medium App 20220113628 - TANAKA; Keiichi ; et al.	2022-04-14
Substrate processing capable of suppressing a decrease in throughput while reducing the impact on exposure treatment caused by warping of a substrate Grant 11,287,798 - Kodama , et al. March 29, 2	2022-03-29
Substrate Processing Apparatus And Substrate Processing Method App 20210398827 - Mouri; Nobuhiko ; et al.	2021-12-23
Substrate processing apparatus and substrate processing method Grant 11,139,182 - Mouri , et al. October 5, 2	2021-10-05
Substrate treatment apparatus, substrate treatment method, and computer storage medium Grant 11,126,086 - Kodama , et al. September 21, 2	2021-09-21
Substrate Cleaning Apparatus And Substrate Cleaning Method App 20210220878 - Kubo; Akihiro ; et al.	2021-07-22
Substrate Warpage Correction Method, Computer Storage Medium, And Substrate Warpage Correction Apparatus App 20210039221 - KANETAKE; Nozomu ; et al.	2021-02-11
Substrate Processing Apparatus And Substrate Processing Method App 20200365417 - Kubo; Akihiro ; et al.	2020-11-19
Substrate processing apparatus, substrate processing method and storage medium Grant 10,840,079 - Takiguchi , et al. November 17, 2	2020-11-17
Substrate processing apparatus, substrate processing method and storage medium Grant 10,649,335 - Kodama , et al.	2020-05-12
Substrate Processing Apparatus, Substrate Processing Method And Memory Medium App 20200096966 - KODAMA; Teruhiko ; et al.	2020-03-26
Substrate processing apparatus, substrate processing method and memory medium Grant 10,528,028 - Kodama , et al. J	2020-01-07
Substrate Treatment Apparatus, Substrate Treatment Method, And Computer Storage Medium App 20190212653 - KODAMA; Teruhiko ; et al.	2019-07-11
Substrate Processing Apparatus And Substrate Processing Method App 20190181022 - Mouri; Nobuhiko ; et al.	2019-06-13
Substrate processing method and substrate processing apparatus Grant 10,074,542 - Kubo , et al. September 11, 2	2018-09-11
Substrate Processing Apparatus, Substrate Processing Method And Storage Medium App 20180253007 - KODAMA; Teruhiko ; et al.	2018-09-06
Substrate Processing Apparatus, Substrate Processing Method and Storage Medium App 20180151343 - TAKIGUCHI; Yasushi ; et al.	2018-05-31
Liquid processing method, memory medium and liquid processing apparatus Grant 9,972,512 - Kai , et al. May 15, 2	2018-05-15
Liquid Processing Method, Memory Medium And Liquid Processing Apparatus App 20180019112 - KAI; Akiko ; et al.	2018-01-18
Liquid processing method, memory medium and liquid processing apparatus Grant 9,786,488 - Kai , et al. October 10, 2	2017-10-10
Substrate backside texturing Grant 9,711,419 - Fonseca , et al. July 18, 2	2017-07-18
Substrate Processing Apparatus, Substrate Processing Method And Memory Medium App 20170139399 - KODAMA; Teruhiko ; et al.	2017-05-18
Substrate Processing Method And Substrate Processing Apparatus App 20170092504 - KUBO; Akihiro ; et al.	2017-03-30
Substrate processing apparatus, substrate processing method and memory medium Grant 9,601,394 - Kodama , et al. March 21, 2	2017-03-21
Liquid Processing Method, Memory Medium And Liquid Processing Apparatus App 20160096203 - Kai; Akiko ; et al.	2016-04-07
Substrate Backside Texturing App 20160043007 - Fonseca; Carlos A. ; et al.	2016-02-11
Substrate Processing Apparatus, Substrate Processing Method And Memory Medium App 20150255355 - KODAMA; Teruhiko ; et al.	2015-09-10

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