Kodama; Mitsumasa
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kodama; Mitsumasa.The latest application filed is for "substrate treating apparatus and method".
- Kodama; Mitsumasa - Kyoto JP
| Patent | Date |
|---|---|
| Substrate treating method and apparatus Grant 7,105,074 - Tamada , et al. September 12, 2 | 2006-09-12 |
| Substrate treating apparatus and method Grant 6,832,863 - Sugimoto , et al. December 21, 2 | 2004-12-21 |
| Substrate treating apparatus and method App 20040005149 - Sugimoto, Kenji ; et al. | 2004-01-08 |
| Substrate treating method and apparatus App 20030017665 - Tamada, Osamu ; et al. | 2003-01-23 |
| Substrate processing apparatus App 20020152958 - Shigemori, Kazuhito ; et al. | 2002-10-24 |
| Processing apparatus having parts for thermal and non-thermal treatment of substrates Grant 5,639,301 - Sasada , et al. June 17, 1 | 1997-06-17 |
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