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Ion beam processing device Grant 10,546,720 - Kodaira , et al. Ja | 2020-01-28 |
Ion beam etching method of magnetic film and ion beam etching apparatus Grant 10,388,491 - Kodaira , et al. A | 2019-08-20 |
Ion Beam Processing Device App 20180240646 - KODAIRA; YOSHIMITSU ;   et al. | 2018-08-23 |
Method for manufacturing semiconductor device, ion beam etching device, and control device Grant 10,026,591 - Kodaira , et al. July 17, 2 | 2018-07-17 |
Ion beam processing method and ion beam processing apparatus Grant 9,984,854 - Kodaira , et al. May 29, 2 | 2018-05-29 |
Method For Manufacturing Semiconductor Device, Ion Beam Etching Device, And Control Device App 20170316918 - KODAIRA; Yoshimitsu ;   et al. | 2017-11-02 |
Process for producing magnetoresistive effect element and device producing method Grant 9,773,973 - Kodaira , et al. September 26, 2 | 2017-09-26 |
Method for manufacturing semiconductor device, ion beam etching device, and control device Grant 9,734,989 - Kodaira , et al. August 15, 2 | 2017-08-15 |
Ion Beam Etching Apparatus And Ion Beam Generator App 20160351377 - OKAMOTO; Naoyuki ;   et al. | 2016-12-01 |
Process For Producing Magnetoresistive Effect Element And Device Producing Method App 20160005957 - KODAIRA; Yoshimitsu ;   et al. | 2016-01-07 |
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Method For Manufacturing Semiconductor Device, Ion Beam Etching Device, And Control Device App 20150318185 - KODAIRA; Yoshimitsu ;   et al. | 2015-11-05 |
Process For Producing Magnetoresistive Effect Element App 20150311432 - NAKAGAWA; Yukito ;   et al. | 2015-10-29 |
Ion Beam Processing Method And Ion Beam Processing Apparatus App 20150090583 - KODAIRA; YOSHIMITSU ;   et al. | 2015-04-02 |
Ion Beam Etching Method Of Magnetic Film And Ion Beam Etching Apparatus App 20140251790 - Kodaira; Yoshimitsu ;   et al. | 2014-09-11 |
Method Of Fabricating Fin Fet And Method Of Fabricating Device App 20140206197 - NAKAGAWA; Takashi ;   et al. | 2014-07-24 |
Method and apparatus for manufacturing magnetoresistive devices Grant 8,540,852 - Watanabe , et al. September 24, 2 | 2013-09-24 |
Plasma Processing Apparatus And Device Manufacturing Method App 20120145671 - Matsuhashi; Ryo ;   et al. | 2012-06-14 |
Method for manufacturing resistance change element Grant 7,981,805 - Kodaira , et al. July 19, 2 | 2011-07-19 |
Method For Manufacturing Resistance Change Element App 20110021000 - Kodaira; Yoshimitsu ;   et al. | 2011-01-27 |
Dry Etching Method, Magneto-resistive Element, And Method And Apparatus For Manufacturing The Same App 20100310902 - Osada; Tomoaki ;   et al. | 2010-12-09 |
Process And Apparatus For Fabricating Magnetic Device App 20100304504 - Shinde; Sanjay ;   et al. | 2010-12-02 |
Process And Apparatus For Fabricating Magnetic Device App 20100301008 - Shinde; Sanjay ;   et al. | 2010-12-02 |
Method and Apparatus for Manufacturing Magnetoresistive Devices App 20100155231 - Watanabe; Naoki ;   et al. | 2010-06-24 |
Method Of Fabricating Magnetic Device App 20100044340 - Kodaira; Yoshimitsu ;   et al. | 2010-02-25 |
Dry etching method for magnetic material Grant RE40,951 - Kodaira , et al. November 10, 2 | 2009-11-10 |
Inductively Coupled Plasma Processing Apparatus App 20090078569 - Hirayanagi; Hirohisa ;   et al. | 2009-03-26 |
Dry etching method for magnetic material Grant 7,060,194 - Kodaira , et al. June 13, 2 | 2006-06-13 |
Dry etching method for magnetic material App 20050016957 - Kodaira, Yoshimitsu ;   et al. | 2005-01-27 |