Kochersperger; Peter C.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kochersperger; Peter C..The latest application filed is for "linear motor and lithography arrangement including linear motor".
- Kochersperger; Peter C. - Easton CT
| Patent | Date |
|---|---|
| Lithographic apparatus and device manufacturing method Grant 9,669,984 - Lansbergen , et al. June 6, 2 | 2017-06-06 |
| Lithographic apparatus and device manufacturing method Grant 9,457,947 - Lansbergen , et al. October 4, 2 | 2016-10-04 |
| Linear Motor and Lithography Arrangement Including Linear Motor App 20150256058 - KOCHERSPERGER; Peter C. | 2015-09-10 |
| Linear motor and lithography arrangement including linear motor Grant 9,083,227 - Kochersperger July 14, 2 | 2015-07-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20140144805 - Lansbergen; Robert Gabriel Maria ; et al. | 2014-05-29 |
| Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation Grant 8,629,973 - Zimmerman , et al. January 14, 2 | 2014-01-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20130100430 - LANSBERGEN; Robert Gabriel Maria ; et al. | 2013-04-25 |
| Linear Motor and Lithography Arrangement Including Linear Motor App 20130063711 - KOCHERSPERGER; Peter C. | 2013-03-14 |
| Lithographic apparatus and device manufacturing method Grant 8,159,647 - Bleeker , et al. April 17, 2 | 2012-04-17 |
| Real time telecentricity measurement Grant 7,999,939 - Kochersperger , et al. August 16, 2 | 2011-08-16 |
| Lithographic Apparatus and Method for Illumination Uniformity Correction and Uniformity Drift Compensation App 20100302525 - ZIMMERMAN; Richard Carl ; et al. | 2010-12-02 |
| Pressure sensor Grant 7,549,321 - Kochersperger , et al. June 23, 2 | 2009-06-23 |
| Real Time Telecentricity Measurement App 20090046278 - Kochersperger; Peter C. ; et al. | 2009-02-19 |
| Pressure sensor Grant 7,472,580 - Lyons , et al. January 6, 2 | 2009-01-06 |
| Lithographic Apparatus and Device Manufacturing Method App 20080297747 - BLEEKER; Arno Jan ; et al. | 2008-12-04 |
| Lithographic apparatus and device manufacturing method Grant 7,411,652 - Bleeker , et al. August 12, 2 | 2008-08-12 |
| Pressure sensor App 20070186621 - Kochersperger; Peter C. ; et al. | 2007-08-16 |
| Pressure sensor App 20070176121 - Lyons; Joseph H. ; et al. | 2007-08-02 |
| Lithographic tool with dual isolation system and method for configuring the same Grant 7,164,463 - Galburt , et al. January 16, 2 | 2007-01-16 |
| Lithographic tool with dual isolation system and method for configuring the same Grant 7,158,213 - Galburt , et al. January 2, 2 | 2007-01-02 |
| Lithographic tool with dual isolation system and method for configuring the same App 20060092394 - Galburt; Daniel N. ; et al. | 2006-05-04 |
| Lithographic apparatus and device manufacturing method App 20050068510 - Bleeker, Arno Jan ; et al. | 2005-03-31 |
| Lithographic tool with dual isolation system and method for configuring the same App 20030164931 - Galburt, Daniel N. ; et al. | 2003-09-04 |
| Lithographic tool with dual isolation system and method for configuring the same App 20020118346 - Galburt, Daniel N. ; et al. | 2002-08-29 |
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