Kochersperger; Peter
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kochersperger; Peter.The latest application filed is for "lithographic apparatus with a patterning device environment".
- Kochersperger; Peter - Easton CT
- Kochersperger; Peter - Greenwich CT
| Patent | Date |
|---|---|
| Lithographic apparatus with a patterning device environment Grant 10,209,635 - Kochersperger , et al. Feb | 2019-02-19 |
| Lithographic Apparatus With A Patterning Device Environment App 20170363975 - KOCHERSPERGER; Peter ; et al. | 2017-12-21 |
| Overlay correction by reducing wafer slipping after alignment Grant 7,786,607 - Kochersperger August 31, 2 | 2010-08-31 |
| Optical element damping systems Grant 7,751,130 - Roux , et al. July 6, 2 | 2010-07-06 |
| Overlay correction by reducing wafer slipping after alignment Grant 7,542,263 - Kochersperger June 2, 2 | 2009-06-02 |
| Measuring distance using gas gauge proximity sensor Grant 7,500,380 - Carter , et al. March 10, 2 | 2009-03-10 |
| Method and systems for total focus deviation adjustments on maskless lithography systems Grant 7,414,701 - Kochersperger August 19, 2 | 2008-08-19 |
| Method for transferring and loading a reticle Grant 7,278,817 - Friedman , et al. October 9, 2 | 2007-10-09 |
| Overlay Correction By Reducing Wafer Slipping After Alignment App 20070165357 - Kochersperger; Peter | 2007-07-19 |
| Vacuum Driven Proximity Sensor App 20070151328 - Kochersperger; Peter ; et al. | 2007-07-05 |
| Gas gauge proximity sensor with internal gas flow control App 20070151327 - Kochersperger; Peter | 2007-07-05 |
| Optical element damping systems App 20070153348 - Roux; Stephen ; et al. | 2007-07-05 |
| High resolution gas gauge proximity sensor App 20060272394 - Carter; Frederick Michael ; et al. | 2006-12-07 |
| Method for transferring and loading a reticle App 20060182605 - Friedman; Glenn M. ; et al. | 2006-08-17 |
| High resolution gas gauge proximity sensor Grant 7,021,120 - Carter , et al. April 4, 2 | 2006-04-04 |
| Apparatus for transferring and loading a reticle with a robotic reticle end-effector Grant 7,004,715 - Friedman , et al. February 28, 2 | 2006-02-28 |
| Proximity sensor with self compensation for mechanism instability Grant 6,978,658 - Kochersperger December 27, 2 | 2005-12-27 |
| High resolution gas gauge proximity sensor App 20050241371 - Carter, Frederick Michael ; et al. | 2005-11-03 |
| Overlay correction by reducing wafer slipping after alignment App 20050186517 - Kochersperger, Peter | 2005-08-25 |
| Method and systems for total focus deviation adjustments on maskless lithography systems App 20050074906 - Kochersperger, Peter | 2005-04-07 |
| Method and apparatus for transferring and loading a reticle with a robotic reticle end-effector App 20030129051 - Friedman, Glenn M. ; et al. | 2003-07-10 |
| Wafer flip apparatus Grant 4,778,332 - Byers , et al. October 18, 1 | 1988-10-18 |
| Wafer cassette transfer mechanism Grant 4,750,857 - Kochersperger June 14, 1 | 1988-06-14 |
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