Koch; Mathias

Patent Applications and Registrations

Patent applications and USPTO patent grants for Koch; Mathias.The latest application filed is for "segmented cold plate for rapid thermal processing (rtp) tool for conduction cooling".

Company Profile

0.4.5

Koch; Mathias - Andover MA
Koch; Mathias - Berlin DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling Grant 7,166,187 - Shajii , et al. January 23, 2	2007-01-23
Method for producing encapsulated chips Grant 7,011,989 - Becker , et al. March 14, 2	2006-03-14
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling App 20050026447 - Shajii, Ali ; et al.	2005-02-03
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling Grant 6,783,630 - Shajii , et al. August 31, 2	2004-08-31
Method for producing encapsulated chips App 20040110323 - Becker, Karl-Friedrich ; et al.	2004-06-10
Apparatus for cooling a substrate through thermal conduction in the viscous regime App 20040053514 - Shajii, Ali ; et al.	2004-03-18
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling App 20040040508 - Shajii, Ali ; et al.	2004-03-04
Optical Path Improvement, Focus Length Change Compensation, And Stray Light Reduction For Temperature Measurement System Of Rtp Tool App 20040037347 - Brown, Douglas ; et al.	2004-02-26
Optical path improvement, focus length change compensation, and stray light reduction for temperature measurement system of RTP tool Grant 6,695,886 - Brown , et al. February 24, 2	2004-02-24

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