loadpatents
Patent applications and USPTO patent grants for Koch; George R..The latest application filed is for "chamberless substrate handling".
Patent | Date |
---|---|
Chamberless substrate handling Grant 7,550,744 - Koch , et al. June 23, 2 | 2009-06-23 |
Transverse magnetic field voltage isolator Grant 7,288,774 - Koch , et al. October 30, 2 | 2007-10-30 |
Scanning electron microscope architecture and related material handling system Grant 6,710,354 - Koch , et al. March 23, 2 | 2004-03-23 |
Self-contained mobile reprogrammable automation device Grant 4,698,775 - Koch , et al. October 6, 1 | 1987-10-06 |
Workpiece transfer mechanism Grant 4,483,654 - Koch , et al. November 20, 1 | 1984-11-20 |
Modular loadlock Grant 4,433,951 - Koch , et al. February 28, 1 | 1984-02-28 |
Screen lens array system Grant 4,354,111 - Williams , et al. October 12, 1 | 1982-10-12 |
Adjustable electrode plasma processing chamber Grant 4,340,462 - Koch July 20, 1 | 1982-07-20 |
Method and apparatus for SEM specimen coating and transfer Grant 3,958,124 - Koch , et al. May 18, 1 | 1976-05-18 |
Method And Apparatus For Sem Specimen Coating And Transfer Grant 3,858,049 - Koch , et al. December 31, 1 | 1974-12-31 |
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