Kobaru; Atsushi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kobaru; Atsushi.The latest application filed is for "ion beam device and cleaning method for gas field ion source".

Company Profile

2.15.15

Kobaru; Atsushi - Tokyo JP
Kobaru; Atsushi - Hitachinaka N/A JP
KOBARU; Atsushi - Hitachinaka-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Ion beam device and cleaning method for gas field ion source Grant 10,840,070 - Kawanami , et al. November 17, 2	2020-11-17
Ion Beam Device And Cleaning Method For Gas Field Ion Source App 20200294776 - KAWANAMI; Yoshimi ; et al.	2020-09-17
Scanning electron microscope and image signal processing method Grant 8,362,426 - Kobaru , et al. January 29, 2	2013-01-29
Charged particle beam apparatus Grant 8,335,397 - Takane , et al. December 18, 2	2012-12-18
Scanning electron microscope having time constant measurement capability Grant 8,274,048 - Ikegami , et al. September 25, 2	2012-09-25
Image forming method and charged particle beam apparatus Grant 8,203,504 - Kobaru , et al. June 19, 2	2012-06-19
Charged particle beam apparatus Grant 8,000,939 - Kobaru August 16, 2	2011-08-16
Image Forming Method And Charged Particle Beam Apparatus App 20110032176 - KOBARU; Atsushi ; et al.	2011-02-10
Charged particle beam apparatus Grant 7,838,840 - Kobaru November 23, 2	2010-11-23
Image forming method and charged particle beam apparatus Grant 7,817,105 - Kobaru , et al. October 19, 2	2010-10-19
Scanning Electron Microscope Having Time Constant Measurement Capability App 20100258723 - IKEGAMI; Akira ; et al.	2010-10-14
Scanning electron microscope having time constant measurement capability Grant 7,763,852 - Ikegami , et al. July 27, 2	2010-07-27
Charged Particle Radiation Apparatus App 20090194692 - KOBARU; Atsushi	2009-08-06
Charged Particle Beam Apparatus App 20090001279 - KOBARU; Atsushi	2009-01-01
Charged Particle Beam Apparatus App 20080292199 - Takane; Atsushi ; et al.	2008-11-27
Charged Particle Beam Apparatus App 20080215260 - KOBARU; Atsushi	2008-09-04
Scanning Electron Microscope Having Time Constant Measurement Capability App 20080116375 - Ikegami; Akira ; et al.	2008-05-22
Method of measurement accuracy improvement by control of pattern shrinkage Grant 7,288,763 - Ikeda , et al. October 30, 2	2007-10-30
Focus adjustment method and focus adjustment apparatus App 20070200947 - Kobaru; Atsushi ; et al.	2007-08-30
Image forming method and charged particle beam apparatus App 20070159662 - Kobaru; Atsushi ; et al.	2007-07-12
Scanning electron microscope and image signal processing method App 20070064100 - Kobaru; Atsushi ; et al.	2007-03-22
Image forming method and charged particle beam apparatus Grant 7,187,345 - Kobaru , et al. March 6, 2	2007-03-06
Image Forming Method And Charged Particle Beam Apparatus App 20070024528 - Kobaru; Atsushi ; et al.	2007-02-01
Method of measurement accuracy improvement by control of pattern shrinkage App 20060192119 - Ikeda; Satoshi ; et al.	2006-08-31
Method of measurement accuracy improvement by control of pattern shrinkage Grant 7,045,782 - Ikeda , et al. May 16, 2	2006-05-16
Method of measurement accuracy improvement by control of pattern shrinkage App 20050161602 - Ikeda, Satoshi ; et al.	2005-07-28
Apparatus using charged particle beam Grant 6,667,483 - Kobaru , et al. December 23, 2	2003-12-23
Apparatus using charged particle beam App 20010050343 - Kobaru, Atsushi ; et al.	2001-12-13
Scanning electron microscope Grant 5,614,713 - Kobaru , et al. March 25, 1	1997-03-25

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