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Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof
Grant 11,454,877 - Ku , et al. September 27, 2 | 2022-09-27 |
Apparatus for fabricating a semiconductor structure and method of fabricating a semiconductor structure
Grant 11,443,923 - Koai , et al. September 13, 2 | 2022-09-13 |
Apparatus For Cleaning Semiconductor Equipment
App 20220250124 - LIU; SHIH-KUO ; et al. | 2022-08-11 |
Apparatus for cleaning semiconductor equipment
Grant 11,318,506 - Liu , et al. May 3, 2 | 2022-05-03 |
Chemical vapor deposition apparatus and blocker plate
Grant 11,214,868 - Chen , et al. January 4, 2 | 2022-01-04 |
Apparatus and method for inspecting a wafer process chamber
Grant 11,067,515 - Shin , et al. July 20, 2 | 2021-07-20 |
Apparatus For Fabricating A Semiconductor Structure And Method Of Fabricating A Semiconductor Structure
App 20210090935 - KOAI; KEITH KUANG-KUO ; et al. | 2021-03-25 |
Shower Head Structure And Plasma Processing Apparatus Using The Same
App 20210054506 - CHEN; HUAN-CHIEH ; et al. | 2021-02-25 |
Aluminum Apparatus With Aluminum Oxide Layer And Method For Forming The Same
App 20210005433 - CHIU; Ru-Chien ; et al. | 2021-01-07 |
Apparatus and method for fabricating a semiconductor device
Grant 10,876,208 - Chang , et al. December 29, 2 | 2020-12-29 |
Apparatus for polarizing a semiconductor wafer and method for fabricating a magnetic semiconductor device
Grant 10,868,241 - Wu , et al. December 15, 2 | 2020-12-15 |
Apparatus For Polarizing A Semiconductor Wafer And Method For Fabricating A Magnetic Semiconductor Device
App 20200365797 - WU; JIM-WEI ; et al. | 2020-11-19 |
Aluminum apparatus with aluminum oxide layer and method for forming the same
Grant 10,784,087 - Chiu , et al. Sept | 2020-09-22 |
Chemical Vapor Deposition Apparatus And Blocker Plate
App 20200131640 - CHEN; HUAN-CHIEH ; et al. | 2020-04-30 |
Extreme Ultraviolet Light Reflective Structure Including Nano-lattice And Manufacturing Method Thereof
App 20200133112 - KU; Benny ; et al. | 2020-04-30 |
Deposition device structure
Grant 10,626,499 - Lo , et al. | 2020-04-21 |
Wet Chemical Heating System And A Method Of Chemical Mechanical Polishing
App 20200070301 - CUI; JI JAMES ; et al. | 2020-03-05 |
Apparatus For Cleaning Semiconductor Equipment
App 20200055102 - LIU; SHIH-KUO ; et al. | 2020-02-20 |
Aluminum Apparatus With Aluminum Oxide Layer And Method For Forming The Same
App 20190237304 - CHIU; Ru-Chien ; et al. | 2019-08-01 |
Apparatus And Method For Fabricating A Semiconductor Device
App 20190218665 - CHANG; KAI-HSIANG ; et al. | 2019-07-18 |
Apparatus And Method For Inspecting A Wafer Process Chamber
App 20190162675 - SHIN; Stanley ; et al. | 2019-05-30 |
Device and method for manufacturing a semiconductor structure
Grant 10,269,573 - Lin , et al. | 2019-04-23 |
Aluminum apparatus with aluminum oxide layer and method for forming the same
Grant 10,262,839 - Chiu , et al. | 2019-04-16 |
Deposition Device Structure
App 20190032215 - LO; Yen-Chan ; et al. | 2019-01-31 |
Aluminum Apparatus With Aluminum Oxide Layer And Method For Forming The Same
App 20170358430 - CHIU; Ru-Chien ; et al. | 2017-12-14 |
Semiconductor device metallization systems and methods
Grant 9,548,241 - Lee , et al. January 17, 2 | 2017-01-17 |
Semiconductor Device Metallization Systems and Methods
App 20160181152 - Lee; Hsiang-Huan ; et al. | 2016-06-23 |
Semiconductor device metallization systems and methods
Grant 9,318,364 - Lee , et al. April 19, 2 | 2016-04-19 |
Device And Method For Manufacturing A Semiconductor Structure
App 20150279632 - LIN; KUN-MO ; et al. | 2015-10-01 |
Semiconductor Device Metallization Systems and Methods
App 20150197849 - Lee; Hsiang-Huan ; et al. | 2015-07-16 |
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