| Patent | Date |
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Substrate processing apparatus and substrate processing system including the same
Grant 11,361,960 - Jang , et al. June 14, 2 | 2022-06-14 |
Semiconductor devices including enlarged contact hole and methods of forming the same
Grant 11,329,053 - Son , et al. May 10, 2 | 2022-05-10 |
Substrate Processing Apparatus And Apparatus For Manufacturing Integrated Circuit Device
App 20210217635 - Kim; Young-hoo ; et al. | 2021-07-15 |
Semiconductor Devices Including Enlarged Contact Hole And Methods Of Forming The Same
App 20210134809 - Son; Yoon Ho ; et al. | 2021-05-06 |
Substrate processing apparatus and apparatus for manufacturing integrated circuit device
Grant 10,985,036 - Kim , et al. April 20, 2 | 2021-04-20 |
Semiconductor devices including enlarged contact hole and methods of forming the same
Grant 10,916,549 - Son , et al. February 9, 2 | 2021-02-09 |
Operating method for wet etching system and related system
Grant 10,910,237 - Jeong , et al. February 2, 2 | 2021-02-02 |
Process chamber for a supercritical process and apparatus for treating substrates having the same
Grant 10,818,522 - Park , et al. October 27, 2 | 2020-10-27 |
Compositions for removing photoresist
Grant 10,795,263 - Oh , et al. October 6, 2 | 2020-10-06 |
Substrate Processing Apparatus And Substrate Processing System Including The Same
App 20200303182 - JANG; Won-Ho ; et al. | 2020-09-24 |
Substrate processing apparatus and substrate processing system including the same
Grant 10,707,071 - Jang , et al. | 2020-07-07 |
Operating Method For Wet Etching System And Related System
App 20200203195 - JEONG; Sang Hoon ; et al. | 2020-06-25 |
Substrate Processing Apparatus
App 20200194284 - Park; Sang-jine ; et al. | 2020-06-18 |
Spot heater and device for cleaning wafer using the same
Grant 10,576,582 - Kim , et al. | 2020-03-03 |
Semiconductor Devices Including Enlarged Contact Hole And Methods Of Forming The Same
App 20200013782 - SON; Yoon Ho ; et al. | 2020-01-09 |
Integrated circuit device
Grant 10,438,891 - Park , et al. O | 2019-10-08 |
Methods of fabricating semiconductor devices including support patterns
Grant 10,438,799 - Park , et al. O | 2019-10-08 |
Semiconductor devices including enlarged contact hole and methods of forming the same
Grant 10,418,366 - Son , et al. Sept | 2019-09-17 |
Process Chamber For A Supercritical Process And Apparatus For Treating Substrates Having The Same
App 20190096712 - PARK; Sang-Jine ; et al. | 2019-03-28 |
Substrate Processing Apparatus and Apparatus for Manufacturing Integrated Circuit Device
App 20180358242 - Kim; Young-hoo ; et al. | 2018-12-13 |
Semiconductor Devices Including Enlarged Contact Hole And Methods Of Forming The Same
App 20180342521 - Son; Yoon Ho ; et al. | 2018-11-29 |
Spot Heater And Device For Cleaning Wafer Using The Same
App 20180311764 - KIM; Young-Hoo ; et al. | 2018-11-01 |
Compositions For Removing Photoresist
App 20180267409 - OH; Jung-Min ; et al. | 2018-09-20 |
Integrated Circuit Device
App 20180254246 - PARK; Sang-jine ; et al. | 2018-09-06 |
Spot heater and device for cleaning wafer using the same
Grant 10,029,332 - Kim , et al. July 24, 2 | 2018-07-24 |
Methods of manufacturing semiconductor devices using a composition for removing photoresist and methods of removing photoresist from a semiconductor substrate
Grant 10,025,192 - Oh , et al. July 17, 2 | 2018-07-17 |
Semiconductor Devices Including Varied Depth Recesses For Contacts
App 20180197861 - Park; Sang Jine ; et al. | 2018-07-12 |
Substrate Processing Apparatus And Substrate Processing System Including The Same
App 20180190485 - JANG; Won-Ho ; et al. | 2018-07-05 |
Semiconductor devices utilizing spacer structures
Grant 9,985,106 - Park , et al. May 29, 2 | 2018-05-29 |
Sealing member and substrate processing apparatus including the same
Grant 9,903,651 - Jun , et al. February 27, 2 | 2018-02-27 |
Methods of Fabricating Semiconductor Devices Including Support Patterns
App 20180040483 - Park; Sang Jine ; et al. | 2018-02-08 |
Semiconductor Devices Utilizing Spacer Structures
App 20180040707 - Park; Sang Jine ; et al. | 2018-02-08 |
Semiconductor Devices Including Varied Depth Recesses For Contacts
App 20160351570 - Park; Sang Jine ; et al. | 2016-12-01 |
Methods Of Manufacturing Semiconductor Devices Using A Composition For Removing Photoresist And Methods Of Removing Photoresist From A Semiconductor Substrate
App 20160315019 - OH; Jung-Min ; et al. | 2016-10-27 |
Cleaning solution composition and method of cleaning semiconductor device using the same
Grant 9,394,509 - Bae , et al. July 19, 2 | 2016-07-19 |
Spot Heater And Device For Cleaning Wafer Using The Same
App 20160071745 - KIM; Young-Hoo ; et al. | 2016-03-10 |
Systems For Removing Photoresists And Methods Of Removing Photoresists Using The Same
App 20150355551 - KIM; Young-Ok ; et al. | 2015-12-10 |
Cleaning Solution Composition And Method Of Cleaning Semiconductor Device Using The Same
App 20150299629 - Bae; Sang-Won ; et al. | 2015-10-22 |
Sealing Member And Substrate Processing Apparatus Including The Same
App 20150176897 - JUN; Yong-Myung ; et al. | 2015-06-25 |
Nozzle And Apparatus For Processing A Substrate Including The Same
App 20150151336 - KIM; KYOUNG-SEOB ; et al. | 2015-06-04 |
Chemical mechanical polishing method
Grant 8,592,315 - Kim , et al. November 26, 2 | 2013-11-26 |
Cell structure for a semiconductor memory device and method of fabricating the same
Grant 8,084,801 - Baek , et al. December 27, 2 | 2011-12-27 |
Phase-change semiconductor device and methods of manufacturing the same
Grant 8,053,751 - Kim , et al. November 8, 2 | 2011-11-08 |
Polishing method using chemical mechanical slurry composition
Grant 8,048,809 - Lee , et al. November 1, 2 | 2011-11-01 |
Methods of forming patterns and capacitors for semiconductor devices using the same
Grant 7,781,346 - Park , et al. August 24, 2 | 2010-08-24 |
Phase-change semiconductor device and methods of manufacturing the same
Grant 7,745,341 - Kim , et al. June 29, 2 | 2010-06-29 |
Chemical Mechanical Polishing Method
App 20100147799 - Kim; Dong-Keun ; et al. | 2010-06-17 |
Chemical mechanical polishing method
Grant 7,713,879 - Kim , et al. May 11, 2 | 2010-05-11 |
Semiconductor device and method of manufacturing the same
Grant 7,709,319 - Jon , et al. May 4, 2 | 2010-05-04 |
Cell structure for a semiconductor memory device and method of fabricating the same
App 20100096681 - Baek; Kyoung-Yun ; et al. | 2010-04-22 |
Phase-change semiconductor device and methods of manufacturing the same
App 20100072446 - Kim; Tae-Won ; et al. | 2010-03-25 |
Phase change memory devices and methods for fabricating the same
Grant 7,667,221 - Song , et al. February 23, 2 | 2010-02-23 |
Phase change memory device and method of manufacturing the same
Grant 7,659,162 - Lim , et al. February 9, 2 | 2010-02-09 |
Electrode structure and method of manufacturing the same, phase-change memory device having the electrode structure and method of manufacturing the same
Grant 7,589,013 - Min , et al. September 15, 2 | 2009-09-15 |
Etching solution, method of forming a pattern using the same, method of manufacturing a multiple gate oxide layer using the same and method of manufacturing a flash memory device using the same
Grant 7,579,284 - Yoon , et al. August 25, 2 | 2009-08-25 |
Method Of Forming A Recess Channel Trench Pattern, And Fabricating A Recess Channel Transistor
App 20090206399 - PARK; Jong-Chul ; et al. | 2009-08-20 |
Method of forming a recess channel trench pattern, and fabricating a recess channel transistor
Grant 7,534,726 - Park , et al. May 19, 2 | 2009-05-19 |
Thin layer structure and method of forming the same
Grant 7,534,704 - Ha , et al. May 19, 2 | 2009-05-19 |
Phase change memory device and method of manufacturing the same
App 20090090899 - Lim; Young-Soo ; et al. | 2009-04-09 |
Local interconnection method and structure for use in semiconductor device
Grant 7,498,253 - Kwon , et al. March 3, 2 | 2009-03-03 |
Method of manufacturing a flash memory device
Grant 7,452,773 - Kwon , et al. November 18, 2 | 2008-11-18 |
Methods of forming non-volatile memory devices having floating gate electrodes
Grant 7,445,997 - Lee , et al. November 4, 2 | 2008-11-04 |
Methods Of Using Corrosion-inhibiting Cleaning Compositions For Metal Layers And Patterns On Semiconductor Substrates
App 20080214006 - Lee; Kwang-Wook ; et al. | 2008-09-04 |
Etching Method For Manufacturing Semiconductor Device
App 20080102595 - LEE; Won-Jun ; et al. | 2008-05-01 |
Method for forming a capacitor for use in a semiconductor device
Grant 7,361,547 - Lee , et al. April 22, 2 | 2008-04-22 |
Etching method for manufacturing semiconductor device
Grant 7,338,610 - Lee , et al. March 4, 2 | 2008-03-04 |
Semiconductor device and method of manufacturing the same
App 20080042240 - Jon; Yeol ; et al. | 2008-02-21 |
Slurry composition
App 20080042100 - Lee; Hyo-Jin ; et al. | 2008-02-21 |
Polishing Method
App 20080009136 - Lee; Hyo-Jin ; et al. | 2008-01-10 |
Slurry composition, polishing method using the slurry composition and method of forming a gate pattern using the slurry composition
Grant 7,271,100 - Lee , et al. September 18, 2 | 2007-09-18 |
Phase change memory device and method of fabricating the same
App 20070210334 - Lim; Young-Soo ; et al. | 2007-09-13 |
Phase-change memory device and methods of fabricating the same
App 20070210348 - Song; JongHeui ; et al. | 2007-09-13 |
Phase change memory devices and methods for fabricating the same
App 20070194294 - Song; Jong-Heui ; et al. | 2007-08-23 |
Method Of Forming A Recess Channel Trench Pattern, And Fabricating A Recess Channel Transistor
App 20070148884 - PARK; Jong-Chul ; et al. | 2007-06-28 |
Local Interconnection Method And Structure For Use In Semiconductor Device
App 20070141834 - KWON; Sung-Un ; et al. | 2007-06-21 |
Cell structure for a semiconductor memory device and method of fabricating the same
App 20070096155 - Baek; Kyoung-Yun ; et al. | 2007-05-03 |
Method of forming a recess channel trench pattern, and fabricating a recess channel transistor
Grant 7,205,199 - Park , et al. April 17, 2 | 2007-04-17 |
Local interconnection method and structure for use in semiconductor device
Grant 7,202,163 - Kwon , et al. April 10, 2 | 2007-04-10 |
Semiconductor device and method of manufacturing the same
App 20070063247 - Jon; Yeol ; et al. | 2007-03-22 |
Electrode structure and method of manufacturing the same, phase-change memory device having the electrode structure and method of manufacturing the same
App 20070057308 - Min; Chung-Ki ; et al. | 2007-03-15 |
Methods of forming patterns and capacitors for semiconductor devices using the same
App 20070059941 - Park; Cheol-Woo ; et al. | 2007-03-15 |
Mask structure, method of forming the mask structure, method of forming a pattern using the mask structure and method of forming contacts in a semiconductor device using the mask structure
App 20070026685 - Bae; Yong-Kug ; et al. | 2007-02-01 |
Etching solution, method of forming a pattern using the same, method of manufacturing a multiple gate oxide layer using the same and method of manufacturing a flash memory device using the same
App 20070015372 - Yoon; Byoung-Moon ; et al. | 2007-01-18 |
Phase-change semiconductor device and methods of manufacturing the same
App 20070012906 - Kim; Tae-Won ; et al. | 2007-01-18 |
MOS transistor and method of manufacturing the same
App 20070007600 - Baek; Kyoung-Yun ; et al. | 2007-01-11 |
Platen structure of polishing apparatus for processing semiconductor wafer and method for exchanging polishing pad affixed to the same
Grant 7,156,722 - Min , et al. January 2, 2 | 2007-01-02 |
Methods of processing semiconductor structures and methods of forming capacitors for semiconductor devices using the same
App 20060292817 - Park; Cheol-Woo ; et al. | 2006-12-28 |
Method of manufacturing a flash memory device
App 20060292795 - Kwon; Sung-Un ; et al. | 2006-12-28 |
Thin layer structure and method of forming the same
App 20060286298 - Ha; Jae-Kyu ; et al. | 2006-12-21 |
Methods of Forming Corrosion-Inhibiting Cleaning Compositions for Metal Layers and Patterns on Semiconductor Substrates
App 20060287208 - Lee; Kwang-Wook ; et al. | 2006-12-21 |
Method of manufacturing a semiconductor device
Grant 7,151,043 - Kim , et al. December 19, 2 | 2006-12-19 |
Method and system for planarizing integrated circuit material
Grant 7,144,301 - Kim , et al. December 5, 2 | 2006-12-05 |
Semiconductor device and method thereof
App 20060263971 - Lee; Kwang-Wook ; et al. | 2006-11-23 |
Organic stripping composition and method of etching oxide using the same
Grant 7,105,474 - Kim , et al. September 12, 2 | 2006-09-12 |
Method of forming semiconductor device having epitaxial contact plug connecting stacked transistors
App 20060189126 - Jang; Ki-Hoon ; et al. | 2006-08-24 |
Slurry composition, method of polishing an object and method of forming a contact in a semiconductor device using the slurry composition
App 20060189152 - Jang; Ki-Hoon ; et al. | 2006-08-24 |
Method of fabricating a semiconductor device
Grant 7,091,117 - Kim , et al. August 15, 2 | 2006-08-15 |
Chemical mechanical polishing method
App 20060141790 - Kim; Dong-Keun ; et al. | 2006-06-29 |
Methods of fabricating trench type capacitors including protective layers for electrodes and capacitors so formed
App 20060115950 - Kim; Kwang-Bok ; et al. | 2006-06-01 |
Method of forming a recess structure, recessed channel type transistor and method of manufacturing the recessed channel type transistor
App 20060113590 - Kim; Ji-Hae ; et al. | 2006-06-01 |
Platen structure of polishing apparatus for processing semiconductor wafer and method for exchanging polishing pad affixed to the same
App 20060105686 - Min; Chung-Ki ; et al. | 2006-05-18 |
Chemical supply system and chemical mixing apparatus
Grant 7,025,493 - Min , et al. April 11, 2 | 2006-04-11 |
Slurry composition, polishing method using the slurry composition and method of forming a gate pattern using the slurry composition
App 20060014390 - Lee; Hyo-Jin ; et al. | 2006-01-19 |
Polishing pad assembly, apparatus for polishing a wafer including the polishing pad assembly and method for polishing a wafer using the polishing pad assembly
App 20050272348 - Min, Chung-Ki ; et al. | 2005-12-08 |
Method of manufacturing a semiconductor device
App 20050266647 - Kim, Tae-hyun ; et al. | 2005-12-01 |
Corrosion-inhibiting cleaning compositions for metal layers and patterns on semiconductor substrates
App 20050261151 - Lee, Kwang-Wook ; et al. | 2005-11-24 |
Methods of forming non-volatile memory devices having floating gate electrodes
App 20050255654 - Lee, Won-Jun ; et al. | 2005-11-17 |
Cleaning solution including aqueous ammonia solution, acetic acid and deionized water for integrated circuit devices and methods of cleaning integrated circuit devices using the same
Grant 6,946,431 - Yeo , et al. September 20, 2 | 2005-09-20 |
Corrosion-inhibiting cleaning compositions for metal layers and patterns on semiconductor substrates
App 20050176604 - Lee, Kwang-Wook ; et al. | 2005-08-11 |
Method for forming a capacitor for use in a semiconductor device
App 20050170603 - Lee, Wook ; et al. | 2005-08-04 |
Cleaning solution and method of cleaning a semiconductor device using the same
App 20050139233 - Lee, Kwang-Wook ; et al. | 2005-06-30 |
Method for drying a wafer and apparatus for performing the same
Grant 6,889,447 - Lee , et al. May 10, 2 | 2005-05-10 |
Method of forming a recess channel trench pattern, and fabricating a recess channel transistor
App 20050077568 - Park, Jong-Chul ; et al. | 2005-04-14 |
Method and system for planarizing integrated circuit material
App 20050075052 - Kim, Kwang-Bok ; et al. | 2005-04-07 |
Cleaning solution and method of cleaning a semiconductor device using the same
Grant 6,875,706 - Lee , et al. April 5, 2 | 2005-04-05 |
Etching method for manufacturing semiconductor device
App 20050064674 - Lee, Won-Jun ; et al. | 2005-03-24 |
Etching method for manufacturing semiconductor device
App 20050026452 - Lee, Won-Jun ; et al. | 2005-02-03 |
Method of fabricating shallow trench isolation structure and microelectronic device having the structure
App 20050023634 - Yoon, Byoung-Moon ; et al. | 2005-02-03 |
Chemical mechanical polishing apparatus
App 20050022931 - Min, Chung-Ki ; et al. | 2005-02-03 |
Method of forming a contact hole of a semiconductor device
Grant 6,838,330 - Moon , et al. January 4, 2 | 2005-01-04 |
Method of fabricating a semiconductor device
App 20040253800 - Kim, Jae-Woo ; et al. | 2004-12-16 |
Method for forming a silicide film of a semiconductor device
Grant 6,831,012 - Kang , et al. December 14, 2 | 2004-12-14 |
Local interconnection method and structure for use in semiconductor device
App 20040248406 - Kwon, Sung-Un ; et al. | 2004-12-09 |
Etching compositions for silicon germanium and etching methods using the same
App 20040242015 - Kim, Kyoung-Chul ; et al. | 2004-12-02 |
Spin chuck for wafer or LCD processing
App 20040231711 - Park, Cheol-woo ; et al. | 2004-11-25 |
Method for cleaning damaged layers and polymer residue from semiconductor device
Grant 6,802,911 - Lee , et al. October 12, 2 | 2004-10-12 |
Method of forming a contact hole of a semiconductor device
App 20040121590 - Moon, Bong-Ho ; et al. | 2004-06-24 |
Cleaning solution and method of cleaning a semiconductor device using the same
App 20040115909 - Lee, Kwang-Wook ; et al. | 2004-06-17 |
Cleaning solution including aqueous ammonia solution, acetic acid and deionized water for integrated circuit devices and methods of cleaning integratedd circuit devices using the same
App 20040097389 - Yeo, In-Joon ; et al. | 2004-05-20 |
Organic stripping composition and method of etching oxide using the same
App 20040038839 - Kim, Tae-Hyun ; et al. | 2004-02-26 |
Apparatus for cleaning a semiconductor substrate by vibrating cleaning solution supplied onto the substrate
App 20040025911 - Yeo, In-Ju ; et al. | 2004-02-12 |
Method for forming a silicide film of a semiconductor device
App 20040029378 - Kang, Dae-Keun ; et al. | 2004-02-12 |
Method for drying a wafer and apparatus for performing the same
App 20030233764 - Lee, Kwang-Wook ; et al. | 2003-12-25 |
Method of filling contact hole of semiconductor device
Grant 6,638,855 - Chang , et al. October 28, 2 | 2003-10-28 |
Wafer guide and cleaning apparatus having the same
App 20030106575 - Moon, Bong-Ho ; et al. | 2003-06-12 |
Method for cleaning damaged layers and polymer residue from semiconductor device
App 20030056806 - Lee, Keum Joo ; et al. | 2003-03-27 |
Chemical supply system and chemical mixing apparatus
App 20020191486 - Min, Chung-Ki ; et al. | 2002-12-19 |
Aqueous cleaning solution for removing contaminants surface of circuit substrate cleaning method using the same
Grant 6,399,552 - Lee , et al. June 4, 2 | 2002-06-04 |
Cleaning solutions for removing contaminants from the surfaces of semiconductor substrates and cleaning methods using the same
Grant 6,369,008 - Ha , et al. April 9, 2 | 2002-04-09 |
Apparatus for drying semiconductor wafers using isopropyl alcohol
Grant 5,855,077 - Nam , et al. January 5, 1 | 1999-01-05 |
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