Patent | Date |
---|
Method of inspecting wafer using electron beam Grant 10,373,796 - Kim , et al. | 2019-08-06 |
Surface inspecting method Grant 10,001,444 - Ko , et al. June 19, 2 | 2018-06-19 |
Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof Grant 9,934,939 - Kim , et al. April 3, 2 | 2018-04-03 |
Broadband light source and optical inspector having the same Grant 9,831,626 - Ryu , et al. November 28, 2 | 2017-11-28 |
Spectral ellipsometry measurement and data analysis device and related systems and methods Grant 9,733,178 - Ryu , et al. August 15, 2 | 2017-08-15 |
Apparatus and method for inspection of substrate defect Grant 9,678,020 - Song , et al. June 13, 2 | 2017-06-13 |
Method of Inspecting Wafer Using Electron Beam App 20160293379 - Kim; Souk ;   et al. | 2016-10-06 |
Overlay measuring method and system, and method of manufacturing semiconductor device using the same Grant 9,455,206 - Yun , et al. September 27, 2 | 2016-09-27 |
Wafer Inspection Apparatus Using Three-Dimensional Image App 20160261786 - Ahn; Jeong-ho ;   et al. | 2016-09-08 |
Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film Grant 9,417,055 - Ryu , et al. August 16, 2 | 2016-08-16 |
Method And System For Detecting Defects App 20160189369 - JUNG; Jae-Ouk ;   et al. | 2016-06-30 |
Surface Inspecting Method App 20160153915 - Ko; Kang-woong ;   et al. | 2016-06-02 |
Broadband Light Source And Optical Inspector Having The Same App 20160097513 - RYU; Sung-Yoon ;   et al. | 2016-04-07 |
Apparatus For Measuring Thickness Of Thin Film, System Including The Apparatus, And Method For Measuring Thickness Of Thin Film App 20160061583 - RYU; Sung-Yoon ;   et al. | 2016-03-03 |
Conductive atomic force microscope and method of operating the same Grant 9,261,532 - Kim , et al. February 16, 2 | 2016-02-16 |
Reflector structure of illumination optic system Grant 9,255,694 - Joo , et al. February 9, 2 | 2016-02-09 |
Conductive Atomic Force Microscope And Method Of Operating The Same App 20160033550 - KIM; Hyun-woo ;   et al. | 2016-02-04 |
Apparatus And Method For Inspection Of Substrate Defect App 20160025654 - SONG; Joon-Seo ;   et al. | 2016-01-28 |
Spectral Ellipsometry Measurement and Data Analysis Device and Related Systems and Methods App 20160025618 - Ryu; Sung-Yoon ;   et al. | 2016-01-28 |
Overlay Measuring Method And System, And Method Of Manufacturing Semiconductor Device Using The Same App 20160013109 - YUN; Seong-Jin ;   et al. | 2016-01-14 |
Methods of fabricating microelectronic substrate inspection equipment Grant 9,123,503 - Kim , et al. September 1, 2 | 2015-09-01 |
Scanning Electron Microscope System Capable Of Measuring In-cell Overlay Offset Using High-energy Electron Beam And Method Thereof App 20150115154 - Kim; Min Kook ;   et al. | 2015-04-30 |
Broadband light illuminators Grant 8,841,824 - Ko , et al. September 23, 2 | 2014-09-23 |
Methods Of Fabricating Microelectronic Substrate Inspection Equipment App 20140224987 - KIM; Min-Kook ;   et al. | 2014-08-14 |
Microelectronic substrate inspection equipment using helium ion microscopy Grant 8,729,468 - Kim , et al. May 20, 2 | 2014-05-20 |
System And Method For Providing Light App 20130214180 - JOO; Won Don ;   et al. | 2013-08-22 |
Reflector Structure Of Illumination Optic System App 20130208486 - JOO; Won-Don ;   et al. | 2013-08-15 |
Microelectronic Substrate Inspection Equipment Using Helium Ion Microscopy App 20130175445 - Kim; Min-Kook ;   et al. | 2013-07-11 |
Broadband Light Illuminators App 20130169140 - KO; Woo-Seok ;   et al. | 2013-07-04 |
Method for inspection of defects on a substrate Grant 8,034,641 - Ko , et al. October 11, 2 | 2011-10-11 |
Method For Inspection Of Defects On A Substrate App 20110097829 - KO; Woo-seok ;   et al. | 2011-04-28 |
Apparatus and method for inspecting a surface of a wafer Grant 7,697,130 - Ko , et al. April 13, 2 | 2010-04-13 |
Apparatus And Method For Inspecting A Surface Of A Wafer App 20090219520 - Ko; Woo-Seok ;   et al. | 2009-09-03 |