Ko; Francis

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ko; Francis.The latest application filed is for "forming interconnect structures using pre-ink-printed sheets".

Company Profile

0.19.19

Ko; Francis - Taichung N/A TW
Ko; Francis - Taichung City TW
Ko, Francis - Taichuang TW

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Clustering for prediction models in process control and for optimal dispatching Grant 9,037,279 - Ko , et al. May 19, 2	2015-05-19
Forming interconnect structures using pre-ink-printed sheets Grant 8,716,867 - Ko , et al. May 6, 2	2014-05-06
Automatic virtual metrology for semiconductor wafer result prediction Grant 8,682,466 - Ko , et al. March 25, 2	2014-03-25
Near non-adaptive virtual metrology and chamber control Grant 8,433,434 - Wang , et al. April 30, 2	2013-04-30
Method and system for controlling copper chemical mechanical polish uniformity Grant 8,409,993 - Ko , et al. April 2, 2	2013-04-02
Methodology to enable wafer result prediction of semiconductor wafer batch processing equipment Grant 8,145,337 - Lin , et al. March 27, 2	2012-03-27
Forming Interconnect Structures Using Pre-Ink-Printed Sheets App 20110277655 - Ko; Francis ; et al.	2011-11-17
System for extraction of key process parameters from fault detection classification to enable wafer prediction Grant 7,974,728 - Lin , et al. July 5, 2	2011-07-05
Clustering for Prediction Models in Process Control and for Optimal Dispatching App 20110060441 - Ko; Francis ; et al.	2011-03-10
Near Non-Adaptive Virtual Metrology and Chamber Control App 20110009998 - Wang; Amy ; et al.	2011-01-13
System and method for enhanced control of copper trench sheet resistance uniformity Grant 7,851,234 - Ko , et al. December 14, 2	2010-12-14
Auto routing for optimal uniformity control Grant 7,767,471 - Wang , et al. August 3, 2	2010-08-03
Method and system for yield and productivity improvements in semiconductor processing Grant 7,642,100 - Yu , et al. January 5, 2	2010-01-05
Prediction of uniformity of a wafer Grant 7,634,325 - Wang , et al. December 15, 2	2009-12-15
System And Method For Enhanced Control Of Copper Trench Sheet Resistance Uniformity App 20090142860 - Ko; Francis ; et al.	2009-06-04
Auto Routing for Optimal Uniformity Control App 20090035883 - Wang; Jean ; et al.	2009-02-05
Method and system for controlling copper chemical mechanical polish uniformity App 20080305563 - Ko; Francis ; et al.	2008-12-11
Methodology To Enable Wafer Result Prediction Of Batch Tools App 20080275676 - Lin; Chun-Hsien ; et al.	2008-11-06
Extraction Of Key Process Parameter App 20080275585 - Lin; Chun-Hsien ; et al.	2008-11-06
Novel Methodology To Realize Automatic Virtual Metrology App 20080275586 - Ko; Francis ; et al.	2008-11-06
Prediction Of Uniformity Of A Wafer App 20080275588 - Wang; Jean ; et al.	2008-11-06
Method And System For Yield And Productivity Improvements In Semiconductor Processing App 20080064127 - Yu; Chen-Hua ; et al.	2008-03-13
Apparatus and method for argon plasma induced ultraviolet light curing step for increasing silicon-containing photoresist selectivity App 20070072095 - Ko; Francis ; et al.	2007-03-29
Method for argon plasma induced ultraviolet light curing step for increasing silicon-containing photoresist selectivity Grant 7,160,671 - Ko , et al. January 9, 2	2007-01-09
Method and apparatus to enable accurate wafer prediction Grant 7,144,297 - Lin , et al. December 5, 2	2006-12-05
Method And Apparatus To Enable Accurate Wafer Prediction App 20060252348 - Lin; Chun-Hsien ; et al.	2006-11-09
Novel method and apparatus for integrating fault detection and real-time virtual metrology in an advanced process control framework App 20060129257 - Chen; Ping-Hsu ; et al.	2006-06-15
FIB exposure of alignment marks in MIM technology App 20050186753 - Chen, Ping-Hsu ; et al.	2005-08-25
Plasma enhanced method for increasing silicon-containing photoresist selectivity Grant 6,799,907 - Ko , et al. October 5, 2	2004-10-05
Plasma enhanced method for increasing silicon-containing photoresist selectivity App 20030129816 - Ko, Francis ; et al.	2003-07-10
All dual damascene oxide etch process steps in one confined plasma chamber App 20030032278 - Chen, Lawrence ; et al.	2003-02-13
Apparatus and method for argon plasma induced ultraviolet light curing step for increasing silicon-containing photoresist selectivity App 20030003407 - Ko, Francis ; et al.	2003-01-02
Plasma Enhanced Method For Increasing Silicon-containing Photoresist Selectivity App 20030003683 - Ko, Francis ; et al.	2003-01-02

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