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Field curvature correction for multi-beam inspection systems Grant 11,302,511 - Brodie , et al. April 12, 2 | 2022-04-12 |
Method and system for charged particle microscopy with improved image beam stabilization and interrogation Grant 11,120,969 - Masnaghetti , et al. September 14, 2 | 2021-09-14 |
Method and system for focus adjustment of a multi-beam scanning electron microscopy system Grant 10,861,671 - Masnaghetti , et al. December 8, 2 | 2020-12-08 |
Objective Lens Arrangement Usable In Particle-optical Systems App 20200243296 - KNIPPELMEYER; Rainer ;   et al. | 2020-07-30 |
Method and System for Charged Particle Microscopy with Improved Image Beam Stabilization and Interrogation App 20200227232 - Masnaghetti; Doug K. ;   et al. | 2020-07-16 |
Method and system for charged particle microscopy with improved image beam stabilization and interrogation Grant 10,643,819 - Masnaghetti , et al. | 2020-05-05 |
Objective lens arrangement usable in particle-optical systems Grant 10,622,184 - Knippelmeyer , et al. | 2020-04-14 |
Charged particle beam system and method of operating the same Grant 10,541,112 - Schubert , et al. Ja | 2020-01-21 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 10,504,681 - Knippelmeyer , et al. Dec | 2019-12-10 |
Backscattered electrons (BSE) imaging using multi-beam tools Grant 10,460,905 - McCord , et al. Oc | 2019-10-29 |
Method and system for noise mitigation in a multi-beam scanning electron microscopy system Grant 10,366,862 - Masnaghetti , et al. July 30, 2 | 2019-07-30 |
Charged particle inspection method and charged particle system Grant 10,354,831 - Kemen , et al. July 16, 2 | 2019-07-16 |
Method and system for focus adjustment of a multi-beam scanning electron microscopy system Grant 10,325,753 - Masnaghetti , et al. | 2019-06-18 |
Method and System for Focus Adjustment of a Multi-Beam Scanning Electron Microscopy System App 20190172675 - Masnaghetti; Doug K. ;   et al. | 2019-06-06 |
Charged Particle Beam System And Method Of Operating The Same App 20190066974 - SCHUBERT; Stefan ;   et al. | 2019-02-28 |
Multi-beam dark field imaging Grant 10,192,716 - Masnaghetti , et al. Ja | 2019-01-29 |
Charged particle beam system and method of operating the same Grant 10,121,635 - Schubert , et al. November 6, 2 | 2018-11-06 |
Objective Lens Arrangement Usable In Particle-optical Systems App 20170294287 - KNIPPELMEYER; Rainer ;   et al. | 2017-10-12 |
Particle-optical Systems And Arrangements And Particle-optical Components For Such Systems And Arrangements App 20170287674 - KNIPPELMEYER; Rainer ;   et al. | 2017-10-05 |
Field Curvature Correction for Multi-Beam Inspection Systems App 20170229279 - Brodie; Alan ;   et al. | 2017-08-10 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 9,673,024 - Knippelmeyer , et al. June 6, 2 | 2017-06-06 |
Method and System for Focus Adjustment of a Multi-Beam Scanning Electron Microscopy System App 20170084424 - Masnaghetti; Doug K. ;   et al. | 2017-03-23 |
Method and System for Noise Mitigation in a Multi-Beam Scanning Electron Microscopy System App 20170084423 - Masnaghetti; Doug K. ;   et al. | 2017-03-23 |
Multi-Beam Dark Field Imaging App 20170084422 - Masnaghetti; Doug K. ;   et al. | 2017-03-23 |
Backscattered Electrons (BSE) Imaging Using Multi-Beam Tools App 20170084421 - McCord; Mark A. ;   et al. | 2017-03-23 |
Method and System for Charged Particle Microscopy with Improved Image Beam Stabilization and Interrogation App 20160372304 - Masnaghetti; Doug K. ;   et al. | 2016-12-22 |
Charged Particle Beam System And Method Of Operating The Same App 20160247663 - SCHUBERT; Stefan ;   et al. | 2016-08-25 |
Charged Particle Inspection Method And Charged Particle System App 20160240344 - KEMEN; Thomas ;   et al. | 2016-08-18 |
Objective Lens Arrangement Usable In Particle-optical Systems App 20160181054 - KNIPPELMEYER; Rainer ;   et al. | 2016-06-23 |
Charged particle detection system and multi-beamlet inspection system Grant 9,336,981 - Knippelmeyer May 10, 2 | 2016-05-10 |
Charged particle inspection method and charged particle system Grant 9,324,537 - Kemen , et al. April 26, 2 | 2016-04-26 |
Particle-optical Systems And Arrangements And Particle-optical Components For Such Systems And Arrangements App 20160111251 - KNIPPELMEYER; Rainer ;   et al. | 2016-04-21 |
Charged particle multi-beam inspection system and method of operating the same Grant 9,263,233 - Zeidler , et al. February 16, 2 | 2016-02-16 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 9,224,576 - Knippelmeyer , et al. December 29, 2 | 2015-12-29 |
Charged Particle Multi-beam Inspection System And Method Of Operating The Same App 20150090879 - Zeidler; Dirk ;   et al. | 2015-04-02 |
Charged Particle Inspection Method And Charged Particle System App 20150008331 - KEMEN; Thomas ;   et al. | 2015-01-08 |
Reducing particle implantation Grant 8,907,277 - Knippelmeyer , et al. December 9, 2 | 2014-12-09 |
Particle-Optical Systems and Arrangements and Particle-Optical Components for such Systems and Arrangements App 20140158902 - Knippelmeyer; Rainer ;   et al. | 2014-06-12 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 8,637,834 - Knippelmeyer , et al. January 28, 2 | 2014-01-28 |
Cross-section systems and methods Grant 8,384,029 - Knippelmeyer , et al. February 26, 2 | 2013-02-26 |
Charged Particle Detection System and Multi-Beamlet Inspection System App 20130032729 - Knippelmeyer; Rainer | 2013-02-07 |
Repairing defects Grant 8,334,701 - Knippelmeyer , et al. December 18, 2 | 2012-12-18 |
Particle-Optical Systems and Arrangements and Particle-Optical Components for such Systems and Arrangements App 20120104252 - KNIPPELMEYER; Rainer ;   et al. | 2012-05-03 |
Cross-section Systems And Methods App 20120085906 - Knippelmeyer; Rainer ;   et al. | 2012-04-12 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 8,097,847 - Knippelmeyer , et al. January 17, 2 | 2012-01-17 |
Charged particle-optical systems, methods and components Grant 8,039,813 - Casares , et al. October 18, 2 | 2011-10-18 |
Reducing Particle Implantation App 20110049364 - Knippelmeyer; Rainer ;   et al. | 2011-03-03 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements App 20100181479 - Knippelmeyer; Rainer ;   et al. | 2010-07-22 |
Repairing Defects App 20100052697 - Knippelmeyer; Rainer ;   et al. | 2010-03-04 |
Charged Particle Inspection Method and Charged Particle System App 20090256075 - Kemen; Thomas ;   et al. | 2009-10-15 |
Charged Particle Beam Exposure System App 20090212240 - Platzgummer; Elmar ;   et al. | 2009-08-27 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 7,554,094 - Knippelmeyer , et al. June 30, 2 | 2009-06-30 |
Particle-Optical Component App 20090159810 - Knippelmeyer; Rainer ;   et al. | 2009-06-25 |
Particle-Optical Component App 20090114818 - Casares; Antonio ;   et al. | 2009-05-07 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements App 20080054184 - Knippelmeyer; Rainer ;   et al. | 2008-03-06 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Grant 7,244,949 - Knippelmeyer , et al. July 17, 2 | 2007-07-17 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements App 20060289804 - Knippelmeyer; Rainer ;   et al. | 2006-12-28 |
Beam guiding arrangement, imaging method, electron microscopy system and electron lithography system Grant 7,135,677 - Kienzle , et al. November 14, 2 | 2006-11-14 |
Electron microscopy system and electron microscopy method Grant 7,105,814 - Knippelmeyer September 12, 2 | 2006-09-12 |
Detector arrangement and detection method Grant 7,084,406 - Knippelmeyer August 1, 2 | 2006-08-01 |
Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor Grant 6,967,328 - Kienzle , et al. November 22, 2 | 2005-11-22 |
Electron microscopy system Grant 6,946,657 - Kienzle , et al. September 20, 2 | 2005-09-20 |
Particle-optical apparatus, electron microscopy system and electron lithography system Grant 6,914,249 - Kienzle , et al. July 5, 2 | 2005-07-05 |
Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same Grant 6,903,337 - Kienzle , et al. June 7, 2 | 2005-06-07 |
Particle-optical apparatus and method for operating the same Grant 6,891,168 - Knippelmeyer May 10, 2 | 2005-05-10 |
Applications operating with beams of charged particles Grant 6,878,936 - Kienzle , et al. April 12, 2 | 2005-04-12 |
Particle-optical apparatus and method for operating the same App 20040113092 - Knippelmeyer, Rainer | 2004-06-17 |
Electron microscopy system App 20040108457 - Kienzle, Oliver ;   et al. | 2004-06-10 |
Particle-optical apparatus, electron microscopy system and electron lithography system App 20040105160 - Kienzle, Oliver ;   et al. | 2004-06-03 |
Beam guiding arrangement, imaging method, electron microscopy system and electron lithography system App 20040084621 - Kienzle, Oliver ;   et al. | 2004-05-06 |
Electron microscopy system and electron microscopy method App 20040075054 - Knippelmeyer, Rainer | 2004-04-22 |
Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor App 20040065827 - Kienzle, Oliver ;   et al. | 2004-04-08 |
Applications operating with beams of charged particles App 20040056193 - Kienzle, Oliver ;   et al. | 2004-03-25 |
Detector arrangement and detection method App 20030116717 - Knippelmeyer, Rainer | 2003-06-26 |
Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same App 20030066961 - Kienzle, Oliver ;   et al. | 2003-04-10 |