Patent | Date |
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Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void Grant 7,387,737 - Harris , et al. June 17, 2 | 2008-06-17 |
Microelectromechanical isolating power converter Grant 7,262,522 - Harris , et al. August 28, 2 | 2007-08-28 |
Microelectromechanical strain gauge with frequency detector Grant 7,093,498 - Herbert , et al. August 22, 2 | 2006-08-22 |
Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void App 20060096947 - Harris; Richard D. ;   et al. | 2006-05-11 |
Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void Grant 7,018,550 - Harris , et al. March 28, 2 | 2006-03-28 |
Microelectromechanical isolating circuit Grant 6,975,193 - Knieser , et al. December 13, 2 | 2005-12-13 |
Microelectromechanical strain gauge App 20050068989 - Herbert, Patrick C. ;   et al. | 2005-03-31 |
Microelectromechanical isolating power converter App 20050067901 - Harris, Richard D. ;   et al. | 2005-03-31 |
Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void App 20040262257 - Harris, Richard D. ;   et al. | 2004-12-30 |
Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate Grant 6,815,243 - Lucak , et al. November 9, 2 | 2004-11-09 |
Microelectromechanical isolating circuit App 20040189142 - Knieser, Michael J. ;   et al. | 2004-09-30 |
Microelectromechanical system (MEMS) analog electrical isolator Grant 6,798,312 - Harris , et al. September 28, 2 | 2004-09-28 |
Microelectromechanical System (mems) Analog Electrical Isolator App 20040183617 - Harris, Richard D. ;   et al. | 2004-09-23 |
Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap Grant 6,768,628 - Harris , et al. July 27, 2 | 2004-07-27 |
Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void Grant 6,761,829 - Harris , et al. July 13, 2 | 2004-07-13 |
Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques Grant 6,756,310 - Kretschmann , et al. June 29, 2 | 2004-06-29 |
Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise Grant 6,617,750 - Dummermuth , et al. September 9, 2 | 2003-09-09 |
MEMS-based electrically isolated analog-to-digital converter Grant 6,593,870 - Dummermuth , et al. July 15, 2 | 2003-07-15 |
Microelectromechanical system (MEMS) digital electrical isolator Grant 6,583,374 - Knieser , et al. June 24, 2 | 2003-06-24 |
Method For Fabricating An Isolated Microelectromechanical System Device App 20030082928 - Knieser, Michael J. ;   et al. | 2003-05-01 |
Mems-based Electrically Isolated Analog-to-digital Converter App 20030076249 - Dummermuth, Ernst H. ;   et al. | 2003-04-24 |
Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques App 20030060051 - Kretschmann, Robert J. ;   et al. | 2003-03-27 |
Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void App 20020158039 - Harris, Richard D. ;   et al. | 2002-10-31 |
Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate App 20020158040 - Lucak, Mark A. ;   et al. | 2002-10-31 |
Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap App 20020159218 - Harris, Richard D. ;   et al. | 2002-10-31 |
Microelectromechanical system (MEMS) digital electrical isolator App 20020125117 - Knieser, Michael J. ;   et al. | 2002-09-12 |
Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise App 20010050618 - Dummermuth, Ernst H. ;   et al. | 2001-12-13 |