Patent | Date |
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Lithographic apparatus and method Grant 10,558,126 - Van Schoot , et al. Feb | 2020-02-11 |
Microlithographic projection exposure apparatus and measuring device for a projection lens Grant 10,345,710 - Ehrmann , et al. July 9, 2 | 2019-07-09 |
Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system Grant 9,696,631 - Kneer , et al. July 4, 2 | 2017-07-04 |
Lithographic Apparatus And Method App 20170176868 - VAN SCHOOT; Jan Bernard Plechelmus ;   et al. | 2017-06-22 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens App 20170082930 - Ehrmann; Albrecht ;   et al. | 2017-03-23 |
Exposure apparatus and measuring device for a projection lens Grant 9,436,095 - Ehrmann , et al. September 6, 2 | 2016-09-06 |
Method For Stress-adjusted Operation Of A Projection Exposure System And Corresponding Projection Exposure System App 20160062245 - Kneer; Bernhard ;   et al. | 2016-03-03 |
Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system Grant 9,086,637 - Kneer , et al. July 21, 2 | 2015-07-21 |
Exposure Apparatus And Measuring Device For A Projection Lens App 20130120723 - Ehrmann; Albrecht ;   et al. | 2013-05-16 |
Method For Stress-adjusted Operation Of A Projection Exposure System And Corresponding Projection Exposure System App 20130044303 - Kneer; Bernhard ;   et al. | 2013-02-21 |
Exposure apparatus and measuring device for a projection lens Grant 8,330,935 - Ehrmann , et al. December 11, 2 | 2012-12-11 |
Projection Objective For A Microlithographic Projection Exposure Apparatus App 20110228246 - Kneer; Bernhard ;   et al. | 2011-09-22 |
Exposure Apparatus And Measuring Device For A Projection Lens App 20100141912 - Ehrmann; Albrecht ;   et al. | 2010-06-10 |
Imaging system for a microlithographical projection light system Grant 7,719,658 - Dorsel , et al. May 18, 2 | 2010-05-18 |
Method for distortion correction in a microlithographic projection exposure apparatus Grant 7,605,905 - Kirchner , et al. October 20, 2 | 2009-10-20 |
Method for correcting astigmatism in a microlithography projection exposure apparatus, a projection objective of such a projection exposure apparatus, and a fabrication method for micropatterned components Grant 7,522,260 - Kirchner , et al. April 21, 2 | 2009-04-21 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens App 20080309894 - Ehrmann; Albrecht ;   et al. | 2008-12-18 |
Projection Objective For A Microlithographic Projection Exposure Apparatus App 20080304033 - Kneer; Bernhard ;   et al. | 2008-12-11 |
Projection exposure system Grant 7,457,043 - Kneer , et al. November 25, 2 | 2008-11-25 |
Method For Distortion Correction In A Microlithographic Projection Exposure Apparatus App 20080278699 - Kirchner; Andreas ;   et al. | 2008-11-13 |
Projection exposure system Grant 7,408,621 - Kneer , et al. August 5, 2 | 2008-08-05 |
Method for distortion correction in a microlithographic projection exposure apparatus Grant 7,372,539 - Kirchner , et al. May 13, 2 | 2008-05-13 |
Imaging System for a Microlithographical Projection Light System App 20070285637 - Dorsel; Andreas ;   et al. | 2007-12-13 |
Projection Exposure System App 20070171539 - Kneer; Bernhard ;   et al. | 2007-07-26 |
Projection objective for a microlithographic projection exposure apparatus App 20070165198 - Kneer; Bernhard ;   et al. | 2007-07-19 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens App 20070070316 - Ehrmann; Albrecht ;   et al. | 2007-03-29 |
Projection exposure system App 20060170897 - Kneer; Bernhard ;   et al. | 2006-08-03 |
Method for distortion correction in a microlithographic projection exposure apparatus App 20040263810 - Kirchner, Andreas ;   et al. | 2004-12-30 |
Projection exposure system App 20030063268 - Kneer, Bernhard ;   et al. | 2003-04-03 |