Klose; Gerd

Patent Applications and Registrations

Patent applications and USPTO patent grants for Klose; Gerd.The latest application filed is for "method for determining the registration of a structure on a photomask and apparatus to perform the method".

Company Profile

0.15.12

Klose; Gerd - Tokyo JP
Klose; Gerd - Oberkochen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for determining the registration of a structure on a photomask and apparatus to perform the method Grant 10,113,864 - Arnz , et al. October 30, 2	2018-10-30
Method and device for connecting an optical element to a frame Grant 9,604,299 - Schoeppach , et al. March 28, 2	2017-03-28
Method For Determining The Registration Of A Structure On A Photomask And Apparatus To Perform The Method App 20160195387 - Arnz; Michael ; et al.	2016-07-07
Method for determining the registration of a structure on a photomask and apparatus to perform the method Grant 9,303,975 - Arnz , et al. April 5, 2	2016-04-05
Autofocus device and autofocusing method for an imaging device Grant 9,229,209 - Arnz , et al. January 5, 2	2016-01-05
Method And Device For Connecting An Optical Element To A Frame App 20150008215 - Schoeppach; Armin ; et al.	2015-01-08
Method and apparatus for measuring structures on photolithography masks Grant 8,736,849 - Stroessner , et al. May 27, 2	2014-05-27
Method and device for connecting an optical element to a frame Grant 8,705,006 - Schoeppach , et al. April 22, 2	2014-04-22
Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stage Grant 8,473,237 - Huebel , et al. June 25, 2	2013-06-25
Method and apparatus for determining the relative overlay shift of stacked layers Grant 8,260,033 - Arnz , et al. September 4, 2	2012-09-04
Method For Determining The Registration Of A Structure On A Photomask And Apparatus To Perform The Method App 20120063666 - Arnz; Michael ; et al.	2012-03-15
Method And Apparatus For Measuring Structures On Photolithography Masks App 20110242544 - Stroessner; Ulrich ; et al.	2011-10-06
Autofocus Device And Autofocusing Method For An Imaging Device App 20110134308 - Arnz; Michael ; et al.	2011-06-09
Method For Calibrating A Specimen Stage Of A Metrology System And Metrology System Comprising A Specimen Stage App 20100241384 - Huebel; Alexander ; et al.	2010-09-23
Method And Apparatus For Determining The Relative Overlay Shift Of Stacked Layers App 20100208935 - Arnz; Michael ; et al.	2010-08-19
Device and method for range-resolved determination of scattered light, and an illumination mask Grant 7,755,748 - Arnz , et al. July 13, 2	2010-07-13
Apparatus And Method For Measuring The Positions Of Marks On A Mask App 20100153059 - Klose; Gerd ; et al.	2010-06-17
Method And Apparatus For Determining The Position Of A Structure On A Carrier Relative To A Reference Point Of The Carrier App 20100104128 - Arnz; Michael ; et al.	2010-04-29
Method And Device For Connecting An Optical Element To A Frame App 20090244508 - Schoeppach; Armin ; et al.	2009-10-01
Device And Method For Range-resolved Determination Of Scattered Light, And An Illumination Mask App 20080285018 - Arnz; Michael ; et al.	2008-11-20
Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask Grant 7,408,631 - Arnz , et al. August 5, 2	2008-08-05
Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask App 20050264819 - Arnz, Michael ; et al.	2005-12-01

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