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Patent applications and USPTO patent grants for Klochkov; Dmitry.The latest application filed is for "contact area size determination between 3d structures in an integrated semiconductor sample".
Patent | Date |
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Contact Area Size Determination Between 3d Structures In An Integrated Semiconductor Sample App 20220230899 - Buxbaum; Alex ;   et al. | 2022-07-21 |
FIB-SEM 3D Tomography for measuring shape deviations of HAR structures App 20220223445 - Avishai; Amir ;   et al. | 2022-07-14 |
Cross Section Imaging With Improved 3d Volume Image Reconstruction Accuracy App 20220138973 - Korb; Thomas ;   et al. | 2022-05-05 |
Method For Characterising At Least One Optical Component Of A Projection Exposure Apparatus App 20200218160 - KRUITHOF; Wilbert ;   et al. | 2020-07-09 |
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