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Assembly activating protein (AAP) and its use for the manufacture of parvovirus particles essentially consisting of VP3 Grant 11,267,847 - Sonntag , et al. March 8, 2 | 2022-03-08 |
Assembly Activating Protein (aap) And Its Use For The Manufacture Of Parvovirus Particles Essentially Consisting Of Vp3 App 20200087352 - SONNTAG; Florian ;   et al. | 2020-03-19 |
Assembly activating protein (AAP) and its use for the manufacture of parvovirus particles essentially consisting of VP3 Grant 10,344,057 - Sonntag , et al. July 9, 2 | 2019-07-09 |
Assembly Activating Protein (aap) And Its Use For The Manufacture Of Parvovirus Particles Essentially Consisting Of Vp3 App 20170226160 - SONNTAG; Florian ;   et al. | 2017-08-10 |
Assembly activating protein (AAP) and its use for the manufacture of parvovirus particles essentially consisting of VP3 Grant 9,464,119 - Sonntag , et al. October 11, 2 | 2016-10-11 |
Arrangement for generating EUV radiation Grant 9,170,505 - Korobochko , et al. October 27, 2 | 2015-10-27 |
Electrical terminal module Grant 8,975,543 - Hakemeyer , et al. March 10, 2 | 2015-03-10 |
Method and apparatus for the generation of short-wavelength radiation by means of a gas discharge-based high-frequency, high-current discharge Grant 8,610,354 - Schuermann , et al. December 17, 2 | 2013-12-17 |
Method and arrangement for the stabilization of the source location of the generation of extreme ultraviolet (EUV) radiation based on a discharge plasma Grant 8,546,775 - Kleinschmidt October 1, 2 | 2013-10-01 |
Method and apparatus for the generation of EUV radiation from a gas discharge plasma Grant 8,426,834 - Kleinschmidt April 23, 2 | 2013-04-23 |
Method and arrangement for the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasma Grant 8,410,422 - Bolshukhin , et al. April 2, 2 | 2013-04-02 |
Method and Arrangement for the Adjustment of Characteristics of a Beam Bundle of High-Energy Radiation Emitted from a Plasma App 20120248327 - Bolshukhin; Denis ;   et al. | 2012-10-04 |
Method and Apparatus for the Generation of Short-Wavelength Radiation by Means of a Gas Discharge-Based High-Frequency, High-Current Discharge App 20120153829 - SCHUERMANN; Max Christian ;   et al. | 2012-06-21 |
Assembly Activating Protein (aap) And Its Use For The Manufacture Of Parvovirus Particles Essentially Consisting Of Vp3 App 20120135022 - Sonntag; Florian ;   et al. | 2012-05-31 |
Method and Arrangement for the Stabilization of the Source Location of the Generation of Extreme Ultraviolet (EUV) Radiation Based on a Discharge Plasma App 20120112101 - Kleinschmidt; Juergen | 2012-05-10 |
Method and Apparatus for the Generation of EUV Radiation from a Gas Discharge Plasma App 20120080619 - Kleinschmidt; Juergen | 2012-04-05 |
Electrical Terminal Module App 20110211355 - Hakemeyer; Frank ;   et al. | 2011-09-01 |
Method and arrangement for stabilizing the average emitted radiation output of a pulsed radiation source Grant 7,974,321 - Brudermann , et al. July 5, 2 | 2011-07-05 |
Adjusting device for the setpoint of an electric module Grant D626,516 - Hakemeyer , et al. November 2, 2 | 2010-11-02 |
Arrangement for radiation generation by means of a gas discharge Grant 7,800,086 - Ziener , et al. September 21, 2 | 2010-09-21 |
Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation source Grant 7,755,070 - De Bruijn , et al. July 13, 2 | 2010-07-13 |
Method And Arrangement For The Operation Of Plasma-based Short-wavelength Radiation Sources App 20100078578 - Schuermann; Max Christian ;   et al. | 2010-04-01 |
Arrangement for switching high electric currents by a gas discharge Grant 7,595,594 - Korobochko , et al. September 29, 2 | 2009-09-29 |
Arrangement for the generation of short-wavelength radiation based on a gas discharge plasma and method for the production of coolant-carrying electrode housings Grant 7,541,604 - Goetze , et al. June 2, 2 | 2009-06-02 |
Arrangement and method for the generation of extreme ultraviolet radiation Grant 7,531,820 - Hergenhan , et al. May 12, 2 | 2009-05-12 |
Arrangement For Generating Euv Radiation App 20090101850 - Korobochko; Vladimir ;   et al. | 2009-04-23 |
Arrangement for the generation of intensive short-wavelength radiation based on a gas discharge plasma Grant 7,488,962 - Korobochko , et al. February 10, 2 | 2009-02-10 |
Device and method for generating extreme ultraviolet (EUV) radiation Grant 7,476,884 - Gaebel , et al. January 13, 2 | 2009-01-13 |
Arrangement For Switching High Electric Currents By A Gas Discharge App 20080265779 - Korobochko; Vladimir ;   et al. | 2008-10-30 |
EUV radiation source with high radiation output based on a gas discharge Grant 7,414,253 - Kleinschmidt , et al. August 19, 2 | 2008-08-19 |
Method And Arrangement For Stabilizing The Average Emitted Radiation Output Of A Pulsed Radiation Source App 20080143989 - BRUDERMANN; JESKO ;   et al. | 2008-06-19 |
Method and arrangement for the suppression of debris in the generation of short-wavelength radiation based on a plasma Grant 7,365,350 - Tran , et al. April 29, 2 | 2008-04-29 |
Laser gas replenishment method Grant 7,266,137 - Albrecht , et al. September 4, 2 | 2007-09-04 |
Arrangement And Method For The Generation Of Euv Radiation Of High Average Output App 20070181834 - KLEINSCHMIDT; JUERGEN | 2007-08-09 |
Arrangement For The Generation Of Short-wavelength Radiation Based On A Gas Discharge Plasma And Method For The Production Of Coolant-carrying Electrode Housing App 20070114946 - GOETZE; SVEN ;   et al. | 2007-05-24 |
Arrangement And Method For The Generation Of Extreme Ultraviolet Radiation App 20070085044 - Hergenhan; Guido ;   et al. | 2007-04-19 |
Arrangement For The Suppression Of Unwanted Spectral Components In A Plasma-based Euv Radiation Source App 20070080307 - BRUIJN; RENE De ;   et al. | 2007-04-12 |
EUV radiation source with high radiation output based on a gas discharge App 20070045573 - Kleinschmidt; Juergen ;   et al. | 2007-03-01 |
Arrangement For Radiation Generation By Means Of A Gas Discharge App 20070040511 - ZIENER; Christian ;   et al. | 2007-02-22 |
Arrangement For The Generation Of Intensive Short-wavelength Radiation Based On A Gas Discharge Plasma App 20060273732 - Korobochko; Vladimir ;   et al. | 2006-12-07 |
Method And Arrangement For The Suppression Of Debris In The Generation Of Short-wavelength Radiation Based On A Plasma App 20060243927 - Tran; Duc Chinh ;   et al. | 2006-11-02 |
Device and method for generating extreme ultraviolet (EUV) radiation App 20060192157 - Gaebel; Kai ;   et al. | 2006-08-31 |
Arrangement for debris reduction in a radiation source based on a plasma Grant 7,079,224 - Tran , et al. July 18, 2 | 2006-07-18 |
Tunable laser with stabilized grating Grant 7,075,963 - Basting , et al. July 11, 2 | 2006-07-11 |
Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources Grant 7,072,370 - Korobochko , et al. July 4, 2 | 2006-07-04 |
Laser gas replenishment method App 20060056478 - Albrecht; Hans-Stephen ;   et al. | 2006-03-16 |
Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp Grant 7,006,541 - Lokai , et al. February 28, 2 | 2006-02-28 |
Laser gas replenishment method Grant 6,965,624 - Albrecht , et al. November 15, 2 | 2005-11-15 |
Arrangement for the generation of EUV radiation with high repetition rates Grant 6,946,669 - Kleinschmidt September 20, 2 | 2005-09-20 |
Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources App 20050200304 - Korobochko, Vladimir ;   et al. | 2005-09-15 |
Method for energy stabilization of gas discharged pumped in selected impulse following driven beam sources Grant 6,914,920 - Kleinschmidt July 5, 2 | 2005-07-05 |
Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge Grant 6,894,298 - Ahmad , et al. May 17, 2 | 2005-05-17 |
Arrangement for monitoring the energy radiated by an EUV radiation source Grant 6,894,285 - Kleinschmidt , et al. May 17, 2 | 2005-05-17 |
Method for energy control of pulsed driven, gas discharged-coupled beam sources Grant 6,865,212 - Kleinschmidt March 8, 2 | 2005-03-08 |
Detector arrangement for energy measurement of pulsed x-ray radiation Grant 6,855,932 - Schriever , et al. February 15, 2 | 2005-02-15 |
Resonator arrangement for bandwidth control Grant 6,856,638 - Aab , et al. February 15, 2 | 2005-02-15 |
Stabilization technique for high repetition rate gas discharge lasers Grant 6,834,066 - Bragin , et al. December 21, 2 | 2004-12-21 |
Laser gas replenishment method App 20040252740 - Albrecht, Hans-Stephan ;   et al. | 2004-12-16 |
Method for the stabilization of the radiation output of a gas discharge-coupled radiation source in pulsed operation Grant 6,829,261 - Kleinschmidt December 7, 2 | 2004-12-07 |
Radiation source with high average EUV radiation output Grant 6,815,900 - Ahmad , et al. November 9, 2 | 2004-11-09 |
Laser system and method for spectral narrowing through wavefront correction Grant 6,801,561 - Kleinschmidt October 5, 2 | 2004-10-05 |
Narrow band excimer laser with a prism-grating as line-narrowing optical element Grant 6,795,473 - Kleinschmidt , et al. September 21, 2 | 2004-09-21 |
Method and apparatus for reduction of spectral fluctuations Grant 6,792,023 - Kleinschmidt , et al. September 14, 2 | 2004-09-14 |
Arrangement for debris reduction in a radiation source based on a plasma App 20040165171 - Tran, Duc Chinh ;   et al. | 2004-08-26 |
Arrangement for the generation of EUV radiation App 20040155207 - Kleinschmidt, Juergen | 2004-08-12 |
Radiation source with high average EUV radiation output App 20040145292 - Ahmad, Imtiaz ;   et al. | 2004-07-29 |
Multiple-pass interferometric device Grant 6,747,741 - Kleinschmidt June 8, 2 | 2004-06-08 |
Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers Grant 6,721,345 - Bragin , et al. April 13, 2 | 2004-04-13 |
Wavelength and bandwidth monitor for excimer or molecular fluorine laser Grant 6,717,973 - Basting , et al. April 6, 2 | 2004-04-06 |
Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections Grant 6,700,915 - Kleinschmidt March 2, 2 | 2004-03-02 |
E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systems Grant 6,700,916 - Kramer , et al. March 2, 2 | 2004-03-02 |
Molecular fluorine laser Grant 6,678,291 - Vogler , et al. January 13, 2 | 2004-01-13 |
Temperature compensation method for wavemeters Grant 6,667,804 - Kleinschmidt December 23, 2 | 2003-12-23 |
Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp App 20030210715 - Lokai, Peter ;   et al. | 2003-11-13 |
Method for the stabilization of the radiation output of a gas discharge-coupled radiation source in pulsed operation App 20030201737 - Kleinschmidt, Juergen | 2003-10-30 |
Method for energy control of pulsed driven, gas discharged-coupled beam sources App 20030198263 - Kleinschmidt, Juergen | 2003-10-23 |
Detector arrangement for energy measurement of pulsed x-ray radiation App 20030178566 - Schriever, Guido ;   et al. | 2003-09-25 |
Method for energy stabilization of gas discharged pumped in selected impulse following driven beam sources App 20030161362 - Kleinschmidt, Juergen | 2003-08-28 |
Arrangement for monitoring the energy radiated by an EUV radiation source App 20030146391 - Kleinschmidt, Juergen ;   et al. | 2003-08-07 |
Narrow band excimer or molecular fluorine laser with improved beam parameters Grant 6,603,789 - Kleinschmidt August 5, 2 | 2003-08-05 |
Molecular fluorine laser Grant 6,577,665 - Vogler , et al. June 10, 2 | 2003-06-10 |
Gas performance control system for gas discharge lasers Grant 6,563,853 - Heist , et al. May 13, 2 | 2003-05-13 |
Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge App 20030068012 - Ahmad, Imtiaz ;   et al. | 2003-04-10 |
Molecular Fluorine laser App 20020176469 - Vogler, Klaus Wolfgang ;   et al. | 2002-11-28 |
Excimer laser with line narrowing Grant 6,476,987 - Kleinschmidt , et al. November 5, 2 | 2002-11-05 |
Resonator arrangement for bandwidth control App 20020141471 - Aab, Konstantin ;   et al. | 2002-10-03 |
Narrow band excimer or molecular fluorine laser having an output coupling interferometer App 20020141474 - Kleinschmidt, Juergen ;   et al. | 2002-10-03 |
Narrow band excimer or molecular fluorine laser having an output coupling interferometer App 20020122452 - Kleinschmidt, Juergen ;   et al. | 2002-09-05 |
Molecular fluorine laser App 20020114362 - Vogler, Klaus Wolfgang ;   et al. | 2002-08-22 |
Laser system and method for spectral narrowing through wavefront correction App 20020057723 - Kleinschmidt, Juergen | 2002-05-16 |
Gas performance control system for gas discharge lasers App 20020031157 - Heist, Peter ;   et al. | 2002-03-14 |
Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections App 20020031158 - Kleinschmidt, Juergen | 2002-03-14 |
Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers App 20020021731 - Bragin, Igor ;   et al. | 2002-02-21 |
Wavelength and bandwidth monitor for excimer or molecular fluorine laser App 20020018505 - Basting, Dirk ;   et al. | 2002-02-14 |
Stabilization technique for high repetition rate gas discharge lasers App 20020012371 - Bragin, Igor ;   et al. | 2002-01-31 |
Tunable laser with stabilized grating App 20020012374 - Basting, Dirk ;   et al. | 2002-01-31 |
Excimer or molecular fluorine laser having lengthened electrodes App 20020001330 - Stamm, Uwe ;   et al. | 2002-01-03 |