Kleinknecht; Hans P.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kleinknecht; Hans P..The latest application filed is for "apparatus and method for optical dimension measurement using interference of scattered electromagnetic energy".

Company Profile

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Kleinknecht; Hans P. - Bergdietikon CH

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus and method for optical dimension measurement using interference of scattered electromagnetic energy Grant 4,964,726 - Kleinknecht , et al. October 23, 1	1990-10-23
Optical imager with diffractive lenticular array Grant 4,708,436 - Kleinknecht November 24, 1	1987-11-24
Method and apparatus for forming large area high resolution patterns Grant 4,668,080 - Gale , et al. May 26, 1	1987-05-26
Method and apparatus for determining the doping profile in epitaxial layers of semiconductors Grant 4,456,879 - Kleinknecht June 26, 1	1984-06-26
Optical measurements of fine line parameters in integrated circuit processes Grant 4,408,884 - Kleinknecht , et al. October 11, 1	1983-10-11
Optical line width measuring apparatus and method Grant 4,330,213 - Kleinknecht , et al. May 18, 1	1982-05-18
Optically testing the lateral dimensions of a pattern Grant 4,303,341 - Kleinknecht , et al. * December 1, 1	1981-12-01
Photomask alignment system Grant 4,211,489 - Kleinknecht , et al. July 8, 1	1980-07-08
Optical testing of a semiconductor Grant 4,211,488 - Kleinknecht July 8, 1	1980-07-08
Optically testing the lateral dimensions of a pattern Grant 4,200,396 - Kleinknecht , et al. April 29, 1	1980-04-29
Optically measuring the carrier concentration in a semiconductor Grant 4,188,123 - Kleinknecht February 12, 1	1980-02-12
Optically monitoring the thickness of a depositing layer Grant 4,141,780 - Kleinknecht , et al. February 27, 1	1979-02-27

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