Klein; Roman
Patent Applications and Registrations
Patent applications and USPTO patent grants for Klein; Roman.The latest application filed is for "optical measurement device".
- Klein; Roman - Berlin DE
| Patent | Date |
|---|---|
| Optical measurement device Grant 10,627,336 - Steinhauer , et al. | 2020-04-21 |
| Optical Measurement Device App 20190265156 - Steinhauer; Frank ; et al. | 2019-08-29 |
| Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements Grant 7,462,842 - Wedowski , et al. December 9, 2 | 2008-12-09 |
| Optical element and method for its manufacture as well as lithography apparatus and method for manufacturing a semiconductor device Grant 7,172,788 - Yakshin , et al. February 6, 2 | 2007-02-06 |
| Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements App 20060192158 - Wedowski; Marco E. ; et al. | 2006-08-31 |
| Device, EUV-lithographic device and method for preventing and cleaning contamination on optical elements Grant 7,060,993 - Wedowski , et al. June 13, 2 | 2006-06-13 |
| Device, euv-lithographic device and method for preventing and cleaning contamination on optical elements App 20050104015 - Wedowski, Marco ; et al. | 2005-05-19 |
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