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Patent applications and USPTO patent grants for Klein; Jonathan L..The latest application filed is for "method of manufacturing vibrating micromechanical structures".
Patent | Date |
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Method of manufacturing vibrating micromechanical structures Grant 8,453,312 - Jafri , et al. June 4, 2 | 2013-06-04 |
Method of manufacturing vibrating micromechanical structures Grant 7,836,574 - Jafri , et al. November 23, 2 | 2010-11-23 |
Z offset MEMS device Grant 7,516,661 - Klein , et al. April 14, 2 | 2009-04-14 |
Method Of Manufacturing Vibrating Micromechanical Structures App 20090007413 - Jafri; Ijaz H. ;   et al. | 2009-01-08 |
Method Of Manufacturing Vibrating Micromechanical Structures App 20080261372 - Jafri; Ijaz H. ;   et al. | 2008-10-23 |
Method of manufacturing vibrating micromechanical structures Grant 7,406,761 - Jafri , et al. August 5, 2 | 2008-08-05 |
Silicon On Metal For Mems Devices App 20080032501 - Klein; Jonathan L. ;   et al. | 2008-02-07 |
Z offset MEMS device App 20070193380 - Klein; Jonathan L. ;   et al. | 2007-08-23 |
Method of manufacturing vibrating micromechanical structures App 20060207087 - Jafri; Ijaz H. ;   et al. | 2006-09-21 |
Radiation mask adapted to be aligned with a photoresist layer and method of making the same Grant 5,908,719 - Guckel , et al. June 1, 1 | 1999-06-01 |
Alignment method for multi-level deep x-ray lithography utilizing alignment holes and posts Grant 5,866,281 - Guckel , et al. February 2, 1 | 1999-02-02 |
Method and apparatus for micromachining using hard X-rays Grant 5,679,502 - Siddons , et al. October 21, 1 | 1997-10-21 |
Micromechanical magnetically actuated devices Grant 5,644,177 - Guckel , et al. July 1, 1 | 1997-07-01 |
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