Klein; Dana

Patent Applications and Registrations

Patent applications and USPTO patent grants for Klein; Dana.The latest application filed is for "per-site residuals analysis for accurate metrology measurements".

Company Profile

5.12.11

Klein; Dana - Haifa N/A IL
Klein; Dana - Milpitas CA
Klein; Dana - Migdal Ha'emek IL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and system for providing a quality metric for improved process control Grant 11,372,340 - Kandel , et al. June 28, 2	2022-06-28
Scaling metric for quantifying metrology sensitivity to process variation Grant 11,333,982 - Marciano , et al. May 17, 2	2022-05-17
Per-site residuals analysis for accurate metrology measurements Grant 11,249,400 - Saltoun , et al. February 15, 2	2022-02-15
Determining the impacts of stochastic behavior on overlay metrology data Grant 10,901,325 - Gurevich , et al. January 26, 2	2021-01-26
Per-site Residuals Analysis For Accurate Metrology Measurements App 20200371445 - Saltoun; Lilach ; et al.	2020-11-26
Method and system for process control with flexible sampling Grant 10,754,260 - Demirer , et al. A	2020-08-25
Scaling Metric for Quantifying Metrology Sensitivity to Process Variation App 20200241428 - Marciano; Tal ; et al.	2020-07-30
Determining The Impacts Of Stochastic Behavior On Overlay Metrology Data App 20190049858 - GUREVICH; Evgeni ; et al.	2019-02-14
Analyzing root causes of process variation in scatterometry metrology Grant 10,203,200 - Marciano , et al. Feb	2019-02-12
Selection and use of representative target subsets Grant 10,025,756 - Klein , et al. July 17, 2	2018-07-17
Feed forward of metrology data in a metrology system Grant 9,903,711 - Levy , et al. February 27, 2	2018-02-27
Analyzing Root Causes of Process Variation in Scatterometry Metrology App 20180023950 - Marciano; Tal ; et al.	2018-01-25
Method and System for Process Control with Flexible Sampling App 20160370718 - Demirer; Onur ; et al.	2016-12-22
Feed Forward of Metrology Data in a Metrology System App 20160290796 - Levy; Ady ; et al.	2016-10-06
Method for estimating and correcting misregistration target inaccuracy Grant 9,329,033 - Amit , et al. May 3, 2	2016-05-03
Method and system for providing process tool correctables Grant 9,052,709 - Cohen , et al. June 9, 2	2015-06-09
Selection And Use Of Representative Target Subsets App 20150025846 - Klein; Dana ; et al.	2015-01-22
Method For Estimating And Correcting Misregistration Target Inaccuracy App 20140060148 - Amit; Eran ; et al.	2014-03-06
Method And System For Providing A Quality Metric For Improved Process Control App 20130035888 - Kandel; Daniel ; et al.	2013-02-07
Method And System For Providing Process Tool Correctables App 20120029856 - Cohen; Guy ; et al.	2012-02-02

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