Patent | Date |
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Optical system and method for transmitting a source image Grant 10,394,032 - Singer , et al. A | 2019-08-27 |
Optical System And Method For Transmitting A Source Image App 20190155034 - Singer; Wolfgang ;   et al. | 2019-05-23 |
Optical system and method for transmitting a source image Grant 10,191,288 - Singer , et al. Ja | 2019-01-29 |
Optical System And Method For Transmitting A Source Image App 20180299678 - Singer; Wolfgang ;   et al. | 2018-10-18 |
Optical arrangement, method of use, and method for determining a diffraction grating Grant 8,441,729 - Kleemann May 14, 2 | 2013-05-14 |
Optical Arrangement, Method Of Use, And Method For Determining A Diffraction Grating App 20100328775 - Kleemann; Bernd | 2010-12-30 |
Optical display device Grant 7,751,662 - Kleemann July 6, 2 | 2010-07-06 |
Optical Display Device App 20090245730 - Kleemann; Bernd | 2009-10-01 |
Blazed diffractive optical element and projection objective for a microlithographic projection exposure apparatus Grant 7,453,643 - Kleemann November 18, 2 | 2008-11-18 |
COLLECTOR FOR ILLUMINATION SYSTEMS WITH A WAVELENGTH LESS THAN OR EQUAL TO 193 nm App 20080225387 - Hainz; Joachim ;   et al. | 2008-09-18 |
Polarization-selectively blazed, diffractive optical element Grant 7,408,712 - Ruoff , et al. August 5, 2 | 2008-08-05 |
Illumination system App 20070242799 - Weiss; Markus ;   et al. | 2007-10-18 |
Blazed diffractive optical element and projection objective for a microlithographic projection exposure apparatus Grant 7,262,915 - Kleemann August 28, 2 | 2007-08-28 |
Illumination system with a grating element Grant 7,248,667 - Weiss , et al. July 24, 2 | 2007-07-24 |
Optical grating and method for the manufacture of such an optical grating Grant 7,187,499 - Kleemann , et al. March 6, 2 | 2007-03-06 |
Diffractive optical element and also optical arrangement comprising a diffractive optical element Grant 7,149,030 - Kleemann , et al. December 12, 2 | 2006-12-12 |
Diffractive optical element Grant 7,139,127 - Arnold , et al. November 21, 2 | 2006-11-21 |
Optical grating and method for the manufacture of such an optical grating App 20060227425 - Kleemann; Bernd ;   et al. | 2006-10-12 |
Blazed diffractive optical element and projection objective for a microlithographic projection exposure apparatus App 20060193052 - Kleemann; Bernd | 2006-08-31 |
Optical arrangement, optical grating and method for the manufacture of such an optical grating Grant 7,092,161 - Kleemann , et al. August 15, 2 | 2006-08-15 |
Blazed diffractive optical element and projection objective for a microlithographic projection exposure apparatus App 20060132920 - Kleemann; Bernd | 2006-06-22 |
Polarization-selectively blazed, diffractive optical element App 20060039072 - Ruoff; Johannes ;   et al. | 2006-02-23 |
Diffractive optical element App 20050207012 - Arnold, Ralf ;   et al. | 2005-09-22 |
Diffractive Optical Element And Also Optical Arrangement Comprising A Diffractive Optical Element App 20050073746 - Kleemann, Bernd ;   et al. | 2005-04-07 |
Optical arrangement, optical grating and method for the manufacture of such an optical grating App 20050030627 - Kleemann, Bernd ;   et al. | 2005-02-10 |
Illumination system with a plurality of individual gratings Grant 6,836,530 - Singer , et al. December 28, 2 | 2004-12-28 |
Diffractive optical element and also optical arrangement comprising a diffractive optical element App 20040190142 - Kleemann, Bernd ;   et al. | 2004-09-30 |
Littrow grating and use of a littrow grating Grant 6,788,465 - Kleemann , et al. September 7, 2 | 2004-09-07 |
Optical arrangement, Littrow grating for use in an optical arrangement and also use of a Littrow grating Grant 6,762,881 - Kleemann , et al. July 13, 2 | 2004-07-13 |
Diffractive optical element and also optical arrangement comprising a diffractive optical element Grant 6,728,036 - Kleemann , et al. April 27, 2 | 2004-04-27 |
Method of producing an optical cable App 20040008956 - Frohne, Christian ;   et al. | 2004-01-15 |
Optical arrangement, littrow grating for use in an optical arrangement and also use of a littrow grating App 20030151816 - Kleemann, Bernd ;   et al. | 2003-08-14 |
Diffraction grating and uses of a diffraction grating Grant 6,600,602 - Kleemann , et al. July 29, 2 | 2003-07-29 |
Illumination system with a plurality of individual gratings App 20030099040 - Singer, Wolfgang ;   et al. | 2003-05-29 |
Diffractive optical element and also optical arrangement comprising a diffractive optical element App 20020196547 - Kleemann, Bernd ;   et al. | 2002-12-26 |
Illumination system with a grating element App 20020186811 - Weiss, Markus ;   et al. | 2002-12-12 |
Diffraction grating and uses of a diffraction grating App 20020024735 - Kleemann, Bernd ;   et al. | 2002-02-28 |
Littrow grating and uses of a littrow grating App 20020008912 - Kleemann, Bernd ;   et al. | 2002-01-24 |