Klebanoff; Leonard E.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Klebanoff; Leonard E..The latest application filed is for "methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation".

Company Profile

0.17.15

Klebanoff; Leonard E. - Dublin CA
Klebanoff; Leonard E. - San Clemente CA
Klebanoff, Leonard E. - San Ciemente CA
Klebanoff, Leonard E. - San Ramon CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Ternary borides and borohydrides for hydrogen storage and method of synthesis Grant 11,192,783 - Stavila , et al. December 7, 2	2021-12-07
Nanostructured metal amides and nitrides for hydrogen storage Grant 10,000,377 - Stavila , et al. June 19, 2	2018-06-19
Particle and chemical control using tunnel flow Grant 9,759,912 - Chilese , et al. September 12, 2	2017-09-12
Methods and apparatus for use with extreme ultraviolet light having contamination protection Grant 9,389,180 - Chilese , et al. July 12, 2	2016-07-12
Particle control near reticle and optics using showerhead Grant 9,244,368 - Delgado , et al. January 26, 2	2016-01-26
Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation Grant 9,156,068 - Klebanoff , et al. October 13, 2	2015-10-13
Methods And Apparatus For Cleaning Objects In A Chamber Of An Optical Instrument By Generating Reactive Ions Using Photon Radiation App 20140374619 - Klebanoff; Leonard E. ; et al.	2014-12-25
Methods And Apparatus For Use With Extreme Ultraviolet Light Having Contamination Protection App 20140231659 - Chilese; Frank ; et al.	2014-08-21
Optical Component With Blocking Surface And Method Thereof App 20140158914 - Klebanoff; Leonard E. ; et al.	2014-06-12
Particle Control Near Reticle And Optics Using Showerhead App 20140085618 - Delgado; Gildardo R. ; et al.	2014-03-27
Particle And Chemical Control Using Tunnel Flow App 20140085724 - Chilese; Frank ; et al.	2014-03-27
Method for the protection of extreme ultraviolet lithography optics Grant 7,740,916 - Grunow , et al. June 22, 2	2010-06-22
Method For The Protection Of Extreme Ultraviolet Lithography Optics App 20100124723 - Grunow; Philip A. ; et al.	2010-05-20
Method for in-situ cleaning of carbon contaminated surfaces Grant 7,147,722 - Klebanoff , et al. December 12, 2	2006-12-12
Method and apparatus for debris mitigation for an electrical discharge source Grant 6,989,629 - Klebanoff , et al. January 24, 2	2006-01-24
Method and apparatus for debris mitigation for an electrical discharge source Grant 6,888,297 - Klebanoff , et al. May 3, 2	2005-05-03
Apparatus for in-situ cleaning of carbon contaminated surfaces App 20040211448 - Klebanoff, Leonard E. ; et al.	2004-10-28
Apparatus for in situ cleaning of carbon contaminated surfaces Grant 6,772,776 - Klebanoff , et al. August 10, 2	2004-08-10
Method and apparatus for debris mitigation for an electrical discharge source App 20040119394 - Klebanoff, Leonard E. ; et al.	2004-06-24
Method for removing carbon contamination from optic surfaces App 20040011381 - Klebanoff, Leonard E. ; et al.	2004-01-22
Self-cleaning optic for extreme ultraviolet lithography Grant 6,664,554 - Klebanoff , et al. December 16, 2	2003-12-16
Apparatus for in situ cleaning of carbon contaminated surfaces App 20030051739 - Klebanoff, Leonard E. ; et al.	2003-03-20
Self-cleaning optic for extreme ultraviolet lithography App 20020084425 - Klebanoff, Leonard E. ; et al.	2002-07-04
Extreme-UV lithography vacuum chamber zone seal App 20020048002 - Haney, Steven J. ; et al.	2002-04-25
Extreme-UV lithography vacuum chamber zone seal App 20020048003 - Haney, Steven J. ; et al.	2002-04-25
Extreme-UV lithography vacuum chamber zone seal Grant 6,333,775 - Haney , et al. December 25, 2	2001-12-25
Mitigation Of Radiation Induced Surface Contamination App 20010053414 - KLEBANOFF, LEONARD E. ; et al.	2001-12-20
Method for protection of lithographic components from particle contamination Grant 6,253,464 - Klebanoff , et al. July 3, 2	2001-07-03
Process for producing radiation-induced self-terminating protective coatings on a substrate Grant 6,231,930 - Klebanoff May 15, 2	2001-05-15
Protection of lithographic components from particle contamination Grant 6,153,044 - Klebanoff , et al. November 28, 2	2000-11-28

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