KLA-Tencor MIE GmbH

Patent Applications and Registrations

Patent applications and USPTO patent grants for KLA-Tencor MIE GmbH.The latest application filed is for "method for inspection and detection of defects on surfaces of disc-shaped objects and computer system with a software product for carrying out the method".

Company Profile

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KLA-Tencor MIE GmbH - Weilburg DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for focusing an object plane and optical assembly Grant 9,091,525 - Sulik , et al. July 28, 2	2015-07-28
Method for inspection and detection of defects on surfaces of disc-shaped objects and computer system with a software product for carrying out the method Grant 8,705,837 - Michelsson , et al. April 22, 2	2014-04-22
Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device Grant 8,582,113 - Heiden November 12, 2	2013-11-12
Apparatus for the optical inspection of wafers Grant 8,451,440 - Hahn , et al. May 28, 2	2013-05-28
Method for the reproducible determination of the position of structures on a mask with a pellicle frame Grant 8,352,886 - Laske , et al. January 8, 2	2013-01-08
Apparatus for the optical inspection of wafers Grant 8,305,587 - Heiden November 6, 2	2012-11-06
Method for Inspection and Detection of Defects on Surfaces of Disc-Shaped Objects and Computer System with a Software Product for Carrying out the Method App 20120163698 - Michelsson; Detlef	2012-06-28
Method for the Reproducible Determination of the Position of Structures on a Mask with a Pellicle Frame App 20110225554 - Laske; Frank ; et al.	2011-09-15
Method for focusing an object plane and optical assembly App 20110205553 - Sulik; Wolfgang ; et al.	2011-08-25
Apparatus for the optical inspection of wafers App 20110090483 - Heiden; Michael	2011-04-21
Metrology system and method for monitoring and correcting system generated errors App 20100302555 - Boesser; Hans-Artur ; et al.	2010-12-02
Apparatus for the Optical Inspection of Wafers App 20100295938 - Hahn; Kurt ; et al.	2010-11-25
Method of learning a knowledge-based database used in automatic defect classification Grant 7,623,698 - Soenksen , et al. November 24, 2	2009-11-24

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